Preliminary exploration of hard X-ray coherent diffraction imaging method at SSRF

Zhou Guang-Zhao; Hu Zhe; Yang Shu-Min; Liao Ke-Liang; Zhou Ping; Liu Ke; Hua Wen-Qiang; Wang Yu-Zhu; Bian Feng-Gang; Wang Jie

doi:10.7498/aps.69.20191586

Abstract

Coherent X-ray diffraction imaging (CDI) method is a powerful X-ray imaging technique with high resolution up to nanometer scale. Most of the synchrotron radiation facilities and free electron laser facilities are equipped with this state-of-the-art imaging technique and have made many outstanding achievements in multiple scientific areas. Up to now, although scanning CDI (ptychography) method based on a soft X-ray source has been opened to users, the hard X-ray CDI experimental platform has not been built at Shanghai Synchrotron Radiation Facility (SSRF) which can research some relatively thick specimens and easily extend to three-dimensional imaging. As some new beamlines with undulator source were put into operation recently, it is possible and feasible to build up the CDI experimental platform with hard X-ray. In this article, we report the hard X-ray CDI experimental platform development process and preliminary experimental results of coherent diffraction pattern and image reconstruction at SSRF. Based on the operating BL19U2 biological small-angle X-ray scattering (SAXS) beamline at SSRF, the hard X-ray coherent beam is obtained through effective optical path designation at 12 keV and 13.5 keV. The hard X-ray optimization includes tuning several slits, double crystal monochromator (DCM), horizontal deflection mirror, focusing mirror system and pinhole, etc. Furthermore, hard X-ray CDI experiments are conducted. The spatial coherent length of the incident beam is also measured from the pinhole diffraction pattern. This platform can provide both conventional mode and scanning mode (ptychography) for the coherent diffraction imaging method, and the correct image reconstruction from the experimental diffraction patterns proves that the platform has the experimental capability for hard X-ray CDI. In the conventional forward scattering CDI mode, coherent diffraction patterns of pinhole are collected and used to analyse the coherence property of the optimized X-ray beam. The structure of pinhole is also reconstructed from the diffraction pattern. In the scanning CDI mode, a zone plate is used as a sample. The central area of zone plate is reconstructed correctly. About 90 nm/pixel resolution of reconstruction is achieved which is extremely dependent on the X-ray flux density from the undulator source emission. Hard X-ray CDI experimental platform based on the synchrotron radiation facility is first built in China. It will provide effective software and hardware supporting for the development and application of hard X-ray CDI experiments in China in the future.

Keywords:

Authors and contacts

1.
Shanghai Synchrotron Radiation Facility, Zhangjiang Laboratory, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
2.
Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
3.
University of Chinese Academy of Sciences, Beijing 100049, China
4.
Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Hua Wen-Qiang, huawenqiang@zjlab.org.cn ; Wang Yu-Zhu, wangyuzhu@zjlab.org.cn ;

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References

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Cited By

图 1 储存环流强为300 mA时, 不同波荡器K值下, 计算得到不同奇次谐波的(a)能量和(b)亮度分布

Figure 1. Calculated (a) energy and (b) brilliance for odd harmonics as a function of the undulator K-value (a target ring current of 300 mA is used).

DownLoad: Full-Size Img PowerPoint

图 2 相干衍射实验模式@BL19U2光束线站布局图　(a)侧视图, 垂直方向; (b)上视图, 水平方向

Figure 2. Beamline layout of the coherent scattering experimental modes on BL19U2: (a) Side view, vertical direction; (b) top view, horizontal direction.

DownLoad: Full-Size Img PowerPoint

图 3 (a)实验装置示意图; (b)现场照片

Figure 3. (a) Schematic diagram of experimental equipment; (b) on-site picture.

DownLoad: Full-Size Img PowerPoint

图 4 (a), (b)不同入射光束相干度下的针孔衍射图样; (c)水平和(d)垂直方向上的衍射强度分布(图(a), (b)中白色虚线位置); 强度分布均为对数显示

Figure 4. (a), (b) Measured diffraction patterns of pinhole with incident beam of reduced coherence; diffracted intensity distribution in the horizontal (c) and vertical (d) direction along the dotted line profile in panel (a) and (b), and the intensity distribution are shown in log scale.

DownLoad: Full-Size Img PowerPoint

图 5 针孔样品的(a)相干衍射图, (b) 结构重建图, (c)扫描电镜图

Figure 5. Coherent diffraction pattern (a), reconstruction (b) and SEM image (c) of pinhole.

DownLoad: Full-Size Img PowerPoint

图 6 (a)探测器采集到的第441张衍射图; 根据衍射图重建波带片样品结构的(b)振幅和(c)相位信息; (d)波带片样品相应结构的电子显微镜图片; 根据衍射图重建的入射光束的(e)振幅和(f)相位信息

Figure 6. (a) The 441st diffraction pattern collected by the detector; recovered (b) amplitude and (c) phase information of the sample structure of the Fresnel zone plate according to the diffraction patterns; (d) electron microscope image of the corresponding structures of the wave band specimens; reconstructed (e) amplitude and (f) phase information of the incident beam simultaneously according to the diffraction pattern.

