Results of optical microscopy, scanning electron microscopy, AFM are presented for tungsten coating produced by low and high cold gas dynamic spraying, respectively. The critical velocity of tungsten powder was calculated, what is more, tungsten particles collision was also simulated by soft ANSYS/LS-DYNA. Cold gas dynamic spray (CGDS) is a rapidly developing coating technology, in which spray particle are deposited through plastic impact on substrate at high velocities at low temperature. In these experiments, the process produced a reasonably dense tungsten coating and tungsten alloy coating. This paper reports the effect of deposition parameters which including temperature, spraying distance, particle size, etc. on the structures formed.