基于线性成像系统的光学超分辨显微术回顾

胡睿璇; 潘冰洋; 杨玉龙; 张伟华

doi:10.7498/aps.66.144209

摘要

随着纳米科学技术的发展，如何打破光学衍射极限，将光学显微术的分辨本领推进到纳米尺度，已经成为光学领域的一个核心议题.在此背景下，过去的三十年间，发展了多种超分辨光学显微技术，并在生物、材料、化学领域取得了一系列令人瞩目的应用.本文以衍射理论为线索，回顾各类基于线性成像系统的超分辨光学显微技术；对以固浸物镜、结构光照明、扫描近场光学显微术、完美透镜以及超振荡透镜为代表的超分辨光学显微技术进行综述，讨论各种技术的原理，对其特点、应用与局限加以总结，并对该领域的未来发展予以展望.

关键词:

衍射极限 /
空间频率 /
超分辨

Abstract

In the last few decades, nanoscience and nanotechnology have been growing with breath taking speed, and how to break through the diffraction limit and tame the light on a nanoscale have become the major challenges in optics. In this field, several super-resolution optical nanoscopy techniques have been developed, leading to a series of breakthroughs in physics, chemistry, and life sciences. In the work, we give a retrospect of the newly developed techniques in diffraction theory of linear optical systems, including the solid immersion lens, structured light illumination microscopy, scanning near-field optical microscopy, metamaterial-based wide field near-field imaging technique and super-oscillatory lens. Brief discussion on their principles, advantages and applications is also provided.

Keywords:

作者及机构信息

1.
南京大学现代工程与应用科学学院, 南京大学固体微结构物理国家重点实验室, 南京大学人工微结构科学与技术协同创新中心, 南京 210093

通信作者: 张伟华, zwh@nju.edu.cn

基金项目: 国家重点研发计划（批准号：2016YFA0201104）、国家重点基础研究发展计划（批准号：2015CB659400）和国家自然科学基金（批准号：11374152，11574142，11621091）资助的课题.

Authors and contacts

1.
Collaborative Innovation Center of Advanced Microstructures, National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China

Corresponding author: Zhang Wei-Hua, zwh@nju.edu.cn

Funds: Project supported by the National Key Technologies RD Program of China (Grant No. 2016YFA0201104), the National Basic Research Program of China (Grant No. 2015CB659400), and the National Natural Science Foundation of China (Grant Nos. 11374152, 11574142, 11621091).

