The development of femtosecond laser-induced periodic nanostructures and their optical properties

Peng Na-Na; Huo Yan-Yan; Zhou Kan; Jia Xin; Pan Jia; Sun Zhen-Rong; Jia Tian-Qing

doi:10.7498/aps.62.094201

Abstract

Micromaching by using femtosecond laser has been developing rapidly. This paper introduces the main developments in the last ten years on the formation mechanisms of periodic ripples in metals, semiconductors, and dielectrics induced by femtosecond lasers. By combining the methods of multi-beam interferences with the self-organized periodic nanostructures, two-dimensional periodic complex nanostructures can be fabricated on the surface of semiconductors. Compared with that of plane surface, the photoluminescence of nanostructures increases greatly.

Keywords:

Authors and contacts

1.
State Key Laboratory of Precision Spectroscopy, Department of Physics, East China Normal University, Shanghai 200062, China
Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 51132004, 11027403 ), the Major Research Plan of the National Natural Science Foundation of China (Grant Nos. 2010CB923203, 2011CB808105), and the Shanghai Natural Science Foundation, China (Grant Nos. 11JC403500, 10XD1401800).

References

[1]	Birnbaum M 1965 J. Appl. Phys. 36 3688
[2]	Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1155
[3]	Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598
[4]	Yong H, Zhang T Q, Wang S F, Gong Q H 2000 Acta Phys. Sin. 49 1292 (in Chinese) [杨宏, 张铁桥, 王树峰, 龚旗煌 2000 49 1292]
[5]	Qiu J R, Jiang X W, Zhu C S, Gan F X 2001 Acta Phys. Sin. 50 871 (in Chinese) [邱建荣, 姜雄伟, 朱从善, 干福熹 2001 50 871]
[6]	Lu P X, Yu W, He F 2003 Acta Phys. Sin. 52 1965 (in Chinese) [陆培祥, 余玮, 何峰 2003 52 1965]
[7]	Zeng H D, Qu S L, Jiang X W, Qiu J R, Zhu C S, Gan X F 2003 Acta Phys. Sin. 52 2525 (in Chinese) [曾惠丹, 曲士良, 姜雄伟, 邱建荣, 朱从善, 干福熹 2003 52 2525]
[8]	Varel H, Wahmber M, Rosenfeld A, Ashkenasi D, Campbell E E B 1998 Appl. Surf. Sci. 127 128
[9]	Ozkan A M, Malshe A P, Railkar T A, Brown W D, Shirk M D, Molian P A 1999 Appl. Phys. Lett. 75 3716
[10]	Prodan E, Radloff C, Halas N J, Nordlander P 2003 Science 302 419
[11]	Jia T Q, Chen H X, Huang M, Zhao F L, Qiu J R, Li R X, Xu Z Z, He X K, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429
[12]	Guo X D, Li R X, Hang Y, Xu Z Z, Yu B K, Ma H L, Sun X W 2007 Mater. Lett. 61 4583
[13]	Vorobyev A Y, Guo C L 2005 Phys. Rev. B 72 195422
[14]	Yang Y, Yang J J, Xue L, Guo Y, 2010 Appl. Phys. Lett. 97 141101
[15]	Qi L, Nishii K, Namba Y 2009 Opt. Lett. 34 1846
[16]	Hou S S, Huo Y Y, Xiong P X, Zhang Y, Zhang S A, Jia T Q, Sun Z R, Qiu J R, Xu Z Z 2011 J. Phys. D 44 505401
