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Reflection high energy electron diffraction (RHEED) is used to monitor the two-step desorption of oxides on InAs(001) surface in the vacuum chamber, and the high temperature indium-assisted desorption processes of surface oxides under high arsenic pressure and low arsenic pressure are compared. The first step of two-step deoxidation method for InAs substrate is to heat the substrate slowly at high temperature. The second step is high temperature indium beam-assisted desorption of surface oxides. The RHEED patterns of sample at high temperature desorption of oxides show that the high temperature indium beam-assisted desorption of InAs surface oxide method could eventually clear residual oxide that the traditional slow heating method cannot remove. The scanning tunneling microscope images of sample after homogeneous epitaxial growth prove the viability of high-heat indium beam-assisted desorption of InAs surface oxide under high arsenic pressure. Finally, we analyse the mechanism of high-heat indium beam assisted desorption of surface oxides of substrate.
[1] Zhao F A, Zhang C L, Wang Z G 2004 Physics 33 249 (in Chinese) [赵凤瑷, 张春玲, 王占国 2004 物理 33 249]
[2] Wang Z G 1998 World Sci-tech R D 20 51 (in Chinese) [王占国 1998 世界科技研究与发展 20 51]
[3] L F, Wang Y B, Zhang W C, Zhao Q 2009 Semicond. Technol. 34 745 (in Chinese) [吕菲, 王云彪, 张伟才, 赵权 2009 半导体技术 34 745]
[4] Liu B, Fang G Z, Zhang J M, Ma X Y, Xiao J W 2003 Laser J. 24 22 (in Chinese) [刘斌, 方高瞻, 张敬明, 马晓宇, 肖建伟 2003 激光杂志 24 22]
[5] Schäfer M, Naumann W, Finnberg T, Hannss M, Dutschke A, Anton R 2000 Appl. Surf. Sci. 158 147
[6] Zhou X, Luo Z J, Guo X, Zhang B C, Shang L T, Zhou Q, Deng C Y, Ding Z 2012 Chin. Phys. B 21 046103
[7] Zhou X, Yang Z R, Luo Z J, He Y Q, He H, Wei J, Deng C Y, Ding Z 2011 Acta Phys. Sin. 60 016109 (in Chinese) [周勋, 杨再荣, 罗子江, 贺业全, 何浩, 韦俊, 邓朝勇, 丁召 2011 60 016109]
[8] Hollinger G, Skheyta-Kabbani R, Gendry M 1994 Phys. Rev. B 49 11159
[9] Hu W J, Zhao Y W, Duan M L, Wang Y L, Wang J 2010 J. Synth. Cryst. 39 878 (in Chinese) [胡炜杰, 赵有文, 段满龙, 王应利, 王俊 2010 人工晶体学报 39 878]
[10] Dean J A 1999 Lange’s Handbook of Chemistry (15th Ed) (New York: McGraw-Hill, Inc.) Section 4 4.45–4.47
[11] Li L H, Linfield E H, Sharma R, Davies A G 2011 Appl. Phys. Lett. 99 061910
[12] Mei L M, Chen L X 1984 J. Shandong Univ. (Natural Science) 1 28 (in Chinese) [梅良模, 陈立信 1984 山东大学学报(自然科学版) 1 28]
[13] Valderrama-N J, Jacob K T 1977 Thermochimica Acta 21 215
[14] LaBella V P, Ding Z, Bullock D W, Emery C, Thibado P M 2001 Int. J. Mod. Phys. B 15 2301
[15] Shen J, Melitz W, Feldwinn D L, Lee S, Droopad R, Kummel A C 2010 ECS Trans. 33 105
[16] Luo Z J, Zhou X, Wang J H, Guo X, Zhang B C, Zhou Q, Liu K, Ding Z 2013 Acta Phys. Sin. 62 036802 (in Chinese) [罗子江, 周勋, 王继红, 郭祥, 张毕禅, 周清, 刘珂, 丁召 2013 62 036802]
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[1] Zhao F A, Zhang C L, Wang Z G 2004 Physics 33 249 (in Chinese) [赵凤瑷, 张春玲, 王占国 2004 物理 33 249]
[2] Wang Z G 1998 World Sci-tech R D 20 51 (in Chinese) [王占国 1998 世界科技研究与发展 20 51]
[3] L F, Wang Y B, Zhang W C, Zhao Q 2009 Semicond. Technol. 34 745 (in Chinese) [吕菲, 王云彪, 张伟才, 赵权 2009 半导体技术 34 745]
[4] Liu B, Fang G Z, Zhang J M, Ma X Y, Xiao J W 2003 Laser J. 24 22 (in Chinese) [刘斌, 方高瞻, 张敬明, 马晓宇, 肖建伟 2003 激光杂志 24 22]
[5] Schäfer M, Naumann W, Finnberg T, Hannss M, Dutschke A, Anton R 2000 Appl. Surf. Sci. 158 147
[6] Zhou X, Luo Z J, Guo X, Zhang B C, Shang L T, Zhou Q, Deng C Y, Ding Z 2012 Chin. Phys. B 21 046103
[7] Zhou X, Yang Z R, Luo Z J, He Y Q, He H, Wei J, Deng C Y, Ding Z 2011 Acta Phys. Sin. 60 016109 (in Chinese) [周勋, 杨再荣, 罗子江, 贺业全, 何浩, 韦俊, 邓朝勇, 丁召 2011 60 016109]
[8] Hollinger G, Skheyta-Kabbani R, Gendry M 1994 Phys. Rev. B 49 11159
[9] Hu W J, Zhao Y W, Duan M L, Wang Y L, Wang J 2010 J. Synth. Cryst. 39 878 (in Chinese) [胡炜杰, 赵有文, 段满龙, 王应利, 王俊 2010 人工晶体学报 39 878]
[10] Dean J A 1999 Lange’s Handbook of Chemistry (15th Ed) (New York: McGraw-Hill, Inc.) Section 4 4.45–4.47
[11] Li L H, Linfield E H, Sharma R, Davies A G 2011 Appl. Phys. Lett. 99 061910
[12] Mei L M, Chen L X 1984 J. Shandong Univ. (Natural Science) 1 28 (in Chinese) [梅良模, 陈立信 1984 山东大学学报(自然科学版) 1 28]
[13] Valderrama-N J, Jacob K T 1977 Thermochimica Acta 21 215
[14] LaBella V P, Ding Z, Bullock D W, Emery C, Thibado P M 2001 Int. J. Mod. Phys. B 15 2301
[15] Shen J, Melitz W, Feldwinn D L, Lee S, Droopad R, Kummel A C 2010 ECS Trans. 33 105
[16] Luo Z J, Zhou X, Wang J H, Guo X, Zhang B C, Zhou Q, Liu K, Ding Z 2013 Acta Phys. Sin. 62 036802 (in Chinese) [罗子江, 周勋, 王继红, 郭祥, 张毕禅, 周清, 刘珂, 丁召 2013 62 036802]
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