参考文献

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[82]	Zhang R, et al. 2013 Nature 498 82
[83]	Knoll B, Keilmann F 2000 Opt. Commun. 182 321
[84]	Keilmann F, Hillenbrand R 2004 Philos. Trans. A 362 787
[85]	Huth F, et al. 2011 Nat. Mater. 10 352
[86]	Huth F, et al. 2012 Nano Lett. 12 3973
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[88]	Huth F, et al. 2013 Nano Lett. 13 1065
[89]	Hermann P, et al. 2014 Opt. Express 22 17948
[90]	Chen J, et al. 2012 Nature 487 77
[91]	Fei Z, et al. 2012 Nature 487 82
[92]	Dai S, et al. 2014 Science 343 1125
[93]	Li P, et al. 2015 Nat. Commun. 6 7507
[94]	Jaque D, Vetrone F 2012 Nanoscale 4 430
[95]	Michaelis J, et al. 2000 Nature 405 325
[96]	Ebenstein Y, Mokari T, Banin U 2004 J. Phys. Chem. B 108 93
[97]	Wagner C, et al. 2015 Phys. Rev. Lett. 115 026101
[98]	Khn S, et al. 2001 J. Microsc. 202 2
[99]	Pendry J B 2000 Phys. Rev. Lett. 85 3966
[100]	Luo X G, Ishihara T 2004 Appl. Phys. Lett. 84 4780
[101]	Liu Z W, et al. 2007 Science 315 1686
[102]	Xiong Y, Liu Z, Zhang X 2009 Appl. Phys. Lett. 94 203108
[103]	Ren G, et al. 2013 Plasmonics 8 1065
[104]	Gao P, et al. 2015 Appl. Phys. Lett. 106 093110
[105]	Ono A, Kato J, Kawata S 2005 Phys. Rev. Lett. 95 267407
[106]	Ikonen P, et al. 2007 Appl. Phys. Lett. 91 104102
[107]	Shvets G, et al. 2007 Phys. Rev. Lett. 99 053903
[108]	Han S, et al. 2008 Nano Lett. 8 4243
[109]	Kildishev A V, Shalaev V M 2008 Opt. Lett. 33 43
[110]	Tsang M, Psaltis D 2008 Phys. Rev. B 77 035122
[111]	Li J, et al. 2009 Opt. Lett. 34 3128
[112]	Smolyaninov II, et al. 2005 Phys. Rev. Lett. 94 057401
[113]	Hu H, Ma C, Liu Z 2010 Appl. Phys. Lett. 96 113107
[114]	Wei F F, Liu Z W 2010 Nano Lett. 10 2531
[115]	Yuan G, Wang Q, Yuan X 2012 Opt. Lett. 37 2715
[116]	Berry M V, Popescu S 2006 J. Phys. A 39 6965
[117]	Ferreira P J S G, Kempf A 2006 IEEE Trans. Sig. Proc. 54 3732
[118]	Huang F M, et al. 2007 Appl. Phys. Lett. 90 091119
[119]	Huang F M, Zheludev N I 2009 Nano Lett. 9 1249
[120]	Rogers E T F, et al. 2013 Appl. Phys. Lett. 102 031108
[121]	Baumgartl J, et al. 2011 Appl. Phys. Lett. 98 181109
[122]	Kosmeier S, et al. 2011 J. Opt. 13 105707
[123]	Tang D L, et al. 2015 Laser Photon. Rev. 9 713
[124]	Zhang Y, et al. 2010 Phys. Rev. Lett. 104 183901
[125]	Liu D, Zhang Y, Wen J, et al. 2014 Sci. Rep. 4 6134
[126]	Huang B, Bates M, Zhuang X W 2009 Annu. Rev. Biochem. 78 993
[127]	Chen B C, et al. 2014 Science 346 439
[128]	Legant W R, et al. 2016 Nat. Methods 13 359
[129]	Wang H, Han S, Kolobov M I 2012 Opt. Express 20 23235
[130]	Nair R, Tsang M 2016 Phys. Rev. Lett. 117 190801