[17]	Shen M, Carey J E, Crouch C H, Kandyla M, Stone H A, Mazur E 2008 Nano Lett. 8 2087
[18]	Huang M, Zhao F L, Jia T Q, Cheng Y, Xu N S, Xu Z Z 2007 Nanotech. 18 505301
[19]	Costache F, Henyk M, Reif J 2002 Appl. Surf. Sci. 186 352
[20]	Liang F, Vallée R, Chin S L 2012 Appl. Phys. Lett. 100 251105
[21]	Liang F, Vallée R, Chin S L 2011 Opt. Express 20 4389
[22]	Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K 2003 Phys. Rev. Lett. 91 247405
[23]	Yasumaru N, Miyazaki K, Kiuchi J 2003 Appl. Phys. A: Materials and Processing 76 983
[24]	Borowiec A, Haugen H K 2003 Appl. Phys. Lett. 82 4462
[25]	Bhardwaj V R, Simova E, Rajeev P P, Hnatovsky C, Taylor R S, Rayner D M, Corkum P B 2006 Phys. Rev. Lett. 96 057404
[26]	Dong Y Y, Molian P 2004 Appl. Phys. Lett. 84 10
[27]	Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908
[28]	Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 ACS Nano 3 4060
[29]	Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 Phys. Rev. B 79 125436
[30]	Wang J C, Guo C L 2005 Appl. Phys. Lett. 87 251914
[31]	Wang J C, Guo C L 2007 J. Appl. Phys. 102 053522
[32]	Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908
[33]	Jia X, Jia T Q, Zhang Y, Feng D H, Sun Z R, Qiu J R, Xu Z Z 2010 Opt. Lett. 35 1248
[34]	Jia T Q, Baba M, Suzuki M, Ganeev R A, Kuroda H, Qiu J R, Wang X S, Li R X, Xu Z Z 2008 Opt. Express 16 1874
[35]	Jia X, Jia T Q, Ding L E, Xiong P X, Deng L, Sun Z R, Wang Z G, Qiu J R, Xu Z Z 2009 Opt. Lett. 34 788
[36]	Xiong P X, Jia T Q, Jia X, Feng D H, Zhang S A, Ding L E, Sun Z R, Qiu J R, Xu Z Z 2011 New J. Phys. 13 023044
[37]	Yang Y, Yang J J, Liang C Y, Wang H S 2008 Opt. Express 16 11259
[38]	Vorobyev A Y, Guo C L 2008 Appl. Phys. Lett. 92 041914
[39]	Vorobyev A Y, Topkov A N, Gurin O V, Svich V A, Guo C L 2009 Appl. Phys. Lett. 95 121106
[40]	Zhao Q Z, Ciobanu F, Malzer S, Wang L J 2007 Appl. Phys. Lett. 91 121107
[41]	Jia X, Jia T Q, Zhang Y, Xiong P X, Feng D H, Sun Z R, Xu Z Z 2010 Opt. Express 18 14401
[42]	Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301
[43]	Sudrie L, Franco M, Prade B, Mysyrowicz A 2001 Opt. Commun. 191 333
[44]	Bricchi E, Klappauf B G, Kazansky P G 2004 Opt. Lett. 29 119
[45]	Cheng G, Mishchik K, Mauclair C, Audouard E, Stoian R 2009 Opt. Express 17 9515
[46]	Ramirez L P R, Heinrich M, Richter S, Dreisow F, Keil R, Korovin A V, Peschel U, Nolte S, Tunnermann A 2010 Appl. Phys. A 100 1
[47]	Bricchi E, Mills J D, Kazansky P G, Klappauf B G 2002 Opt. Lett. 27 2200
[48]	Beresna M, Kazansky P G 2010 Opt. Lett. 35 1662
[49]	Shimotsuma Y, Sakakura M, Kazansky P G, Beresna M, Qiu J R, Miura K, Hirao K 2010 Adv. Mater. 22 4039

