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中国物理学会期刊

全息技术制作二维光子晶体蓝宝石衬底提高发光二极管外量子效率

CSTR: 32037.14.aps.58.959

Enhanced external quantum efficiency of light emitting diodes by fabricating two-dimensional photonic crystal sapphire substrate with holographic technique

CSTR: 32037.14.aps.58.959
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  • 为了提高GaN基发光二极管(LED)的外量子效率,在蓝宝石衬底制作了二维光子晶体.衬底上的二维光子晶体结构采用激光全息技术和感应耦合等离子体(ICP)干法刻蚀技术制作,然后采用金属氧化物化学气相沉积(MOCVD)技术在图形蓝宝石衬底(PSS)上生长2μm厚的n型GaN层,4层量子阱和200nm厚的p型GaN层,形成LED结构.衬底上制作的二维光子晶体为六角晶格结构,晶格常数为3.8μm,刻蚀深度为800nm.LED器件光强输出测试结果显示,在PSS上制作的LED(PSS-LED)的发光强度普遍高于蓝宝石平

     

    Investigation in fabricating two-dimensional (2D) photonic crystal (PC) on sapphire substrates for enhancing external efficiency of GaN based light emitting diodes (LEDs) is presented. 2D-PC was fabricated on a sapphire substrate using holographic lithography and inductively coupled plasma (ICP) dry etching. LEDs with 2μm thick n-GaN layer,four pairs of InGaN/GaN quantum well structures and 200nm thick p-GaN layer were grown on the patterned sapphire substrate (PSS) by metal organic chemical vapor deposition (MOCVD). The PC fabricated on PSS has 2D hexagonal lattice pattern,with 3.8μm lattice constant and 800nm depth. LED output measurement shows 100% increase in the average luminous intensity of PSS-LEDs compared with that of conventioanl LEDs. The measured X-ray rocking curves of (0002) diffraction for GaN layers grown on patterned and non-patterned sapphire substrates indicate that the quality of GaN crystal grown on PSS is not improved,which implies that the large enhancement of external quantum efficiency of PSS-LED is not caused by the increase in internal efficiency but possibly by the increase in extraction efficiency,which results from the scattering of the PSS.

     

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