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中国物理学会期刊

AlGaN/GaN场板结构高电子迁移率晶体管的场板尺寸优化分析

CSTR: 32037.14.aps.57.2456

Geometrical optimization of AlGaN/GaN field-plate high electron mobility transistor

CSTR: 32037.14.aps.57.2456
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  • 对不同场板尺寸的AlGaN/GaN 场板结构高电子迁移率晶体管进行了研究,建立简化模型分析场板长度对沟道电场分布的影响.结果表明,调整钝化层厚度和场板长度都可以调制沟道电场的分布形状,当场板长度较小时,随着长度的增大器件击穿电压随之增加,而当长度增大到一定程度后器件击穿电压不再增加.通过优化场板长度,器件击穿电压提高了64%,且实验结果与模拟结果相符.

     

    Results of investigation on AlGaN/GaN field-plate high electron mobility transistor with different field-plate (FP) geometry are presented. The effect of the field-plate length LFP on the electric field distribution in the channel is thoroughly analyzed by establishing a simplified model. The simulation gives the following estimates: Both the FP length LFP and the thickness t of the insulator under the FP, can reshape the electric field distribution in the channel. If LFP is short, the breakdown voltage Vbr increases with LFP. When LFP increases to a certain extent, Vbr keeps invariable. After optimizing LFP in this paper, Vbr has been increased by 64%. Good agreement between experimental and simulation data is achieved.

     

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