Cited By

[1]	Birnbaum M 1965 J. Appl. Phys. 36 3688
[2]	Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1155
[3]	Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598
[4]	Yong H, Zhang T Q, Wang S F, Gong Q H 2000 Acta Phys. Sin. 49 1292 (in Chinese) [杨宏, 张铁桥, 王树峰, 龚旗煌 2000 49 1292]
[5]	Qiu J R, Jiang X W, Zhu C S, Gan F X 2001 Acta Phys. Sin. 50 871 (in Chinese) [邱建荣, 姜雄伟, 朱从善, 干福熹 2001 50 871]
[6]	Lu P X, Yu W, He F 2003 Acta Phys. Sin. 52 1965 (in Chinese) [陆培祥, 余玮, 何峰 2003 52 1965]
[7]	Zeng H D, Qu S L, Jiang X W, Qiu J R, Zhu C S, Gan X F 2003 Acta Phys. Sin. 52 2525 (in Chinese) [曾惠丹, 曲士良, 姜雄伟, 邱建荣, 朱从善, 干福熹 2003 52 2525]
[8]	Varel H, Wahmber M, Rosenfeld A, Ashkenasi D, Campbell E E B 1998 Appl. Surf. Sci. 127 128
[9]	Ozkan A M, Malshe A P, Railkar T A, Brown W D, Shirk M D, Molian P A 1999 Appl. Phys. Lett. 75 3716
[10]	Prodan E, Radloff C, Halas N J, Nordlander P 2003 Science 302 419
[11]	Jia T Q, Chen H X, Huang M, Zhao F L, Qiu J R, Li R X, Xu Z Z, He X K, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429
[12]	Guo X D, Li R X, Hang Y, Xu Z Z, Yu B K, Ma H L, Sun X W 2007 Mater. Lett. 61 4583
[13]	Vorobyev A Y, Guo C L 2005 Phys. Rev. B 72 195422
[14]	Yang Y, Yang J J, Xue L, Guo Y, 2010 Appl. Phys. Lett. 97 141101
[15]	Qi L, Nishii K, Namba Y 2009 Opt. Lett. 34 1846
[16]	Hou S S, Huo Y Y, Xiong P X, Zhang Y, Zhang S A, Jia T Q, Sun Z R, Qiu J R, Xu Z Z 2011 J. Phys. D 44 505401
[17]	Shen M, Carey J E, Crouch C H, Kandyla M, Stone H A, Mazur E 2008 Nano Lett. 8 2087
[18]	Huang M, Zhao F L, Jia T Q, Cheng Y, Xu N S, Xu Z Z 2007 Nanotech. 18 505301
[19]	Costache F, Henyk M, Reif J 2002 Appl. Surf. Sci. 186 352
[20]	Liang F, Vallée R, Chin S L 2012 Appl. Phys. Lett. 100 251105
[21]	Liang F, Vallée R, Chin S L 2011 Opt. Express 20 4389
[22]	Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K 2003 Phys. Rev. Lett. 91 247405
[23]	Yasumaru N, Miyazaki K, Kiuchi J 2003 Appl. Phys. A: Materials and Processing 76 983
[24]	Borowiec A, Haugen H K 2003 Appl. Phys. Lett. 82 4462
[25]	Bhardwaj V R, Simova E, Rajeev P P, Hnatovsky C, Taylor R S, Rayner D M, Corkum P B 2006 Phys. Rev. Lett. 96 057404
[26]	Dong Y Y, Molian P 2004 Appl. Phys. Lett. 84 10
[27]	Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908
[28]	Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 ACS Nano 3 4060
[29]	Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 Phys. Rev. B 79 125436
[30]	Wang J C, Guo C L 2005 Appl. Phys. Lett. 87 251914
[31]	Wang J C, Guo C L 2007 J. Appl. Phys. 102 053522
[32]	Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908
[33]	Jia X, Jia T Q, Zhang Y, Feng D H, Sun Z R, Qiu J R, Xu Z Z 2010 Opt. Lett. 35 1248
[34]	Jia T Q, Baba M, Suzuki M, Ganeev R A, Kuroda H, Qiu J R, Wang X S, Li R X, Xu Z Z 2008 Opt. Express 16 1874
[35]	Jia X, Jia T Q, Ding L E, Xiong P X, Deng L, Sun Z R, Wang Z G, Qiu J R, Xu Z Z 2009 Opt. Lett. 34 788
[36]	Xiong P X, Jia T Q, Jia X, Feng D H, Zhang S A, Ding L E, Sun Z R, Qiu J R, Xu Z Z 2011 New J. Phys. 13 023044
[37]	Yang Y, Yang J J, Liang C Y, Wang H S 2008 Opt. Express 16 11259
[38]	Vorobyev A Y, Guo C L 2008 Appl. Phys. Lett. 92 041914
[39]	Vorobyev A Y, Topkov A N, Gurin O V, Svich V A, Guo C L 2009 Appl. Phys. Lett. 95 121106
[40]	Zhao Q Z, Ciobanu F, Malzer S, Wang L J 2007 Appl. Phys. Lett. 91 121107
[41]	Jia X, Jia T Q, Zhang Y, Xiong P X, Feng D H, Sun Z R, Xu Z Z 2010 Opt. Express 18 14401
[42]	Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301
[43]	Sudrie L, Franco M, Prade B, Mysyrowicz A 2001 Opt. Commun. 191 333
[44]	Bricchi E, Klappauf B G, Kazansky P G 2004 Opt. Lett. 29 119
[45]	Cheng G, Mishchik K, Mauclair C, Audouard E, Stoian R 2009 Opt. Express 17 9515
[46]	Ramirez L P R, Heinrich M, Richter S, Dreisow F, Keil R, Korovin A V, Peschel U, Nolte S, Tunnermann A 2010 Appl. Phys. A 100 1
[47]	Bricchi E, Mills J D, Kazansky P G, Klappauf B G 2002 Opt. Lett. 27 2200
[48]	Beresna M, Kazansky P G 2010 Opt. Lett. 35 1662
[49]	Shimotsuma Y, Sakakura M, Kazansky P G, Beresna M, Qiu J R, Miura K, Hirao K 2010 Adv. Mater. 22 4039

