热压法制备的碲酸盐玻璃微盘

胡博; 吴越豪; 郑雨璐; 戴世勋

doi:10.7498/aps.68.20191051

摘要

提出一种热压法制备微盘激光器的工艺, 仅使用实验室常用电阻加热炉具即可制备出不同直径/厚度的微盘激光器. 选用TeO₂-ZnO-Na₂O碲酸盐玻璃为基质材料, 制备出直径分布在100—400 μm范围内、最小厚度可达8 μm、典型品质因数(Q值)约为10⁵的微盘激光器. 对碲酸盐玻璃基质材料掺入稀土离子Nd³⁺和Tm³⁺, 通过光纤锥耦合法开展微盘的抽运耦合实验, 即可在耦合系统的输出光谱中获得明显的荧光回廊模式和激光模式. 以一颗直径为105.74 μm、厚度为10.4 μm的Nd³⁺掺杂微盘为例, 当抽运光功率提升至1.364 mW以上时, 即可在1.06 μm附近获得激光峰. 同样实验表明, 对Tm³⁺掺杂的微盘进行抽运耦合实验可获得1.9 μm附近的激光峰.

关键词:

Abstract

In this work, we report a two-step thermal pressing method of fabricating microdisk lasers that are suitable for processing thermally stable glass materials, and we utilize a tellurite glass (TeO₂-ZnO-Na₂O) to demonstrate the feasibility of this method. Compared with the conventional microdisk fabricating methods that rely on a series of complicated procedures, such as lithography, etching, thermal reflow, and ion implantation, this thermal pressing method involves only two heating procedures and can be accomplished with simple laboratory resistive heating furnaces. In the first heating procedure, we crush bulk tellurite glass into powders and drop those powders through a vertical heating furnace. Glass powders are transformed into microspheres by surface tension in the furnace. In the second heating procedure, microspheres are placed between two flat/smooth surfaces and are thermally treated when being pressed with suitable weights. With this procedure, the “flattened” microspheres turn into the microdisks. In this work, we demonstrate that our fabricated tellurite glass microdisks possess diameters of 100－400 μm, thinnest thickness of ～ 8 μm, and typical quality-factor (Q-factor) of ～ 10⁵. We also dope tellurite glass with active dopants such as Nd³⁺ and Tm³⁺ to fabricate the active microdisk resonators. We couple those active microdisk resonators with fiber tapers and demonstrate that with appropriate pump power, apparent fluorescence whispering gallery mode and laser mode can be obtained. Taking a 105.74-μm-diameter, 10.4-μm-thickness, and Nd³⁺-doped tellurite glass microdisk for example, we show that as the pump power increases above a threshold of 1.364 mW, a lasing peak near 1.06 μm can be obtained. We also show that lasing peaks near 1.9 μm can be obtained by coupling/pumping Tm³⁺ doped microdisks.

Keywords:

作者及机构信息

1.
宁波大学信息科学与工程学院, 宁波　315211

2.
宁波大学高等技术研究院, 红外材料及器件实验室, 宁波　315211

3.
浙江省光电探测材料及器件重点实验室, 宁波　315211

通信作者: 吴越豪, wuyuehao@nbu.edu.cn

基金项目: 国家自然科学青年基金(批准号: 61605094)、国家自然科学基金重点项目(批准号: 61435009)和宁波大学王宽诚幸福基金资助的课题

Authors and contacts

1.
Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China

2.
Advanced Technology Research Institute, Laboratory of Infrared Materials and Devices, Ningbo University, Ningbo 315211, China

3.
Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China

Corresponding author: Wu Yue-Hao, wuyuehao@nbu.edu.cn

Funds: Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 61605094), the Key Program of the National Natural Science Foundation of China (Grant No., 61435009), and the K. C. Wong Magna Fund in Ningbo University