施引文献

[1]	Bradbury S 1967 The Evolution of the Microscope (London: Pregamon Press Ltd.)
[2]	Abbe E 1873 Archiv fr Mikroskopische Anatomie 9 413
[3]	Borm M, Wolf E 1980 Principle of Optics (New York: Pergamon)
[4]	Synge E H 1928 Phil. Mag. 6 356
[5]	Novotny L, Hecht B 2012 Principles of Nano-Optics (Cambridge: Cambridge University Press)
[6]	Betzig E, Trautman J K, Harris T D, et al. 1991 Science 251 1468
[7]	Betzig E, Trautman J K 1992 Science 257 189
[8]	Ash E A, Nicholls G 1972 Nature 237 510
[9]	Lewis A, Isaacson M, Harootunian A, Muray A 1984 Ultramicroscopy 13 227
[10]	Pohl D W, Denk W, Lanz M 1984 Appl. Phys. Lett. 44 651
[11]	Binnig G R H 1981 IBM J. Res. Dev. 30 355
[12]	Thomas A K, Hell S W 1999 Opt. Lett. 24 954
[13]	Rust M J, Bates M, Zhuang X 2006 Nat. Methods 3 793
[14]	Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534
[15]	Taubner T, Korobkin D, Urzhumov Y, et al. 2006 Science 313 1595
[16]	Smolyaninov II, Hung Y J, Davis C C 2007 Science 315 1699
[17]	Gustafsson M G L 2000 J. Microsc. 198 82
[18]	Hell S W, Wichmann J 1994 Opt. Lett. 19 780
[19]	Betzig E, et al. 2006 Science 313 1642
[20]	Rogers E T F, et al. 2012 Nat. Materials 11 432
[21]	Hell S W 2007 Science 316 1153
[22]	Jones S A, Shim S H, He J, Zhuang X W 2011 Nat. Methods 8 499
[23]	Pohl D W, Kawata S 2001 Near-Field Optics and Surface Plasmon Polaritons (Germany: Springer-Verlag)
[24]	Serrels K A, Ramsay E, Dalgarno P A, et al. 2008 J. Nanophoton. 2 021854
[25]	Mansfield S M, Kino G S 1990 Appl. Phys. Lett. 57 2615
[26]	Terris B D, Mamin H J, Rugar D 1994 Appl. Phys. Lett. 65 388
[27]	Ghislain L P, Elings V B 1999 Appl. Phys. Lett. 74 501
[28]	Wu Q, Feke C D, Crober R D 1999 Appl. Phys. Lett. 75 4064
[29]	Ippolito S B, Goldberg B B, Unlu M S 2001 Appl. Phys. Lett. 78 4071
[30]	Liu Z H, et al. 2005 Appl. Phys. Lett. 87 071905
[31]	Serrels K A, et al. 2008 Nat. Photon. 2 311
[32]	Lee J Y, et al. 2009 Nature 460 498
[33]	Mason D R, Jouravlev M V, Kim K S 2010 Opt. Lett. 35 2007
[34]	Wang Z, et al. 2011 Nat. Commun. 2 218
[35]	Lukosz W, Marchand M 1963 J. Mod. Opt. 10 241
[36]	Heintzmann R, Cremer C 1999 Proc. SPIE 3568 185
[37]	Frohn J T, Knapp H F, Stemmer A 2000 Proc. Nat. Acad. Sci. USA 97 7232
[38]	Gustafsson M G L, Agard D A, Sedat J W 2000 Proc. SPIE 3919 141
[39]	Neil M A A, Juskaitis R, Wilson T 1997 Opt. Lett. 22 1905
[40]	Gustafsson M G L., et al. 2008 Biophys. J. 94 4957
[41]	Schermelleh L, et al. 2008 Science 320 1332
[42]	Gustafsson M G L 2005 Proc. Nat. Acad. Sci. USA 102 13081
[43]	Kner P, et al. 2009 Nat. Methods 6 339
[44]	Planchon T A, et al. 2011 Nat. Methods 8 417
[45]	Demmerle J, et al. 2017 Nat. Protoc. 12 988
[46]	Weisenburger S, Sandoghdar V 2015 Contemp. Phys. 56 123
[47]	De Wilde Y, et al. 2006 Nature 444 740
[48]	Betzig E, Finn P, Weiner J 1992 Appl. Phys. Lett. 60 2484
[49]	Betzig E, Chichester R J 1993 Science 262 1422
[50]	Trautman J K, et al. 1994 Nature 369 40
[51]	Xie X S, Dunn R C 1994 Science 265 361
[52]	Matsuda K, et al. 2003 Phys. Rev. Lett. 91 177401
[53]	Moerland R J, van Hulst N F 2005 Opt. Express 13 1604
[54]	Taminiau T H, et al. 2007 Nano Lett. 7 28
[55]	Rotenberg N, Kuipers L 2014 Nat. Photon. 8 919
[56]	Reddick R, Warmack R, Ferrell T 1989 Phys. Rev. B 39 767
[57]	Balistreri M, et al. 2001 Science 294 1080
[58]	Balistreri M, et al. 2000 Phys. Rev. Lett. 85 294
[59]	Veerman J A, et al. 1998 Appl. Phys. Lett. 72 3115
[60]	Dunn R C 1999 Chem. Rev. 99 2891
[61]	Knoll B, Keilmann F 1999 Nature 399 134
[62]	Snchez E J, Novotny L, Xie X S 1999 Phys. Rev. Lett. 82 4014
[63]	Gerton J M, et al. 2004 Phys. Rev. Lett. 93180801