[1]	Zhao Song, Zhou Hua, Wang Shu-Ying, Han Fei, Jiang Si-Han, Shen Xiang-Qian. Design of high efficiency perovskite/silicon tandem solar cells based on plasmonic enhancement of metal nanosphere. Acta Physica Sinica, 2022, 71(3): 038801. doi: 10.7498/aps.71.20211585
[2]	Zhang Ke-Jin, Liu Lei, Zeng Qing-Wei, Gao Tai-Chang, Hu Shuai, Chen Ming. Influence of different scattering medium on propagation characteristics to femtosecond laser pulses. Acta Physica Sinica, 2019, 68(19): 194207. doi: 10.7498/aps.68.20190430
[3]	Jiao Yue, Tao Hai-Yan, Ji Bo-Yu, Song Xiao-Wei, Lin Jing-Quan. Near field enhancement of TiO2 nanoparticle array on different substrates for femtosecond laser processing. Acta Physica Sinica, 2017, 66(14): 144203. doi: 10.7498/aps.66.144203
[4]	Lü Hao, You Kai, Lan Yan-Yan, Gao Dong, Zhao Qiu-Ling, Wang Xia. Fabrication of two-dimensional micro-nano photonic structures by symmetry-lost beams interference. Acta Physica Sinica, 2017, 66(21): 217801. doi: 10.7498/aps.66.217801
[5]	Yang Qing, Du Guang-Qing, Chen Feng, Wu Yan-Min, Ou Yan, Lu Yu, Hou Xun. Investigation on the electron dynamics of periodic nano ripple formation on fused silica induced by temporally shaped femtosecond laser. Acta Physica Sinica, 2014, 63(4): 047901. doi: 10.7498/aps.63.047901
[6]	Zhang Wei, Teng Hao, Wang Zhao-Hua, Shen Zhong-Wei, Liu Cheng, Wei Zhi-Yi. A ring Ti:sapphire regenerative amplifier for high energy chirped pulse amplification. Acta Physica Sinica, 2013, 62(10): 104211. doi: 10.7498/aps.62.104211
[7]	Liu Xiao-Liang, Sun Shao-Hua, Cao Yu, Sun Ming-Ze, Liu Qing-Cao, Hu Bi-Tao. Experimental study on the behaviors of femtosecond-laser-induced low-pressure N2 plasma. Acta Physica Sinica, 2013, 62(4): 045201. doi: 10.7498/aps.62.045201
[8]	Wang Chang-Zhou, Zhu Wei-Ling, Zhai Ji-Wei, Lai Tian-Shu. Phase-change behaviors in Ga30Sb70/Sb80Te20 nanocomposite multilayer films. Acta Physica Sinica, 2013, 62(3): 036402. doi: 10.7498/aps.62.036402
[9]	Du Yun, Lu Nian-Peng, Yang Hu, Ye Man-Ping, Li Chao-Rong. Electrical, optical properties and structure characterization of In-doped copper nitride thin film. Acta Physica Sinica, 2013, 62(11): 118104. doi: 10.7498/aps.62.118104
[10]	Zhang Xiao-Qing, He Hao, Hu Ming-Lie, Yan Xin, Zhang Xia, Ren Xiao-Min, Wang Qing-Yue. Optical SHG properties of GaAs nanowires irradiated with multi-wavelength femto-second laser pulses. Acta Physica Sinica, 2013, 62(7): 076102. doi: 10.7498/aps.62.076102
