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中国物理学会期刊

a-Si ∶H/SiO2多量子阱材料制备及其光学性能和微结构研究

CSTR: 32037.14.aps.60.068102

Structural and optical properties of a-Si ∶H/SiO2 multiple quantum wells

CSTR: 32037.14.aps.60.068102
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  • 利用等离子体增强化学气相沉积技术制备了a-Si ∶H/SiO2多量子阱结构材料.对a-Si ∶H/SiO2多量子阱样品分别进行了3种不同的热处理,其中样品经1100 ℃高温退火可获得尺寸可控的nc-Si:H/SiO2量子点超晶格结构,其尺寸与非晶硅子层厚度相当.比较了a-Si ∶H/SiO2多量子阱材料与相同制备工艺条件下a-Si ∶H材料的吸收系数,在紫外/可见短波段前者的吸收系数明显增大,光学吸收边蓝移,说明该材料

     

    a-Si ∶H/SiO2 multiple quantum wells (QWs) are fabricated by plasma enhanced chemical vapor deposition (PECVD) and subsequent different thermal annealing. Among them the annealed sample under 1100 ℃ in vacuum can be transferred into nc-Si:H/SiO2 QWs, and the size of formed nc-Si:H is controllable and it matches the thickness of a-Si ∶H sublayer. The optical absorptivity of a-Si ∶H/SiO2 QWs is compared with that of a-Si ∶H under the same fabrication condition, the former is higher evidently in the UV/Visible spectrum with the absorption edge blue-shifted, which shows that a-Si ∶H/SiO2 QWs has an obvious quantum confinement effect. So it is feasible to use a-Si ∶H/SiO2 QWs to enhance the efficiency of silicon solar cells. In addition, the formation of nc-Si:H/SiO2 QWs with controllable size built the basis for new-type nanocrystalline silicon solar cells.

     

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