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中国物理学会期刊

一种非对称双面离轴非球面反射镜检测补偿变焦光路设计方法

A method of designing asymmetric double-sided off-axis aspheric mirror detection compensation zoom light path

CSTR: 32037.14.aps.68.20182253
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  • 随着多波段共孔径高精度探测技术的发展, 非对称双面离轴非球面反射镜因具备突出特点而发挥着越来越重要的作用, 但高精度检测是限制其使用的关键步骤, 而针对非对称双面离轴非球面反射镜检测一般还是分别使用两套补偿器单独完成, 效率较低且切换补偿器会降低检测精度. 针对这个问题, 本文以干涉检验法中的折射式Offner补偿法为基础, 按照离轴孔径光阑使光线离轴并分光、共用透镜组前后移动变焦及反射镜折叠光路的思路, 提出一种变焦零位补偿装置光路设计的方法, 并针对实例使用光学设计软件进行仿真设计实验, 实现使用一套变焦零位补偿装置完成对非对称双面离轴非球面反射镜正反两个面的高精度检测光路设计. 针对设计结果进行公差分析, 分析表明设计满足制造装配精度要求, 验证了该方法的可行性, 为非对称双面离轴非球面反射镜高精度检测提供了一种新思路.

     

    With the development of multispectral common-aperture high-precision detection technology, the asymmetric double-sided off-axis aspheric mirror is playing an increasingly important role in characterizing the correcting phase difference, increasing the relative caliber of system, expanding the view angle of field, simplifying system structure, and reducing weight and volume. But high-precision detection is a key step restricting the applications of these mirrors. At present, the compensation method of the interference test is the most effective mean of off-axis aspheric surface detection which has a simple structure, large compensation range, small number of components and is easy to control. However for the detection of asymmetric double-sided off-axis aspheric mirrors, two sets of alone compensators are still used, in which the efficiency is low and the switching compensator will reduce the accuracy of detection. Aiming at this problem, in this paper we propose a zoom null compensation method which is based on the Offner refracting compensation method. In this method, the off-axis aperture stop causes the light to be off-axis and split, the common lens group is moved to zoom, and the mirror folds the light path. There are two off-axis apertures are provided for off-axis and splitting, four lenses which form three lens groups are used to move positions for zooming, two mirrors are used to fold light. An optical design software is used to simulate the experiment, and implements the design for the high-precision detection of optical path for the asymmetric double-sided off-axis aspherical mirror by using this set of null compensation method. The simulation result shows that the theoretical residual wave aberration increases up to 0.0003λ root-mean-square (RMS) and 0.0001λ RMS with the designed system compensation, which meet the requirement for detection. At the same time, the tolerance analysis is carried out according to the design result, the actual residual wave aberrations within the existing tolerance range are 0.0326λ RMS and 0.0316λ RMS, which meet the requirements for manufacturing and assembly. The present work provides a new idea for the high-precision detection of asymmetric double-sided off-axis aspheric mirror. At the same time, the quality of the detected beam in this paper is achieved under ideal conditions, and the quality of beam will be considered in the next research work.

     

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