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中国物理学会期刊

GaAs (001)图形衬底上InAs量子点的定位生长

Controllable growth of InAs quantum dots on patterned GaAs (001) substrate

CSTR: 32037.14.aps.68.20190317
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  • InAs/GaAs量子点是重要的单光子源, 位置可控量子点对实现可寻址易集成的高性能量子点光源具有重要意义. 本文详细研究了氢原子条件下GaAs (001)图形衬底的低温脱氧过程, 低温GaAs缓冲层生长中沟槽形貌的演化过程, 以及沟槽形貌对量子点形核位置的影响. 发现GaAs衬底上纳米沟槽侧壁的倾斜角较小时, InAs量子点会优先生长于沟槽底部; 当沟槽的侧壁倾斜角较大时, InAs量子点则会优先生长于沟槽两侧的外边沿位置. 此外, 本文还研究了纳米孔洞侧壁的倾斜角对量子点成核位置的影响, 实现了双量子点分子和四量子点分子的定位生长.

     

    InAs/GaAs quantum dot (QD) is one of the promising material systems for the quantum information processing due to their atomic-like optical and electrical properties. There are many previous researches reporting the InAs QDs which can be implemented as solid-state single-photon sources for quantum information and quantum computing. However, the site-controlled growth of QDs is the prerequisite for addressability and integration. There are very few researches focusing on the systematic study of preferential nucleation of InAs QDs on a patterned GaAs (001) substrate. In this work, we study the preferential nucleation sites of InAs QDs on a patterned GaAs (001) substrate with different trench sidewall inclinations. With small inclination angle of the trench sidewalls, the InAs QDs nucleate preferentially inside the trenches, while with large inclination angle, the edges of the trenches appear to be the preferential nucleation sites. By utilizing the established method, a pair of InAs dots can be uniformly achieved in the patterned pits through tuning the inclination angle of the pits. The site-controlled single InAs QD and InAs QD molecules on the patterned substrates could have potential applications in quantum information processing and quantum computing.

     

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