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中国物理学会期刊

氢离子注入GaN高电子迁移率晶体管栅极正向输运、退化与击穿

CSTR: 32037.14.aps.75.20251343

Forward transport, degradation, and breakdown of hydrogen-ion-implanted GaN high electron mobility transistor gate

CSTR: 32037.14.aps.75.20251343
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  • 本文基于氢等离子体注入技术实现了增强型p-GaN高电子迁移率晶体管向耗尽型器件的转变, 研究了栅极正向电流的输运、电流退化与击穿行为. 通过变温电流-电压(T-I-V)扫描、低频噪声测试与锁相红外成像技术, 获得以下结果: 1)在双对数坐标系下栅极正向T-I-V曲线呈显著幂律关系, 斜率对温度不敏感, 对应热激活能仅约52 meV, 电流噪声具有典型1/f特性, 表明正向电流应主要为缺陷辅助跳跃电流; 2)在长时间正向栅压应力作用下, 器件I-V特性退化为典型整流特性, 表明局部高阻GaN区重新形成p-GaN, 半对数坐标系下, 电流线性区的理想因子高达2.6, 电流噪声谱具有1/f特性, 证明缺陷辅助隧穿电流成为主要输运机制; 3)通过锁相红外成像技术精准定位击穿“热点”位置, 并结合像素温度矫正技术测得“热点”处真实温度.

     

    For GaN digital circuits, the p-GaN high electron mobility transistor (HEMT) is widely adopted as an enhancement-mode device. To convert enhancement-mode devices into depletion-mode ones, traditional methods of achieving depletion-mode operation rely on high-energy ion etching to selectively remove portions of the p-GaN layer. However, this etching process often leads to surface lattice damage andincrease in interface state density, resulting in the formation of gate-edge leakage paths. These issues lead dynamic on-resistance to increase and long-term reliability to decrease. Instead, hydrogen ion implantation has been used as a non-destructive doping modulation technique to mitigate these challenges. In view of this, in this study hydrogen ion implanted technology is adopted to achieve the transition of enhancement-mode p-GaN HEMTs to depletion-mode HEMTs. By employing temperature-dependent current-voltage (T-I-V) sweeping, low-frequency noise analysis, and lock-in infrared imaging techniques, the forward current transport, degradation and breakdown behaviors are investigated. The results are shown below. 1) The gate forward T-I-V curves exhibit a significant power-law relationship in double logarithmic coordinates, the current slope is insensitive to temperature, and the activation energy is derived to be ~52 meV. Neither of the classic pn junction theory and the space charge limited current model can explain the current behavior, whereas a defect-mediated electron hopping mechanism is identified as the dominant transport mechanism. 2) A long term of gate bias stress leads to the degradation into a typical rectifying behavior, indicating that the p-GaN region undergoes reconstruction in certain areas. The forward current exhibits an ideality factor of approximately 2.6 and a typical 1/f noise spectrum, indicating that the defect-assisted tunneling current is dominant. 3) High gate bias induces a current breakdown. Lock-in infrared imaging and pixel-by-pixel correction techniques are used to respectively obtain the breakdown site and the “hot spots” temperature.

     

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