[64]	Anger P, Bharadwaj P, Novotny L 2006 Phys. Rev. Lett. 96 113002
[65]	Hppener C, Novotny L 2008 Nano Lett. 8 642
[66]	Eghlidi H, et al. 2009 Nano Lett. 9 4007
[67]	Tam F, et al. 2007 Nano Lett. 7 496
[68]	Wientjes E, et al. 2014 Nat. Commun. 5 4236
[69]	Kneipp K, et al. 2002 J. Phys. 14 R597
[70]	Anderson M S 2000 Appl. Phys. Lett. 76 3130
[71]	Hayazawa N, et al. 2000 Opt. Commun. 183 333
[72]	Stckle R M, et al. 2000 Chem. Phys. Lett. 318 131
[73]	Hartschuh A., et al. 2003 Phys. Rev. Lett. 90 095503
[74]	Ren B, Picardi G, Pettinger B 2004 Rev. Sci. Instru. 75 837
[75]	Yeo B S, et al. 2007 Anal. Bioanal. Chem. 387 2655
[76]	Zhang W, et al. 2007 J. Phys. Chem. C 111 1733
[77]	Ichimura T, et al. 2007 J. Phys. Chem. C 111 9460
[78]	Domke K F, Zhang D, Pettinger B 2006 J. Am. Chem. Soc. 128 147217
[79]	Neacsu C C, et al. 2006 Phys. Rev. B 73 193406
[80]	Pettinger B, et al. 2004 Phys. Rev. Lett. 92 096101
[81]	Steidtner J, Pettinger B 2008 Phys. Rev. Lett. 100 236101
[82]	Zhang R, et al. 2013 Nature 498 82
[83]	Knoll B, Keilmann F 2000 Opt. Commun. 182 321
[84]	Keilmann F, Hillenbrand R 2004 Philos. Trans. A 362 787
[85]	Huth F, et al. 2011 Nat. Mater. 10 352
[86]	Huth F, et al. 2012 Nano Lett. 12 3973
[87]	Amenabar I, et al. 2013 Nat. Commun. 4 2890
[88]	Huth F, et al. 2013 Nano Lett. 13 1065
[89]	Hermann P, et al. 2014 Opt. Express 22 17948
[90]	Chen J, et al. 2012 Nature 487 77
[91]	Fei Z, et al. 2012 Nature 487 82
[92]	Dai S, et al. 2014 Science 343 1125
[93]	Li P, et al. 2015 Nat. Commun. 6 7507
[94]	Jaque D, Vetrone F 2012 Nanoscale 4 430
[95]	Michaelis J, et al. 2000 Nature 405 325
[96]	Ebenstein Y, Mokari T, Banin U 2004 J. Phys. Chem. B 108 93
[97]	Wagner C, et al. 2015 Phys. Rev. Lett. 115 026101
[98]	Khn S, et al. 2001 J. Microsc. 202 2
[99]	Pendry J B 2000 Phys. Rev. Lett. 85 3966
[100]	Luo X G, Ishihara T 2004 Appl. Phys. Lett. 84 4780
[101]	Liu Z W, et al. 2007 Science 315 1686
[102]	Xiong Y, Liu Z, Zhang X 2009 Appl. Phys. Lett. 94 203108
[103]	Ren G, et al. 2013 Plasmonics 8 1065
[104]	Gao P, et al. 2015 Appl. Phys. Lett. 106 093110
[105]	Ono A, Kato J, Kawata S 2005 Phys. Rev. Lett. 95 267407
[106]	Ikonen P, et al. 2007 Appl. Phys. Lett. 91 104102
[107]	Shvets G, et al. 2007 Phys. Rev. Lett. 99 053903
[108]	Han S, et al. 2008 Nano Lett. 8 4243
[109]	Kildishev A V, Shalaev V M 2008 Opt. Lett. 33 43
[110]	Tsang M, Psaltis D 2008 Phys. Rev. B 77 035122
[111]	Li J, et al. 2009 Opt. Lett. 34 3128
[112]	Smolyaninov II, et al. 2005 Phys. Rev. Lett. 94 057401
[113]	Hu H, Ma C, Liu Z 2010 Appl. Phys. Lett. 96 113107
[114]	Wei F F, Liu Z W 2010 Nano Lett. 10 2531
[115]	Yuan G, Wang Q, Yuan X 2012 Opt. Lett. 37 2715
[116]	Berry M V, Popescu S 2006 J. Phys. A 39 6965
[117]	Ferreira P J S G, Kempf A 2006 IEEE Trans. Sig. Proc. 54 3732
[118]	Huang F M, et al. 2007 Appl. Phys. Lett. 90 091119
[119]	Huang F M, Zheludev N I 2009 Nano Lett. 9 1249
[120]	Rogers E T F, et al. 2013 Appl. Phys. Lett. 102 031108
[121]	Baumgartl J, et al. 2011 Appl. Phys. Lett. 98 181109
[122]	Kosmeier S, et al. 2011 J. Opt. 13 105707
[123]	Tang D L, et al. 2015 Laser Photon. Rev. 9 713
[124]	Zhang Y, et al. 2010 Phys. Rev. Lett. 104 183901
[125]	Liu D, Zhang Y, Wen J, et al. 2014 Sci. Rep. 4 6134
[126]	Huang B, Bates M, Zhuang X W 2009 Annu. Rev. Biochem. 78 993
[127]	Chen B C, et al. 2014 Science 346 439
[128]	Legant W R, et al. 2016 Nat. Methods 13 359
[129]	Wang H, Han S, Kolobov M I 2012 Opt. Express 20 23235
[130]	Nair R, Tsang M 2016 Phys. Rev. Lett. 117 190801

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