文章全文 : translate this paragraph

参考文献

[1]	Sandoghdar V, Treussart F, Hare J, Lefevre-Seguin V, Raimond J, Haroche S 1996 Phys. Rev. A 54 R1777 Google Scholar
[2]	Murugan G S, Zervas M N, Panitchob Y, Wilkinson J S 2011 Opt. Lett. 36 73 Google Scholar
[3]	黄衍堂, 彭隆祥, 庄世坚, 李强龙, 廖廷俤, 许灿华, 段亚凡 2017 66 244208 Google Scholar Huang Y T, Peng L X, Zhuang S J, Li Q L, Liao Y D, Xu C H, Duan Y F 2017 Acta Phys. Sin. 66 244208 Google Scholar
[4]	Gorajoobi S B, Murugan G S, Zervas M N 2019 Opt. Express 27 25493 Google Scholar
[5]	Qian K, Tang J, Guo H, Zhang W, Liu J H, Liu J, Xue C Y, Zhang W D 2016 Chin. Phys. B 25 114209 Google Scholar
[6]	Vernooy D W, Ilchenko V S, Mabuchi H, Streed E W, Kimble H J 1998 Opt. Lett. 23 247 Google Scholar
[7]	Sasagawa K, Yonezawa Z, Iwai R, Ohta J, Nunoshita M 2004 Appl. Phys. Lett. 85 4325 Google Scholar
[8]	Peng X, Song F, Jiang S, Peyghambarian N, Kuwata-Gonokami M, Xu L 2003 Appl. Phys. Lett. 82 1497 Google Scholar
[9]	Elliott G R, Hewak D W, Murugan G S, Wilkinson J S 2007 Opt. Express 15 17542 Google Scholar
[10]	Li C, Dai S, Zhang Q, Shen X, Wang X, Zhang P, Lu L, Wu Y, Lv S 2015 Chin. Phys. B 24 044208 Google Scholar
[11]	胡博, 吴越豪, 郑雨璐, 戴世勋 2019 68 064209 Google Scholar Hu B, Wu Y H, Zheng Y L, Dai S X 2019 Acta Phys. Sin. 68 064209 Google Scholar
[12]	Yang K, Dai S X, Wu Y H, Nie Q H 2018 Chin. Phys. B 27 117701 Google Scholar
[13]	Spillane S M, Kippenberg T J, Vahala K J, Goh K W, Wilcut E, Kimble H J 2005 Phys. Rev. A 71 013817 Google Scholar
[14]	Kippenberg T J, Spillane S M, Vahala K J 2004 Appl. Phys. Lett. 85 6113 Google Scholar
[15]	Wang T J, He J Y, Lee C A, Niu H 2012 Opt. Express 20 028119 Google Scholar
[16]	Tulek A, Akbulut D, Bayindir M 2009 Appl. Phys. Lett. 94 203302 Google Scholar
[17]	Polman A, Min B, Kalkman J, Kippenberg T J, Vahala K J 2004 Appl. Phys. Lett. 84 1037 Google Scholar
[18]	Zou L X, Liu B W, Lv X M, Yang Y D, Xiao J L, Huang Y Z 2015 Appl. Phys. Lett. 106 191107 Google Scholar
[19]	Yang Z, Wu Y, Yang K, Xu P, Zhang W, Dai S, Xu T 2017 Opt. Mat. 72 524 Google Scholar
[20]	Li A Z, Zhang J Q, Zhang M, Li W H, Wang S B, Lewis E, Brambilla G, Wang P F 2018 Opt. Lett. 43 4325 Google Scholar
[21]	Jiang S S, Guo C L, Che K J, Luo Z Q, Du T J, Fu H Y, Xu H Y, Cai Z P 2019 Photon. Res. 7 566 Google Scholar

施引文献

图 1 实验制备的一批典型的碲酸盐玻璃微球(内插图为一颗直径为92.13 μm的碲酸盐玻璃微球的SEM图)

Fig. 1. A typical batch of tellurite glass microspheres fabricated in this work. Inset: SEM image of a 92.13-μm diameter tellurite glass microdisk laser.

下载: 全尺寸图片幻灯片

图 2 第二次加热示意图

Fig. 2. Schematic drawing of the second heating procedure.

下载: 全尺寸图片幻灯片

图 3 由一个直径为101.56 μm的微球压出的直径为254.78 μm的微盘谐振腔的SEM照片　(a)俯视图; (b)侧视图

Fig. 3. (a) Top-view and (b) side-view of a 254.78-μm-diameter microdisk fabricated with a 101.56-μm-diameter microsphere.

下载: 全尺寸图片幻灯片

图 4 由一个直径为62.48 μm的微球压出的直径为101.52 μm的微盘谐振腔的SEM照片　(a)俯视图; (b)侧视图

Fig. 4. (a) Top-view and (b) side-view of a 101.52-μm-diameter microdisk fabricated with a 62.48-μm-diameter microsphere.

下载: 全尺寸图片幻灯片

图 5 (a)一颗直径为105.74 μm的微盘与一根锥腰直径为1.83 μm的光纤锥耦合图; (b)在1551.0058 nm处获取的吸收峰(Q值为6.2 × 10⁵)

Fig. 5. (a) A 105.74-μm-diameter microdisk coupled with a 1.83-μm-waist-diameter fiber taper; (b) a typical absorption peak at 1551.0058 nm, representing a Q-factor of 6.2 × 10⁵.

