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中国物理学会期刊

    非对称银膜多孔硅-氟化钙等离子体波导及其波导灵敏度特性

    Porous silicon - calcium fluoride plasma waveguide with asymmetric Ag film and its sensitivity characteristics

    CSTR: 32037.14.aps.70.20210704
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    • 本文研究了一种非对称银膜多孔硅-氟化钙混合等离子体波导, 并对其模式特性和波导灵敏度进行了分析. 利用有限元方法分析了波导中两个不同偏振态基模(PM 1和PM 2)的有效折射率、传输损耗、归一化有效模场面积、品质因数和波导灵敏度, 并对几何参数进行优化. 结果表明, 在中红外波长3.5 μm附近, 非对称银膜多孔硅-氟化钙混合等离子体波导具有良好的模场约束能力和低损耗特性; 此时, PM 1和PM 2的归一化有效模场面积分别为0.30和0.52, 传输损耗分别为0.019 dB/μm和0.016 dB/μm, 品质因数分别为1335.54和1594.99, 波导灵敏度分别为0.080和0.064. 通过制造容差分析可知, 非对称银膜多孔硅-氟化钙混合等离子波导在 ± 10 nm的制造容差范围内保持了良好的模式特性和传感特性. 非对称银膜多孔硅-氟化钙混合等离子体波导结构简单, 损耗小, 易于实现表面等离子体传感, 为无标记生物化学传感提供了一种可行的方案, 另外, 波导的非对称结构也可用于模式偏振态变换.

      In this paper, a porous silicon-calcium fluoride hybrid plasmonic waveguide (PS-CaF 2HPW) with an asymmetric silver film is studied. The PS-CaF 2HPW is composed of a PS strip waveguide deposited with asymmetric CaF 2and Ag thin film layers on an SiO 2substrate. In the mid-infrared (MIR) region, the mode characteristics and waveguide sensitivity of the mode in the PS-CaF 2HPW are simulated by using the finite element method (FEM). The results show that there are two fundamental modes (PM 1 and PM 2) with different polarization states in the PS-CaF 2HPW. The real part of the effective refractive index (Re( n eff )), transmission loss ( α), normalized effective mode field area ( A), quality factor ( FOM) and sensitivity ( S wg) for each of the PM 1 and the PM 2 are studied and optimized. Moreover, the effect of temperature on the performances of the PS-CaF 2HPW is also analyzed. Firstly, the mode field distributions calculated by the FEM indicate that the mode field energy for each of the PM 1 and PM 2 in the PS-CaF 2HPW is mostly restricted to the PS layer and CaF 2layer. Comparing with conventional dielectric waveguides, the mode field energy of the PS-CaF 2HPW is well confined in the PS layer and CaF 2layer. The geometric parameters of the PS-CaF 2HPW are optimized by changing the geometric parameters ( W 1, W 2, and W 3). When W 1= 1500 nm, W 2= 300 nm, W 3= 70 nm, and the operating wavelength is ~3.5 μm, αand FOMare 0.019 dB/μm and 1594.99 for the PM 1, and αand FOM are 0.016 dB/μm and 1335.54 for the PM 2, respectively. Secondly, the waveguide sensitivity of the PS-CaF 2HPW is analyzed. The results show that the size of PS layer has a great influence on the waveguide sensitivity. The waveguide sensitivity decreases with the size of the PS layer increasing. In addition, the PS-CaF 2HPW has good temperature resistance. Moreover, temperature has almost no effect on Re( n eff ), nor αnor Anor FOM nor S wgin a temperature range from -40 K to 40 K. Finally, the fabrication tolerances of the PS-CaF 2HPW are demonstrated, and the good properties are maintained in a size tolerance range from -10 nm to 10 nm. With the advantages in propagation property and loss reduction, the PS-CaF 2HPW provides a feasible label-free biochemical sensing scheme and a method of polarization control devices.

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