Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometry

Chen Xiu-Guo; Liu Shi-Yuan; Zhang Chuan-Wei; Wu Yi-Ping; Ma Zhi-Chao; Sun Tang-You; Xu Zhi-Mou

doi:10.7498/aps.63.180701

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Chen Xiu-Guo, Liu Shi-Yuan, Zhang Chuan-Wei, Wu Yi-Ping, Ma Zhi-Chao, Sun Tang-You, Xu Zhi-Mou. Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometryJ. Acta Physica Sinica, 2014, 63(18): 180701. DOI: 10.7498/aps.63.180701

Citation:

Chen Xiu-Guo, Liu Shi-Yuan, Zhang Chuan-Wei, Wu Yi-Ping, Ma Zhi-Chao, Sun Tang-You, Xu Zhi-Mou. Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometryJ. Acta Physica Sinica, 2014, 63(18): 180701. DOI: 10.7498/aps.63.180701

Citation:

Chen Xiu-Guo, Liu Shi-Yuan, Zhang Chuan-Wei, Wu Yi-Ping, Ma Zhi-Chao, Sun Tang-You, Xu Zhi-Mou. Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometryJ. Acta Physica Sinica, 2014, 63(18): 180701. DOI: 10.7498/aps.63.180701