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Niobium-doped TiO2 thin films are deposited on strontium titanate substrates by E-beam evaporation deposition. Effects of post-annealing in hydrogen atmosphere on their optoelectrical properties are studied. The results show that the annealing in hydrogen atmosphere can enhance their conductivity values efficiently. The corresponding optium resistivity reaches 5.46×10-3 Ω·cm, and the transmittance values of the thin films are 60%–80%. The improvement in the conductive performance is attributed to the increase of the grain size of polycrystalline thin film, the formation of a lot of oxygen vacancies and H-doping caused by annealing in hydrogen atmosphere.
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Keywords:
- Nb-doped TiO2 /
- e-beam evaporation deposition /
- annealing /
- thin film
[1] Ginley D S, Bright C 2000 Mater. Res. Bull. 25 15
[2] Hamberg I, Granqvist C G 1986 J. Appl. Phys. 60 R123
[3] Furubayashi Y, Hitosugi T, Yamamoto Y, Inaba K, Kinoda G, Hirose Y, Shimada T, Hasegawa T 2005 Appl. Phys. Lett. 86 252101
[4] Hitosugi T, Furubayashi Y, Ueda A, Itabashi K, Inaba K, Hirose Y, Kinoda G, Yamamoto Y, Shimada T, Hasegawa T 2005 Jpn. J. Appl. Phys. 44 L1063
[5] Chen D M, Xu G, Miao L, Chen L H, Nakao S, Jin P 2010 J. Appl. Phys. 107 063707
[6] Taylor S R, McLennan S H 1986 The Continental Crust: Its Composition and Evolution (Oxford: Blackwell) p312
[7] Hoang N L H, Yamada N, Hitosugi T, Kasai J, Nakao S, Shimada T, Hasegawa T 2008 Appl. Phys. Express 1 115001
[8] Sato Y, Akizuki H, Kamiyama T, Shigesato Y 2008 Thin Solid Films 516 5758
[9] Kasai J, Hitosugi T, Moriyama M, Goshonoo K, Hoang N L H, Nakao S, Yamada N, Hasegawa T 2010 J. Appl. Phys. 107 053110
[10] Luo X D, Di G Q 2012 Acta Phys. Sin. 61 206803 (in Chinese) [罗晓东, 狄国庆 2012 61 206803]
[11] Zhang R S, Liu Y, Teng F, Song C L, Han G R 2012 Acta Phys. Sin. 61 017101 (in Chinese) [章瑞铄, 刘涌, 滕繁, 宋晨路, 韩高荣 2012 61 017101]
[12] Xue J, Pan F M, Pei Y 2013 Acta Phys. Sin. 62 158103 (in Chinese) [薛将, 潘风明, 裴煜 2013 62 158103]
[13] Gao P, Wu J, Liu Q J, Zhou W F 2010 Chin. Phys. B 19 087103
[14] Wang Q, Liang J F, Zhang R H, Li Q, Dai J F 2013 Chin. Phys. B 22 057801
[15] Park J H, Kang S J, Na S, Lee H H, Kim S W, Hosono H, Kim H K 2011 Sol. Energy Mater. Sol. Cells 95 2178
[16] Gillispie M A, van Hest M F A M, Dabney M S, Perkins J D, Ginley D S 2007 J. Appl. Phys. 101 033125
[17] Seo S J, Jeon J H, Hwang Y H, Bae B S 2011 Appl. Phys. Lett. 99 152102
[18] Cao L, Zhu L P, Ye Z Z 2013 J. Phys. Chem. Solids 74 668
[19] Park J H, Choi Y Y, Kim H K, Lee H H, Na S I 2010 J. Appl. Phys. 108 083509
[20] Park S M, Ikegami T, Ebihara K, Shin P K 2006 Appl. Surf. Sci. 253 1522
[21] Panayotov D A, Yates Jr J T 2007 Chem. Phys. Lett. 436 204
[22] Valentin C D, Pacchioni G 2009 J. Phys. Chem. C 113 20543
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[1] Ginley D S, Bright C 2000 Mater. Res. Bull. 25 15
[2] Hamberg I, Granqvist C G 1986 J. Appl. Phys. 60 R123
[3] Furubayashi Y, Hitosugi T, Yamamoto Y, Inaba K, Kinoda G, Hirose Y, Shimada T, Hasegawa T 2005 Appl. Phys. Lett. 86 252101
[4] Hitosugi T, Furubayashi Y, Ueda A, Itabashi K, Inaba K, Hirose Y, Kinoda G, Yamamoto Y, Shimada T, Hasegawa T 2005 Jpn. J. Appl. Phys. 44 L1063
[5] Chen D M, Xu G, Miao L, Chen L H, Nakao S, Jin P 2010 J. Appl. Phys. 107 063707
[6] Taylor S R, McLennan S H 1986 The Continental Crust: Its Composition and Evolution (Oxford: Blackwell) p312
[7] Hoang N L H, Yamada N, Hitosugi T, Kasai J, Nakao S, Shimada T, Hasegawa T 2008 Appl. Phys. Express 1 115001
[8] Sato Y, Akizuki H, Kamiyama T, Shigesato Y 2008 Thin Solid Films 516 5758
[9] Kasai J, Hitosugi T, Moriyama M, Goshonoo K, Hoang N L H, Nakao S, Yamada N, Hasegawa T 2010 J. Appl. Phys. 107 053110
[10] Luo X D, Di G Q 2012 Acta Phys. Sin. 61 206803 (in Chinese) [罗晓东, 狄国庆 2012 61 206803]
[11] Zhang R S, Liu Y, Teng F, Song C L, Han G R 2012 Acta Phys. Sin. 61 017101 (in Chinese) [章瑞铄, 刘涌, 滕繁, 宋晨路, 韩高荣 2012 61 017101]
[12] Xue J, Pan F M, Pei Y 2013 Acta Phys. Sin. 62 158103 (in Chinese) [薛将, 潘风明, 裴煜 2013 62 158103]
[13] Gao P, Wu J, Liu Q J, Zhou W F 2010 Chin. Phys. B 19 087103
[14] Wang Q, Liang J F, Zhang R H, Li Q, Dai J F 2013 Chin. Phys. B 22 057801
[15] Park J H, Kang S J, Na S, Lee H H, Kim S W, Hosono H, Kim H K 2011 Sol. Energy Mater. Sol. Cells 95 2178
[16] Gillispie M A, van Hest M F A M, Dabney M S, Perkins J D, Ginley D S 2007 J. Appl. Phys. 101 033125
[17] Seo S J, Jeon J H, Hwang Y H, Bae B S 2011 Appl. Phys. Lett. 99 152102
[18] Cao L, Zhu L P, Ye Z Z 2013 J. Phys. Chem. Solids 74 668
[19] Park J H, Choi Y Y, Kim H K, Lee H H, Na S I 2010 J. Appl. Phys. 108 083509
[20] Park S M, Ikegami T, Ebihara K, Shin P K 2006 Appl. Surf. Sci. 253 1522
[21] Panayotov D A, Yates Jr J T 2007 Chem. Phys. Lett. 436 204
[22] Valentin C D, Pacchioni G 2009 J. Phys. Chem. C 113 20543
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