[11]	Li Bao-Jia, Zhou Ming, Zhang Wei. Femtosecond laser induced silicon surface cone microstructures by covering transparent films. Acta Physica Sinica, 2012, 61(23): 237901. doi: 10.7498/aps.61.237901
[12]	Zhu Li-Dan, Sun Fang-Yuan, Zhu Jie, Tang Da-Wei. Study on ultra fast nonequilibrium heat transfers in nano metal films by femtosecond laser pump and probe method. Acta Physica Sinica, 2012, 61(13): 134402. doi: 10.7498/aps.61.134402
[13]	Wang Guang-Chang, Ma Chun-Sheng, Zhang Jian-Wei, Bai Chun-Yan, Liu Yu-Hong, Zheng Zhi-Jian. Experimental study of time characteristic of optical radiation in femtosecond laser interaction with solid targets. Acta Physica Sinica, 2012, 61(9): 095201. doi: 10.7498/aps.61.095201
[14]	Xiong Ping-Xin, Jia Xin, Jia Tian-Qing, Deng Li, Feng Dong-Hai, Sun Zhen-Rong, Xu Zhi-Zhan. Two-dimensional complex nano-micro patterning on GaP and ZnSe surface created by the interference of three femtosecond laser beams. Acta Physica Sinica, 2010, 59(1): 311-316. doi: 10.7498/aps.59.311
[15]	Liu Huan, Yao Jian-Quan, Li En-Bang. Simulated calculation and analysis of the forbidden band for fabricating two- and three-dimensional photonic crystal structures using holographic lithography. Acta Physica Sinica, 2006, 55(5): 2286-2292. doi: 10.7498/aps.55.2286
[16]	Wang Zhao-Hua, Wei Zhi-Yi, Zhang Jie. Measurement of femtosecond laser pulses using PG frequency-resolved optical gating. Acta Physica Sinica, 2005, 54(3): 1194-1199. doi: 10.7498/aps.54.1194
[17]	Luo Zhi-Yong, Yang Li-Feng, Chen Yun-Chang. Phase-shift algorithm research based on multiple-beam interference principle. Acta Physica Sinica, 2005, 54(7): 3051-3057. doi: 10.7498/aps.54.3051
[18]	Xu Hai-Jun, Fu Xiao-Nan, Sun Xin-Rui, Li Xin-Jian. Investigations on the structural and optical properties of silicon nanoporous pillar array. Acta Physica Sinica, 2005, 54(5): 2352-2357. doi: 10.7498/aps.54.2352
[19]	Wang Zhao-Hua, Wei Zhi-Yi, Teng Hao, Wang Peng, Zhang Jie. Measurement of femtosecond laser pulses using SHG frequency-resolved optical gating technique. Acta Physica Sinica, 2003, 52(2): 362-366. doi: 10.7498/aps.52.362
[20]	QIU JIAN-RONG, JIANG XIONG-WEI, ZHU CONG-SHAN, GAN FU-XI. ESR STUDIES AND THRESHOLDS OF FEMTOSECOND LASER INDUCED DARKENING IN GLASSES. Acta Physica Sinica, 2001, 50(5): 871-874. doi: 10.7498/aps.50.871

Catalog

Vol. 62, Issue 9 - 2013-05-05

Metrics

Abstract views: 8244
PDF Downloads: 1279
Cited By: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

Search

Article

留言板