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中国物理学会期刊
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GUO SHU-WEN, TAN SONG-SHENG, WANG WEI-YUAN. PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD μc-Si FILMSJ. Acta Physica Sinica, 1988, 37(11): 1794-1799. DOI: 10.7498/aps.37.1794
Citation: GUO SHU-WEN, TAN SONG-SHENG, WANG WEI-YUAN. PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD μc-Si FILMSJ. Acta Physica Sinica, 1988, 37(11): 1794-1799. DOI: 10.7498/aps.37.1794
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PIEZORESISTIVE PROPERTIES OF BORON-DOPED PECVD μc-Si FILMS

Acta Phys. Sin., 1988, 37(11): 1794-1799.
DOI: 10.7498/aps.37.1794
CSTR: 32037.14.aps.37.1794
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