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ON THE LINEAR TRANSFORMATIONS OF GAUSSIAN TRAJEC-TORY PARAMETERS AND THEIR INFLUENCE UPON ELECTRON OPTICAL ABERRATIONS

XIMEN JI-YE

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ON THE LINEAR TRANSFORMATIONS OF GAUSSIAN TRAJEC-TORY PARAMETERS AND THEIR INFLUENCE UPON ELECTRON OPTICAL ABERRATIONS

XIMEN JI-YE
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  • In this paper, we describe electron trajectory by vector form and express aberra-tions in matrix form. According to the more general viewpoint, we discuss some general linear transformations of gaussian trajectory parameters. The third order aberrations, aberration coefficients and their partial differentials in an electron optical system undergone these transformations are derived. Therefore the general electron optical Fraunhofer conditions for correcting isotropic and anisotropic coma are obtained. It is shown that under this condition, astigmatism and field curvature have extreme or stationary values. According to these results, some concrete problems are discussed; for example, the effect of aperture position on aberrations in the fixed or scanned electron beam systems, and the effect of magnetic immersion on aberrations in the emission electron system (cathode lens).
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  • Abstract views:  7529
  • PDF Downloads:  420
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  • Received Date:  23 July 1980
  • Published Online:  05 February 1981

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