超导转变边沿单光子探测器原理与研究进展

张青雅; 董文慧; 何根芳; 李铁夫; 刘建设; 陈炜

doi:10.7498/aps.63.200303

摘要

量子信息技术近十多年来的快速发展对单光子探测器的性能提出了更高的要求，高性能单光子探测器也因此受到了更多的关注. 与传统的单光子探测器相比，超导转变边沿（TES）单光子探测器在探测效率、能量分辨、光子数分辨和暗计数等方面具有突出优势. 目前，超导TES单光子探测器已经被成功地应用在量子光学实验和量子密钥分配系统中，未来在量子信息技术等研究领域具有更广泛的应用. 本文从超导TES单光子探测器的工作原理、制备流程、测试系统、主要性能指标以及研究现状和进展等方面对该探测器技术进行简要综述.

关键词:

Abstract

Over the past decade, there have been increasing demand on and interest in high performance single photon detectors in many new applications in quantum information technology. Compared with conventional single photon detectors, superconducting transition edge sensor (TES) based single photon detectors have great advantages in the performance of detection efficiency, energy resolution, photon number resolving capability, dark count rate, etc. They have been successfully used in quantum optics experiments and quantum key distribution systems, and they will play a more important role in the research field of quantum information science and technology. In this paper we review the operating principle, fabrication process, performance, measurement system and the research progress on superconducting TES based single photon detectors.

Keywords:

作者及机构信息

1.
清华大学, 清华信息科学与技术国家实验室, 北京 100084;

2.
清华大学微电子与纳电子学系, 微电子学研究所, 北京 100084

基金项目: 国家重点基础研究发展计划（批准号：2011CBA00304）和清华大学自主科研计划（批准号：20131089314）资助的课题.

Authors and contacts

1.
Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, China;

2.
Institute of Microelectronics, Department of Micro/Nanoelectronics, Tsinghua University, Beijing 100084, China

Funds: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00304) and the Tsinghua University Initiative Scientific Research Program, China (Grant No. 20131089314).

