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中国物理学会期刊

溅射氧化铁薄膜矫顽力的研究

CSTR: 32037.14.aps.36.562

STUDY ON THE COERCIVITY OF RF SPUTTERED IRON OXIDE THIN FILMS

CSTR: 32037.14.aps.36.562
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  • 本文报道了有关溅射氧化铁薄膜磁性能的系统研究,特别着重于矫顽力的温度依赖关系和矫顽力随不同氧化铁相的变化。从理论分析与实验测量结果的对比中,给出了形状各向异性、磁晶各向异性及应力各向异性各自对Fe3O4薄膜、γ-Fe2O3薄膜及二者混合相薄膜的贡献,并且得到了Fe3O4薄膜和γ-Fe2O3薄膜的磁晶各向异性常数K1的温度依赖关系曲线。

     

    The study on magnetic properties of RF sputtered iron oxide thin films was carried out systematically. More specifically, the temperature dependence (77-500 K) of the coercivity and the variation of coercivity with different iron oxide phases such as the as-sputtered Fe3O4, partially transformed Fe3O4/(γ-Fe2O3), and γ-Fe2O3, were investigated. Comparing the theoretical analyses with the experimental results, the contributions to the coercivity from shape anisotropy, magnetocrystalline anisotropy, and stress-induced magnetic anisotropy were obtained separately. And the first-order crystalline anisotropy constant K1 vs. temperature for Fe3O4 and γ-Fe2O3 films was derived from Ms(T) and Hc(T) over the temperature range of 100-500 K.

     

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