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Based on the recursive stiffness matrix method, the effective surface permittitivity model of multilayered surface acoustic wave structure is established. By this model, the frequency dispersive characteristic of phase velocity for the ZnO/Si layered structure is calculated. The calculation results are in agreement with the experimental results, which verifies the effectiveness and accuracy of the model. Furthermore, the model is also established for the determination of the phase velocity and electromechanical coupling coefficients of ZnO/Diamond/Si structure. The best combination of high velocity and high coupling coefficient of the structure is obtained, which provides a good reference for the design of a high-performance and high-capability surface acoustic wave device.
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Keywords:
- surface acoustic wave /
- multilayered structure /
- recursive stiffness matrix method /
- effective surface permittitivity
[1] Campell K C 1998 SAW for Mobile and Wireless Communication (San Diego: Academic) p5
[2] Mortet V, Elmazria O, Nesladek M, Assouar M B, Vanhoyland G, Haen D J, D Olieslaeger M, Alnot P 2002 Appl. Phys. Lett. 81 1720
[3] Siemens M, Li Q, Murnane M, Kapteyn H, Yang R G, Anderson E, Nelson K 2009 Appl. Phys. Lett. 94 093103-1
[4] Hashimoto K 2000 Surface Wave Devices in Telecommunications: Modeling and Simulation (New York: Springer) p110
[5] Nakahata H, Higaki K, Hachigo A, Shikata S, Fujimori N, Takahashi Y, Kajiwara T, Yamamoto Y 1994 Jpn. J. Appl. Phys. 44 324
[6] Nakahata H, Hachigo A, Higaki K, Fujii, Shikata S, Fujimori N 1995 IEEE Trans. Ultras. Ferroelectr. Frequency Control 42 362
[7] Campbell J J, Jones W R1968 IEEE Trans. Son. Ultrason. 15 209
[8] Adler E L 1994 IEEE Trans. Ultras. Ferroelectr. Frequency Control 41 699
[9] Wu T T, Chen Y Y 2002 IEEE Trans. Ultras. Ferroelectr. Frequency Control 49 142
[10] Wang L, Rokhlin S I 2002 Appl. Phys. Lett. 81 4050
[11] Wang L, Rokhlin S I 2004 J. Mech. Phys. Solids 52 2473
[12] Wang L, Rokhlin S I 2004 IEEE Trans. Ultras. Ferroelectr. Frequency Control 51 453
[13] Yang G, Santos Paulo V 2007 Acta Phys. Sin. 56 3515 (in Chinese) [杨光, Santos Paulo V 2007 56 3515]
[14] Sun C W, Liu Z W, Qin F W, Zhang Q Y, Liu K, Wu S F 2006 Acta Phys. Sin. 55 1390 (in Chinese) [孙成伟, 刘志文, 秦福文, 张庆瑜, 刘琨, 吴世法 2006 55 1390]
[15] Milsom R F, Reilly N H C, Redwood M 1977 IEEE Trans. Son. Ultrason. 24 147
[16] Clorennec D, Royer D 2003 Appl. Phys. Lett. 82 4608
[17] Smith P 2001 IEEE Trans. Ultrason. Ferroelectr. Frequency Control 48 171
[18] Le Brizoual L, Elmazria O, Sarry F, El Hakiki M, Talbi A, Alnot P 2006 Ultrasonics 45 100
[19] El Hakiki M, Elmazria O, Assouar M B, Mortet V, Le Brizoual L, Vanecek M, Alnot P 2005 Diamond and Related Mater. 14 1175
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[1] Campell K C 1998 SAW for Mobile and Wireless Communication (San Diego: Academic) p5
[2] Mortet V, Elmazria O, Nesladek M, Assouar M B, Vanhoyland G, Haen D J, D Olieslaeger M, Alnot P 2002 Appl. Phys. Lett. 81 1720
[3] Siemens M, Li Q, Murnane M, Kapteyn H, Yang R G, Anderson E, Nelson K 2009 Appl. Phys. Lett. 94 093103-1
[4] Hashimoto K 2000 Surface Wave Devices in Telecommunications: Modeling and Simulation (New York: Springer) p110
[5] Nakahata H, Higaki K, Hachigo A, Shikata S, Fujimori N, Takahashi Y, Kajiwara T, Yamamoto Y 1994 Jpn. J. Appl. Phys. 44 324
[6] Nakahata H, Hachigo A, Higaki K, Fujii, Shikata S, Fujimori N 1995 IEEE Trans. Ultras. Ferroelectr. Frequency Control 42 362
[7] Campbell J J, Jones W R1968 IEEE Trans. Son. Ultrason. 15 209
[8] Adler E L 1994 IEEE Trans. Ultras. Ferroelectr. Frequency Control 41 699
[9] Wu T T, Chen Y Y 2002 IEEE Trans. Ultras. Ferroelectr. Frequency Control 49 142
[10] Wang L, Rokhlin S I 2002 Appl. Phys. Lett. 81 4050
[11] Wang L, Rokhlin S I 2004 J. Mech. Phys. Solids 52 2473
[12] Wang L, Rokhlin S I 2004 IEEE Trans. Ultras. Ferroelectr. Frequency Control 51 453
[13] Yang G, Santos Paulo V 2007 Acta Phys. Sin. 56 3515 (in Chinese) [杨光, Santos Paulo V 2007 56 3515]
[14] Sun C W, Liu Z W, Qin F W, Zhang Q Y, Liu K, Wu S F 2006 Acta Phys. Sin. 55 1390 (in Chinese) [孙成伟, 刘志文, 秦福文, 张庆瑜, 刘琨, 吴世法 2006 55 1390]
[15] Milsom R F, Reilly N H C, Redwood M 1977 IEEE Trans. Son. Ultrason. 24 147
[16] Clorennec D, Royer D 2003 Appl. Phys. Lett. 82 4608
[17] Smith P 2001 IEEE Trans. Ultrason. Ferroelectr. Frequency Control 48 171
[18] Le Brizoual L, Elmazria O, Sarry F, El Hakiki M, Talbi A, Alnot P 2006 Ultrasonics 45 100
[19] El Hakiki M, Elmazria O, Assouar M B, Mortet V, Le Brizoual L, Vanecek M, Alnot P 2005 Diamond and Related Mater. 14 1175
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