DownLoad: Full-Size Img PowerPoint

表 1 国际上同步辐射相干散射(衍射)线站举例列表

Table 1. Well-known coherent scattering beamlines in the world.

光束线站	能量范围/keV	光斑尺寸/μm	相干通量	相干实验方法
NSLS 11-ID	6—16	3—10	5 × 10¹¹ ph/s@9.65 keV	CoSAXS, XPCS
PETRA-III P10	5—20	4.5—40	3 × 10⁹ ph/s	CDI, Bragg CDI, XPCS
SPring-8 29 XUL	4.5—18.7	~1—20	~10⁹ ph/s	CDI, Ptychography
Diamond I13-1	6—35		1 × 10¹⁰ ph/s@8 keV	CDI, Bragg CDI, Ptychography, XPCS
APS 34-ID-C	5—15	~0.7	5 × 10⁹ ph/s@10 keV	CoSAXS, Ptychography
MAX IV CoSAXS	4—20	10 or 100	1.5 × 10¹² ph/s@10 keV	CoSAXS, XPCS
SLS X12 SA	4.4—17.9	25 × 10	7 × 10⁸ ph/s@6.2 keV	CoSAXS
PLS-II 9 C	5—15	< 300	1.7 × 10¹⁰ ph/s@10 keV	CDI, Bragg CDI, XPCS
TPS 25 A	5.5—20	1—10	1 × 10¹⁰ ph/s@6 keV	CDI, XPCS

DownLoad: CSV

表 2 储存环流强为300 mA时, 波荡器不同参数下辐射出的能量、亮度、通量和相干通量

Table 2. Photon energy and highest brilliance/flux/coherent flux with corresponding undulator parameters (a target ring current of 300 mA is used).

光子能量/ keV	谐波阶数	磁场/T	K	亮度/ 10¹⁸flux·mm^–2·mrad^–2	光通量/ 10¹⁴ph·s^–1·0.1%BW^–1	相干光通量/ 10⁹ph·s^–1·0.1%BW^–1
8	3	0.822	1.535	19.5	4.43	111
10	3	0.654	1.221	12.5	2.80	44.9
12	3	0.512	0.955	6.26	1.37	15.3
13.5	5	0.816	1.523	8.64	1.68	14.8
15	5	0.734	1.370	6.09	1.17	8.34

DownLoad: CSV

表 3 上海光源BL19U2光源点(12 keV时)及传播时的光束相干特性

Table 3. Beam parameters of BL19U2 (@12 keV) at the source and KB mirrors.

	水平方向		垂直方向
光源点光斑尺寸	397 µm		26 µm
光源点发散度	78 µrad		23 µrad
光源点相干长度	0.48 µm		1.29 µm
光源点相干度	0.15%		7.59%
KB镜处光斑尺寸	1073 µm	距离光源31.2 m	434 µm	距离光源点34 m
KB镜处相干长度	3.36 µm	距离光源31.2 m	57.3 µm	距离光源点34 m