参考文献

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施引文献

[1]	Irwin K D, Hilton G C 2005 Topics Appl. Phys. 99 63
[2]	Irwin K D 1995 Appl. Phys. Lett. 66 1998
[3]
[4]	Lee A T, Richards P L, Nam S W, Cabrera B, Irwin K D 1996 Appl. Phys. Lett. 69 1801
[5]
[6]	Ali Z A, Drury O B, Cunningham M F, Chesser J M, Barbee T W, Friedrich S 2005 IEEE Trans. Appl. Supercond. 15 526
[7]
[8]
[9]	O'Brient R, Edwards J, Arnold K, Engargiola G, Holzapfel W, Lee A T, Myers M, Quealy E, Rebeiz G, Paul Richards, Spieler H, Tran H 2008 Proc.f SPIE 7020 70201H
[10]	Chervenak J A, Irwin K D, Grossman E N, Martinis J M, Reintsema C D, Huber M E 1999 Appl. Phys. Lett. 74 4043
[11]
[12]
[13]	Lanting T M, Cho H M, Clarke J, Holzapfel W L, Lee A T, Lueker M, Richards P L, Dobbs M A, Spieler H, Smith A 2005 Appl. Phys. Lett. 86 112511
[14]	Suzuki A, Arnold K, Edwards J, Engargiola G, Ghribi A, Holzapfel W, Lee A, Meng X, Myers M, O'Brient R, Quealy E, Rebeiz G, Richards P 2012 J. Low. Temp. Phys. 167 852
[15]
[16]	Bonetti J A, Turner A D, Kenyon M, LeDuc H G, Brevik J A, Orlando A, Trangsrud A, Sudiwala R, Nguyen H T, Day P K, Bock J J, Golwala S R, Kovac J M, Jones W C, Kuo C L 2011 IEEE Trans. Appl. Supercond. 21 219
[17]
[18]
[19]	Bennett D A, Horansky R D, Schmidt D R, Hoover A S, et al. 2012 Rev. Sci. Instrum. 83 093113
[20]
[21]	Cabrera B, Clarke R M, Colling P, Miller A J, Nam S, Romani R W 1998 Appl. Phys. Lett. 73 735
[22]
[23]
[24]	Lolli L, Taralli E, Rajteri M 2012 J. Low. Temp. Phys. 167 803
[25]	Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢, 吴令安 2003 52 1132]
[26]
[27]
[28]	Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Liu S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东, 吴祖恒, 张兵, 魏正军, 廖常俊, 刘颂豪 2008 57 5620]
[29]	Lolli L, Taralli E, Portesi C, Monticone E, Rajteri M 2013 Appl. Phys. Lett. 103 041107
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[35]	Fukuda D, Fujii G, Numata T, Amemiya K, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S, Zama T 2011 IEEE Trans. Appl. Supercond. 21 241
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[41]
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[48]
[49]	Tsujino K, Fukuda D, Fujii G, Inoue S, Fujiwara M, Takeoka M, Sasaki M 2010 Opt. Express 18 8107
[50]
[51]	Jiang Y, Jin B B, Xu W W, Kang L, Chen J, Wu P H 2012 Sci. China Inf. Sci. 55 64
[52]
[53]
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[55]
[56]	Zhang L B, Kang L, Chen J, Zhao Q Y, Jia T, Xu W W, Cao C H, Jin B B, Wu P H 2011 Acta Phys. Sin. 60 038501 (in Chinese) [张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨 2011 60 038501]
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[61]	Zhang Q, Dong W, Wang T, Chen J, Liu J, Li T, Zhou X, Chen W 2014 Chin. J. Low. Temp. Phys. 36 7
[62]
[63]
[64]	Zhang Q, He G, Dong W, Wang T, Chen J, Liu J, Li T, Zhou X, Chen W Proceeding of 10th International Workshop On Low Temperature Electronics Paris, France, October 14-17, 2013 p70
[65]	Zhang Q, Liu J, Dong W, Wang T, He G, Li T, Zhou X, Chen W 2014 Chin. Sci. Bull. 59 2292
[66]
[67]
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[69]
[70]	Wellstood F C, Urbina C, Clarke J 1994 Phys. Rev. B 49 5942
[71]
[72]	Calkins B, Lita A E, Fox A E, Nam S W 2011 Appl. Phys. Lett. 99 241114
[73]
[74]	Fukuda D, Damayanthi R M T, Yoshizawa A, Zen N, Takahashi H, Amemiya K, Ohkubo M 2007 IEEE Trans. Appl. Supercond. 17 259
[75]
[76]
[77]	Lita A E, Calkins B, Pellochoud L A, Miller A J, Nam S W 2009 AIP Conf. Proc. 1185 351
[78]	Rajteri M, Taralli E, Portesi C, Monticone E, Beyer J 2009 Metrologia 46 S283
[79]
[80]	Martinis J M, Hilton G C, Irwin K D, Wollman D A 2000 Nucl. Instr. Meth. A 444 23
[81]
[82]
[83]	Taralli E, Portesi C, Rocci R, Rajteri M, Monticone E 2009 IEEE Trans. Appl. Supercond. 19 493
[84]
[85]	Lita A E, Rosenberg D, Nam S, Miller A J, Balzar D, Kaatz L M, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 3528
[86]
[87]	Morooka T, Tanaka K, Chinone K 2002 IEEE Trans. Appl. Supercond. 12 1866
[88]
[89]	Lamas-Linares A, Calkins B, Tomlin N A, Gerrits T, Lita A E, Beyer J, Mirin R P, Nam S W 2013 Appl. Phys. Lett. 102 231117
[90]
[91]	Lolli L 2012 Ph. D. Dissertation (Torino: Istituto Nazionale di Ricerca Metrologica)
[92]
[93]	Zhang Q Y 2014 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese) [张青雅 2014 博士学位论文 (北京: 清华大学)]
[94]
[95]	Lolli L, Taralli E, Rajteri M, Numata T, Fukuda D 2013 IEEE Trans. Appl. Supercond. 23 2100904
[96]
[97]	Fukuda D, Fujii G, Numata T, Yoshizawa A, Tsuchida H, Fujino H, Ishii H, Itatani T, Inoue S Zama T 2009 Metrologia 46 S288
[98]
[99]
[100]	Rosenberg D, Lita A E, Miller A J, Nam S, Schwall R E 2005 IEEE Trans. Appl. Supercond. 15 575
[101]	Rosenberg D, Nam S W, Miller A J, Salminen A, Grossman E, Schwall R E, Martinis J M 2004 Nucl. Instr. Meth. A 520 537
[102]
[103]
[104]	Rosenberg D, Lita A E, Miller A J, Nam S W 2005 Phys. Rev. A 71 061803
[105]
[106]	Lita A E, Calkins B, Pellouchoud L A, Miller A J, Nam S 2010 Proc. SPIE 7681 76810D
[107]
[108]	Damayanthi R M T, Fukuda D, Takahashi H, Ohkubo M, Ohno M 2008 J. Low. Temp. Phys. 151 46
[109]	Marsili F, Verma V B, Stern J A, Harrington S, Lita A E, Gerrits T, Vayshenker I, Baek B, Shaw M D, Mirin R P, Nam S W 2013 Nature Photon. 7 210
[110]
[111]
[112]	Fukuda D, Fujii G, Yoshizawa A, Tsuchida H, Damayanthi R M T, Takahashi H, Inoue S, Ohkubo M 2008 J. Low. Temp. Phys. 151 100
[113]	Lolli L, Taralli E, Portesi C, Alberto D, Rajteri M, Monticone E 2011 IEEE Trans. Appl. Supercond. 21 215
[114]

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