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中国物理学会期刊

二阶梯度交叉耦合超导量子干涉仪电流传感器研制

A second-order gradiometric superconducting quantum interference device current sensor with cross-coupled structure

CSTR: 32037.14.aps.70.20201816
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  • 超导量子干涉仪(superconducting quantum interference device, SQUID)具有极低的噪声水平, 极高的磁场灵敏度和电流灵敏度, 可探测低噪声传感器的微弱电流信号. SQUID电流传感器已成为超导转变边缘探测器(transition-edge sensor, TES)等低噪声探测信号读出的唯一选择. 本文研制了一种针对TES信号读出应用的二阶梯度交叉耦合SQUID电流传感器. 根据TES的信号读出需求, 设计了SQUID电流传感器的结构和各项参数. 其中, SQUID环路、输入线圈和反馈线圈均采用二阶梯度结构. SQUID环路与输入线圈、反馈线圈均采用不同平面交叉耦合方式, 可有效地减弱寄生电容. 通过优化工艺, 成功地研制出基于Nb/Al-AlOx/Nb约瑟夫森结的二阶梯度交叉耦合SQUID电流传感器. 液氦温区测试结果显示, 输入线圈电流灵敏度为17 μA/Φ0, 磁通白噪声为2 μΦ0/ \sqrt\rmH\rmz , 电流白噪声为34 pA/ \sqrt\rmH\rmz . 在无磁屏蔽条件下的噪声测试结果显示, 二阶梯度交叉耦合SQUID电流传感器具有良好的抵抗环境电磁干扰能力.

     

    Superconducting quantum interference device (SQUID) has extremely high magnetic field sensitivity, current sensitivity, and can detect a low-noise weak current signal. The SQUID current sensor has become the only option of the readout of low-noise detector, such as transition-edge sensor (TES). In this paper, a second-order gradiometric cross-coupled SQUID current sensor for TES application is developed. According to the requirements for TES detectors, the structure and various parameters of SQUID current sensor are designed. The SQUID loop, input coil and feedback coil of the SQUID current sensor all use the second-order gradiometric structure. All the couple ways between SQUID loop and input coil or feedback coil adopt cross-coupling mode in different planes, which can effectively weaken the parasitic capacitance. A second-order gradiometric cross-coupled SQUID current sensor based on Nb/Al-AlOx/Nb Josephson junction is successfully fabricated on a silicon wafer by optimizing the process. The properties of the second-order gradiometric cross-coupled SQUID current sensor are measured at liquid helium temperature. The bias current of SQUID is 215 μA when the modulation depth of V-Φ modulation curve is maximum. The maximum modulation peak of SQUID is 31 μV. The flux-to-voltage transfer coefficient of SQUID is 108 μV/Φ0. The input coil current sensitivity is 17 μA/Φ0, the mutual inductance between SQUID loop and input coil is 117 pH. The current sensitivity of feedback coil is 86 μA/Φ0, the mutual inductance between SQUID loop and feedback coil is 23 pH. The second-order gradiometric cross-coupled SQUID current sensor has a white flux noise of 2 μΦ0/ \sqrt\rmH\rmz and a white current noise of 34 pA/ \sqrt\rmH\rmz with 1/f corner frequency around 200 Hz. The result of noise level under the condition without magnetic shielding shows that the SQUID current sensor with second-order gradiometric cross-coupled structure has an excellent capability of weakening the environmental electromagnetic interference. In the future, we will further improve the mutual inductance of the second-order gradiometric cross-coupled SQUID current sensor between SQUID loop and input coil, optimize the size and critical current of Josephson junction, in order to improve the input sensitivity of SQUID device, reduce the current noise level and the 1/f corner frequency, and meet more requirements for TES applications.

     

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