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Theoretical studies of electrodes potential influence on the sensitivity and ratio of anode current and emission current (Igrid/Ie) will be beneficial for providing theoretical basis and experimental instruction in the research of ionization gauge with carbon nanotubes cathode. In this paper, based on the structure of IE514 extractor gauge, the model of carbon nanotube ionization gauge is built by ion optic simulation software SIMION 8.0. And the influence of electrode potential on the sensitivity and Igrid/Ie is discussed. Results show that with increasing ratio between anode voltage and gate voltage (Vgrid/Vgate), Igrid/Ie increases, while the sensitivity of the gauge decreases with the increase in anode voltage, which would further affect the extension of vacuum measurement lower limit. Moreover, the simulation results are in good agreement with the experimental data reported. Consequently, it is very important to improve the sensitivity, anode current and extension of measurement lower limit to set up an appropriate electrode voltage. In addition, the method adopted in this paper can be extended to the research and development of new-styles of extremely high vacuum ionization gauge of carbon nanotube cathode, which could provide an effective method to resolve the problem of extremely high vacuum measurement.
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Keywords:
- carbon nanotube ionization gauge /
- electrode voltage /
- sensitivity /
- anode current
[1] St. Wilfert, Chr. Edelmann 2012 Vacuum 86 556
[2] Cai M, Li D T, Cheng Y J, Chang P 2011 J. Vac. Sci. Technol 31 732 (in Chinese) [蔡敏, 李得天, 成永军, 常鹏 2011 真空科学与技术学报 31 732]
[3] Li D T, Cheng Y J, Feng Y, Cai M 2012 Shanghai Measurement and Testing 39 2 (in Chinese) [李得天, 成永军, 冯焱, 蔡敏 2012 上海计量测试 39 2]
[4] Dong C K, Myneni G R 2004 Appl. Phys. Lett. 84 5443
[5] Dong C K 2003 Ph. D. Dissertation (Virginia: Old Dominion University)
[6] Sheng L M, Liu P, Wei Y, Liu L, Qi J, Fan S S 2005 Diam. & Rela. Mater. 14 1695
[7] In-Mook Choi, Sam-Yong Woo 2005 Appl. Phys. Lett. 87 173104
[8] Huang J X, Chen J, Deng S Z, Xu N S 2007 J. Vac. Sci. Technol. B 25 651
[9] Alexanderov S Y, Arkhipov A V, Mishin M V, Sominski G G 2007 Surf Interf Anal. 39 146
[10] Xiao L, Qian L, Wei Y, Liu L, Fan S S 2008 J. Vac. Sci. Technol. A 26 1
[11] Hirofumi-Suto, Shunjiro Fujii, Kumiko Yoshihara, Kazuhiro Ishida, Yuya Tanaka, Shin-ichi Honda, Mitsuhiro Katayama 2008 Jpn J. Appl Phys. 47 2032
[12] Knapp W, Scheleussner D, West M 2008 J. Phys.: Conf Ser. 100 092007
[13] Yang Y C, Qian L, Tang J, Liu L, Fan S S 2008 Appl. Phys. Lett. 92 153105
[14] Liu H R, Hitoshi Nakahara, Sashiro Uemura, Yachachi Saito 2009 Vaccum 84 713
[15] Dahl D A, SMION 3D Version 8.0. Idaho National Laboratory, P. O. Box 1625, Idaho Falls, ID 83415 2008
[16] Lotz W 1967 Astrophys. J. Suppl. 14 207
[17] Tate J T, Smith P T 1932 Phys. Rev. 39 270
[18] Yuan X S, Zhang Y, Sun L M, Li X Y, Deng S Z, Xu N S, Yan Y 2012 Acta Phys. Sin. 61 21610 1 (in Chinese) [袁学松, 张宇, 孙利民, 黎晓云, 邓少芝, 许宁生, 鄢扬 2012 61 216101]
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[1] St. Wilfert, Chr. Edelmann 2012 Vacuum 86 556
[2] Cai M, Li D T, Cheng Y J, Chang P 2011 J. Vac. Sci. Technol 31 732 (in Chinese) [蔡敏, 李得天, 成永军, 常鹏 2011 真空科学与技术学报 31 732]
[3] Li D T, Cheng Y J, Feng Y, Cai M 2012 Shanghai Measurement and Testing 39 2 (in Chinese) [李得天, 成永军, 冯焱, 蔡敏 2012 上海计量测试 39 2]
[4] Dong C K, Myneni G R 2004 Appl. Phys. Lett. 84 5443
[5] Dong C K 2003 Ph. D. Dissertation (Virginia: Old Dominion University)
[6] Sheng L M, Liu P, Wei Y, Liu L, Qi J, Fan S S 2005 Diam. & Rela. Mater. 14 1695
[7] In-Mook Choi, Sam-Yong Woo 2005 Appl. Phys. Lett. 87 173104
[8] Huang J X, Chen J, Deng S Z, Xu N S 2007 J. Vac. Sci. Technol. B 25 651
[9] Alexanderov S Y, Arkhipov A V, Mishin M V, Sominski G G 2007 Surf Interf Anal. 39 146
[10] Xiao L, Qian L, Wei Y, Liu L, Fan S S 2008 J. Vac. Sci. Technol. A 26 1
[11] Hirofumi-Suto, Shunjiro Fujii, Kumiko Yoshihara, Kazuhiro Ishida, Yuya Tanaka, Shin-ichi Honda, Mitsuhiro Katayama 2008 Jpn J. Appl Phys. 47 2032
[12] Knapp W, Scheleussner D, West M 2008 J. Phys.: Conf Ser. 100 092007
[13] Yang Y C, Qian L, Tang J, Liu L, Fan S S 2008 Appl. Phys. Lett. 92 153105
[14] Liu H R, Hitoshi Nakahara, Sashiro Uemura, Yachachi Saito 2009 Vaccum 84 713
[15] Dahl D A, SMION 3D Version 8.0. Idaho National Laboratory, P. O. Box 1625, Idaho Falls, ID 83415 2008
[16] Lotz W 1967 Astrophys. J. Suppl. 14 207
[17] Tate J T, Smith P T 1932 Phys. Rev. 39 270
[18] Yuan X S, Zhang Y, Sun L M, Li X Y, Deng S Z, Xu N S, Yan Y 2012 Acta Phys. Sin. 61 21610 1 (in Chinese) [袁学松, 张宇, 孙利民, 黎晓云, 邓少芝, 许宁生, 鄢扬 2012 61 216101]
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