下载: 全尺寸图片幻灯片

图 6 (a)从一颗掺Nd³⁺的有源微盘谐振腔中获取的不同抽运功率下的回廊模; (b)微盘谐振腔的激光阈值现象(内插图为微盘谐振腔在抽运阈值附近(1.177 mW和1.364 mW)出现的激光峰)

Fig. 6. (a) Whispering gallery mode patterns obtained with a Nd³⁺-doped tellurite glass microdisk at different pump powers; (b) threshold behavior of the microdisk laser. Inset in panel (b) shows the transmission spectra of the coupling system at pump powers of 1.177 mW and 1.364 mW.

下载: 全尺寸图片幻灯片

图 7 从一颗掺Tm³⁺微盘(直径为104.34 μm, 厚度为15.86 μm)中测得的激光阈值现象(内插图为微盘谐振腔在抽运阈值(0.928 mW和1.306 mW)附近出现的位于1908.63 nm处的激光峰)

Fig. 7. Threshold behavior of a Tm³⁺-doped microdisk laser (diameter: 104.34 μm, thickness: 15.86 μm). Inset: transmission spectra of the coupling system at pump powers of 0.928 mW and 1.306 mW.

下载: 全尺寸图片幻灯片

map

[1]	Sandoghdar V, Treussart F, Hare J, Lefevre-Seguin V, Raimond J, Haroche S 1996 Phys. Rev. A 54 R1777 Google Scholar
[2]	Murugan G S, Zervas M N, Panitchob Y, Wilkinson J S 2011 Opt. Lett. 36 73 Google Scholar
[3]	黄衍堂, 彭隆祥, 庄世坚, 李强龙, 廖廷俤, 许灿华, 段亚凡 2017 66 244208 Google Scholar Huang Y T, Peng L X, Zhuang S J, Li Q L, Liao Y D, Xu C H, Duan Y F 2017 Acta Phys. Sin. 66 244208 Google Scholar
[4]	Gorajoobi S B, Murugan G S, Zervas M N 2019 Opt. Express 27 25493 Google Scholar
[5]	Qian K, Tang J, Guo H, Zhang W, Liu J H, Liu J, Xue C Y, Zhang W D 2016 Chin. Phys. B 25 114209 Google Scholar
[6]	Vernooy D W, Ilchenko V S, Mabuchi H, Streed E W, Kimble H J 1998 Opt. Lett. 23 247 Google Scholar
[7]	Sasagawa K, Yonezawa Z, Iwai R, Ohta J, Nunoshita M 2004 Appl. Phys. Lett. 85 4325 Google Scholar
[8]	Peng X, Song F, Jiang S, Peyghambarian N, Kuwata-Gonokami M, Xu L 2003 Appl. Phys. Lett. 82 1497 Google Scholar
[9]	Elliott G R, Hewak D W, Murugan G S, Wilkinson J S 2007 Opt. Express 15 17542 Google Scholar
[10]	Li C, Dai S, Zhang Q, Shen X, Wang X, Zhang P, Lu L, Wu Y, Lv S 2015 Chin. Phys. B 24 044208 Google Scholar
[11]	胡博, 吴越豪, 郑雨璐, 戴世勋 2019 68 064209 Google Scholar Hu B, Wu Y H, Zheng Y L, Dai S X 2019 Acta Phys. Sin. 68 064209 Google Scholar
[12]	Yang K, Dai S X, Wu Y H, Nie Q H 2018 Chin. Phys. B 27 117701 Google Scholar
[13]	Spillane S M, Kippenberg T J, Vahala K J, Goh K W, Wilcut E, Kimble H J 2005 Phys. Rev. A 71 013817 Google Scholar
[14]	Kippenberg T J, Spillane S M, Vahala K J 2004 Appl. Phys. Lett. 85 6113 Google Scholar
[15]	Wang T J, He J Y, Lee C A, Niu H 2012 Opt. Express 20 028119 Google Scholar
[16]	Tulek A, Akbulut D, Bayindir M 2009 Appl. Phys. Lett. 94 203302 Google Scholar
[17]	Polman A, Min B, Kalkman J, Kippenberg T J, Vahala K J 2004 Appl. Phys. Lett. 84 1037 Google Scholar
[18]	Zou L X, Liu B W, Lv X M, Yang Y D, Xiao J L, Huang Y Z 2015 Appl. Phys. Lett. 106 191107 Google Scholar
[19]	Yang Z, Wu Y, Yang K, Xu P, Zhang W, Dai S, Xu T 2017 Opt. Mat. 72 524 Google Scholar
[20]	Li A Z, Zhang J Q, Zhang M, Li W H, Wang S B, Lewis E, Brambilla G, Wang P F 2018 Opt. Lett. 43 4325 Google Scholar
[21]	Jiang S S, Guo C L, Che K J, Luo Z Q, Du T J, Fu H Y, Xu H Y, Cai Z P 2019 Photon. Res. 7 566 Google Scholar

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热压法制备的碲酸盐玻璃微盘