DownLoad: CSV

map

[1]	Xu H J, Zhao Z T 2008 Nucl. Sci. Tech. 19 1 Google Scholar
[2]	Jiao Y, Xu G, Cui X H, Duan Z, Guo Y Y, He P, Ji D H, Li J Y, Li X Y, Meng C, Peng Y M, Tian S K, Wang J Q, Wang N, Wei Y Y, Xu H S, Yan F, Yu C H, Zhao Y L, Qin Q 2018 J. Synchrotron Radiat. 25 1611 Google Scholar
[3]	Hua W Q, Zhou G Z, Hu Z, Yang S M, Liao K L, Zhou P, Dong X H, Wang Y Z, Bian F G, Wang J 2019 J. Synchrotron Radiat. 26 619 Google Scholar
[4]	Mcneil B W J, Thompson N R 2010 Nat. Photon. 4 814 Google Scholar
[5]	Nugent K A 2010 Adv. Phys. 59 1 Google Scholar
[6]	范家东, 江怀东 2012 61 218702 Google Scholar Fan J D, Jiang H D 2012 Acta Phys. Sin. 61 218702 Google Scholar
[7]	周光照, 佟亚军, 陈灿, 任玉琦, 王玉丹, 肖体乔 2011 60 028701 Google Scholar Zhou G Z, Tong Y J, Chen C, Ren Y Q, Wang Y D, Xiao T Q 2011 Acta Phys. Sin. 60 028701 Google Scholar
[8]	周光照, 王玉丹, 任玉琦, 陈灿, 叶琳琳, 肖体乔 2012 61 018701 Google Scholar Zhou G Z, Wang Y D, Ren Y Q, Chen C, Ye L L, Xiao T Q 2012 Acta Phys. Sin. 61 018701 Google Scholar
[9]	Miao J W, Charalambous P, Kirz J, Sayre D 1999 Nature 400 342 Google Scholar
[10]	Shi X W, Burdet N, Chen B, Xiong G, Streubel R, Harder R, Robinson I K 2019 Appl. Phys. Res. 6 011306
[11]	Jiang H D, Song C Y, Chen C C, Xu R, Raines K S, Fahimian B P, Lu C H, Lee T K, Nakashima A, Urano J, Ishikawa T, Tamano F, Miao J W 2010 Proc. Natl. Acad. Sci. USA 107 11234 Google Scholar
[12]	Rodriguez J A, Xu R, Chen C C, Huang Z F, Jiang H D, Chen A L, Raines K S, Jr A P, Nam D, Wiegart L, Song C Y, Madsen A, Chushkin Y, Zontone F, Bradley P J, Miao J W 2015 IUCrJ 2 575 Google Scholar
[13]	Yang W G, Huang X J, Harder R, Clark J N, Robinson I K, Mao H K 2013 Nat. Commun. 4 1680 Google Scholar
[14]	Holler M, Sicairos M G, Tsai E H R, Dinapoli R, M, Müller E, Bunk O, Raabe J, Aeppli G 2017 Nature 543 402 Google Scholar
[15]	Miao J W, Ishikawa T, Robinson I K, Murnane M M 2015 Science 348 530 Google Scholar
[16]	Zhang X Y 2018 Synchrotron Radiation Applications (Singapore: World Scientific Hackensack) pp343−388
[17]	Grübel G, Madsen A, Robert A (Borsali R, Pecora R eds) 2008 Soft Matter Characterization (Heidelberg: Springer Netherlands) pp953−995
[18]	Sinha S K, Jiang Z, Lurio L B 2014 Adv. Mater. 26 7764 Google Scholar
[19]	张明俊, 郭智, 邰仁忠, 张祥志, 罗豪甦 2015 64 147801 Google Scholar Zhang M J, Guo Z, Tai R Z, Zhang X Z, Luo H S 2015 Acta Phys. Sin. 64 147801 Google Scholar
[20]	Xu R, Salha S, Raines K S, Jiang H D, Chen C C, Takahashi Y, Kohmura Y, Nishino Y, Song C Y, Ishikawa T, Miao J W 2011 J. Synchrotron Radiat. 18 293 Google Scholar
[21]	Rau C, Wagner U, Pesic Z, Fanis A D 2011 Phys. Status Solidi A 208 2522 Google Scholar
[22]	Xu Z J, Wang C P, Liu H G, Tao X L, Tai R Z 2017 J. Phy. Conf. Ser. 849 012033 Google Scholar
[23]	Li N, Li X, Wang Y, Liu G, Zhou P, Wu H, Hong C, Bian F, Zhang R 2016 J. Appl. Crystallogr. 49 1428 Google Scholar
[24]	玻恩M, 沃耳夫E 著 (杨葭荪译)2009 光学原理: 光的传播、干涉和衍射的电磁理论(第7版) (北京: 电子工业出版社) 第459−525页 Born M, Wolf E (translated by Yang J S) 2009 Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (7th Ed.) (Beijing: Publishing House of Electronics Industry) pp459−525 (in Chinese)
[25]	徐朝银著 2013 同步辐射光学与工程 (合肥: 中国科学技术大学出版社) 第24−37页 Xu C Y 2013 Synchrotron Radiation Optics and Engineering (Hefei: Press of University of Science and Technology of China) pp24−37 (in Chinese)
[26]	王华, 闫帅, 闫芬, 蒋升, 毛成文, 梁东旭, 杨科, 李爱国, 余笑寒 2012 61 144102 Google Scholar Wang H, Yan S, Yan F, Jiang S, Mao C W, Liang D X, Yang K, Li A G, Yu X H 2012 Acta Phys. Sin. 61 144102 Google Scholar
[27]	Tanaka T, Kitamura H 2001 J. Synchrotron Radiat. 8 1221 Google Scholar
[28]	Hua W Q, Bian F G, Song L, Li X H, Wang J 2013 Chin. Phys. C 37 068001 Google Scholar
[29]	Yu C J, Lee H C, Chan K, Cha W, Carnis J, Kim Y, Noh D Y, Kim H 2014 J. Synchrotron Radiat. 21 264 Google Scholar
[30]	Hua W Q, Zhou G Z, Wang Y Z, Zhou P, Yang S M, Peng C Q, Bian F G, Li X H, Wang J 2017 Chin. Opt. Lett. 15 033401 Google Scholar
[31]	Deng J J, Vine D J, Chen S, Jin Q L, Nashed Y S G, Peterka T, Vogt S, Jacobsen C 2017 Sci. Rep. 7 445 Google Scholar
[32]	Maiden A M, Rodenburg J M 2009 Ultramicroscopy 109 1256 Google Scholar

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