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本文报道了一种新型米量级宽幅间接介质阻挡放电(DBD), 用于满足大尺度、形状复杂材料的处理需求. 通过模块化分级气路设计与仿真优化, 提高放电区域及被处理材料表面流场分布均匀性. 在此基础上, 以Ar作为工作气体, 以六甲基二硅烷(HMDSO)为反应媒质, 在纳秒脉冲电源激励下产生米量级宽幅等离子体. 通过电学、光谱、温度诊断方法来评估不同运行条件参数下的粒子活性、放电均匀性和稳定性, 并对环氧材料改性, 通过水接触角测量验证改性效果及其均匀性. 结果表明, 在合适的运行条件参数下, 可产生尺寸为1120 mm的宽幅均匀稳定等离子体. 增大电压幅值使放电强度和粒子活性提升, 但放电均匀性和稳定性会显著降低; 增大工作气体流速虽可同时提升粒子活性、放电均匀性和稳定性, 但提升幅度较小. 在电压幅值为12 kV、工作气体流速为10 L/min条件下处理10 min后, 环氧(EP)材料表面的水接触角从67°均匀提升至144°, 波动幅度低于6%. 本文所报道的米量级宽幅间接DBD电极可为大尺度等离子体材料改性技术工业应用提供参考和依据.A meter-scale wide indirect dielectric barrier discharge (DBD) for treating large-scale and irregular-shaped materials is reported in this study. The structure of the modular-graded gas path is designed, and the influence of gas hole density on the flow field is simulated. It is confirmed that 8 subdividing (40 holes uniformly distributed) structure can effectively improve the uniformity of the gas flow rate distribution in the discharge area and on the treated material surface compared with 0 subdividing structure. Based on this structure, Ar is employed as the discharge gas and hexamethyldisilane as the precursor to generate meter-scale wide plasma under the excitation of a nanosecond pulsed power supply. Particle activity, discharge uniformity and stability under different operating parameters are evaluated by measuring voltage-current waveforms, emission spectra, luminescence images and temperatures at different electrode positions. The treatment effect and uniformity are verified by measuring the water contact angle (WCA) of epoxy (EP) material. The results show that a uniform and stable plasma with a width of 1120 mm is generated under suitable operating parameters. By increasing the voltage amplitude, both the discharge intensity and particle activity are improved, while the discharge uniformity and stability are significantly reduced. By increasing the discharge gas flow rate, the particle activity, discharge uniformity, and stability can be improved simultaneously but slightly. The WCA on the EP surface is uniformly increased from 67° to 144° with a variation of less than 6% after 10-min treatment at a voltage amplitude of 12 kV and a discharge gas flow rate of 10 L/min. The meter-scale wide indirect DBD electrode in this work can provide reference and basis for the industrial application of large-scale plasma material modification technology.
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Keywords:
- meter-scale wide electrode /
- indirect dielectric barrier discharge /
- material modification /
- discharge characteristics /
- water contact angle
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图 1 米量级宽幅间接DBD电极结构设计 (a) 电极示意图; (b) 电极实物图
Fig. 1. Structural design of the meter-scale wide indirect DBD: (a) Schematic diagram; (b) photo of the electrode.
图 2 米量级宽幅间接DBD电极流场仿真 (a) 不同结构下工作气体流速的流线; (b), (c) 不同结构下处理材料表面流速分布; (d) 不同工作气体流速下的放电区域和材料表面流速分布
Fig. 2. Flow field simulation of the meter-scale wide indirect DBD: (a) Ar flow streamlines of gas flow rate under different structures; (b), (c) flow rate distributions on the treated material surface for different structures; (d) flow rate distributions in the discharge region and on the material surface for different total gas flow rates.
图 5 不同条件下的电流幅值均值和标准差 (a) 不同电压幅值; (b) 工作气体流速
Fig. 5. Mean value and standard deviation of current amplitude under various conditions: (a) Voltage amplitude; (b) gas flow rates.
图 7 不同电压幅值和工作气体流速下的DBD放电图像
Fig. 7. Discharge images of DBD at different voltage amplitudes and gas flow rates.
图 10 不同条件下的Ar(763.51)光谱强度 (a) 电压幅值; (b) 工作气体流速
Fig. 10. Ar(763.51) intensity under different conditions: (a) Voltage amplitude; (b) gas flow rate.
图 11 不同放电时间下不同位置的温度 (a) 2 min; (b) 10 min; (c) 温升曲线
Fig. 11. Temperatures at different positions for different discharge durations: (a) 2 min; (b) 10 min; (c) electrode temperature rise.
图 12 不同条件下电极温度 (a) 电压幅值; (b) 工作气体流速
Fig. 12. Electrode temperatures under different conditions: (a) Voltage amplitude; (b) gas flow rates.
图 13 不同条件下改性后WCA变化 (a) 不同位置; (b) 不同电压幅值; (c) 不同工作气体流速; (d) WCA与电流幅值; (e) WCA标准差与GVSD
Fig. 13. WCA under different conditions: (a) Different positions; (a) voltage amplitude; (b) gas flow rates; (d) WCA and current amplitude; (e) WCA standard deviation and GVSD.
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