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中国物理学会期刊
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WANG FANG-PING, XU JIAN-GUO, SUN HENG-HUI. STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n+ SiJ. Acta Physica Sinica, 1987, 36(5): 646-650. DOI: 10.7498/aps.36.646
Citation: WANG FANG-PING, XU JIAN-GUO, SUN HENG-HUI. STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n+ SiJ. Acta Physica Sinica, 1987, 36(5): 646-650. DOI: 10.7498/aps.36.646
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STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n+ Si

Acta Phys. Sin., 1987, 36(5): 646-650.
DOI: 10.7498/aps.36.646
CSTR: 32037.14.aps.36.646
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