Three kinds of polystyrene spheres with different sizes were fabricated on glasses by drifting method of nanosphere lithography. Au thin films with various thicknesses were prepared by magnetron sputtering under controlled deposition time. Triangle-shaped Au nanoparticles array in three different heights after removing the PS template were observed using scanning electron microscopy. The absorption characteristics of all samples were measured by ultraviolet-visible spectrophotometer. Surface plasmon resonance peak was seen to shift to the longer wavelength with increasing diameter of Au nanoparticles. And the surface plasmon resonance peak was shifted to the shorter wavelength with increasing height of Au nanoparticles. Based on Mie theory, we simulated the extinction properties, which vary with the diameter of Au nanoparticles, using Matlab software. The conclusion is in accordance with our experimental results.