A STUDY ON AS-GROWN SWIRL DEFECTS IN CZ SILICON CRYSTAL

Duan Pei Gao Ping Tang Ji-you

doi:10.7498/aps.36.986

Duan Pei Gao Ping Tang Ji-you. A STUDY ON AS-GROWN SWIRL DEFECTS IN CZ SILICON CRYSTALJ. Acta Physica Sinica, 1987, 36(8): 986-991. DOI: 10.7498/aps.36.986

Citation:

Duan Pei Gao Ping Tang Ji-you. A STUDY ON AS-GROWN SWIRL DEFECTS IN CZ SILICON CRYSTALJ. Acta Physica Sinica, 1987, 36(8): 986-991. DOI: 10.7498/aps.36.986

Citation:

Duan Pei Gao Ping Tang Ji-you. A STUDY ON AS-GROWN SWIRL DEFECTS IN CZ SILICON CRYSTALJ. Acta Physica Sinica, 1987, 36(8): 986-991. DOI: 10.7498/aps.36.986