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中国物理学会期刊

Al1–xScxN铁电薄膜的研究进展

CSTR: 32037.14.aps.75.20251241

Research progress of Al1–xScxN ferroelectric thin films

CSTR: 32037.14.aps.75.20251241
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  • 作为新一代的纤锌矿铁电材料, Al1–xScxN具有高的剩余极化强度、理想的矩形电滞回线、与CMOS后道工艺兼容、稳定的铁电相等优点. 作为近几年铁电领域的热点材料, 国内外科研人员进行了深入研究. 本文对Al1–xScxN铁电薄膜的研究进展进行了全面的综述. 在Al1–xScxN铁电性的影响因素方面, 讨论了Sc含量、衬底类型、沉积条件、薄膜厚度、测试频率及温度等因素对薄膜的作用. 在极化翻转机制方面, 详细阐述Al1–xScxN电畴特性、翻转动力学、形核位置等微观物理机制. 在应用前景上, Al1–xScxN薄膜在铁电随机存储器、铁电场效应管和铁电隧道结等铁电存储器中表现出巨大潜力, 为新一代高密度、低功耗铁电存储器及纳米电子器件的发展提供有力支持.

     

    Al1–xScxN, as a new generation of wurtzite-type ferroelectric material, has become a focal point in ferroelectric materials research in recent years, due to its high remnant polarization, nearly ideal rectangular polarization-electric field hysteresis loops, inherent compatibility with back-end-of-line (BEOL) CMOS processes, and stable ferroelectric phase structure. The systematic and in-depth studies on the preparation, property modulation, and device applications of this material have been conducted. This paper provides a comprehensive review of the research progress of Al1–xScxN ferroelectric thin films. Regarding the factors influencing ferroelectric properties, it emphasizes the regulatory effects of Sc doping concentration on phase transition and coercive field, explores the influences of substrate (such as Si and Al2O3) and bottom electrode (such as Pt, Mo, and HfN0.4) on thin-film orientation, stress, and interface quality, and systematically summarizes the influences of deposition conditions, film thickness, testing frequency, and temperature on ferroelectric performance. At the level of physical mechanisms governing polarization switching, this review elaborates on the domain structure, domain wall motion dynamics, nucleation sites and growth mechanisms in the Al1–xScxN switching process, revealing its microscopic response behavior under external electric fields and the mechanisms underlying fatigue failure. In terms of application prospects, Al1–xScxN thin films show significant advantages in memory devices such as ferroelectric random-access memory (FeRAM), ferroelectric field-effect transistors (FeFETs), and ferroelectric tunnel junctions (FTJs). Their high performance and integration compatibility provide strong technical support for developing next-generation, high-density, low-power ferroelectric memory and nanoelectronic devices.

     

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