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The glow discharge polymer (GDP) films each with a thickness of about 5 m are deposited by low-pressure plasma polymer apparatus. The GDP films are heat-treated at different tempertures of 280, 300, 320 and 340 ℃ in Ar atmosphere. The influence of heat treatment on the structure of GDP film is characterized by FT-IR. The optical transparency and optical band of GDP film are investigated by UV-VIS spectrum. The results show that with temperature increasing, the relative content of CH3 decreases, while the relative content values of CH2 and CH increase. The H content in GDP film decreases. The optical band gap decreases, and the transmittance in a range of more than 600nm decreases too.
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Keywords:
- heat treatment /
- structure /
- plasma polymer /
- optical property
[1] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫, 刘兴华, 杨向东 2009 58 6436]
[2] Wmcquillan B, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 General Atomics Rport GA-A22494
[3] Yian J C, He Z B, Yang Z L, Chen Z M, Tang Y J, Wei J J 2010 Acta Phys. Sin. 59 8005 (in Chinese) [闫建成, 何智兵, 陈志梅, 唐永建, 韦建军 2010 59 8005]
[4] Hoppe M L, Sr, Steinman D A 2007 General Atomics Report GA-A 25664
[5] Li H X, Xu T, Wang C W, Chen J M, Zhou H D, Liu H W 2006 Thin Solid Films 515 2153
[6] Ristein J, Stief R T, Ley L 1998 Journal of Applied Physics 84 3836
[7] Kim M H, Lee J Y 1991 Journal of Materials Science 26 4787
[8] Bounouh Y, Theye M L, Dehbi-Alaoui A, Matthews A, Stoquert J P 1995 Phys. Rev. B 51 9597
[9] Qing Zhang, Yoon S F, Rusli, Yang H, Ahn J 1998 J. Appl. Phys. 83 1349
[10] Czechowicz D G, Castillo E R, Nikroo A 2002 General Atomics Report GA-A 23753
[11] Li H X, Xu T, Wang C B, Chen J M, Zhou H D, Liu H W 2006 Thin Solid Films 515 2155
[12] Kim M H, Lee J Y 1991 Journal of Materials Science 26 4787
[13] Jiang X, Beyer W, Reichelt K 1990 J. Appl. Phys. 68 1378
[14] Veres M , Koos M, Pocsik I 2002 Diamond and Related Materials 11 1110
[15] Piazza F, Golanski A, Schulze S, etal 2003 Appl. Phys. Lett.82 358
[16] Kim M H, Lee J Y 1991 Journal of Materials SciencePhysics 26 4787
[17] Liu D P, Yu S H J, Ma T C 2000 Chinese Journal of Materials Research 14 555 (in Chinese) [刘东平, 俞世吉, 马腾才 2000 材料研究学报 14 555]
[18] Johnc C Angus 1992 Thin Solid Films 216 126
[19] Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 60 028105]
[20] Zeng L G, Liu F M, Zhong W F, Ding P, Cai L G 2011 Acta Phys. Sin. 60 038203 (in Chinese) [ 曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 60 038203]
[21] Ye C, Ning Z Y, Cheng S H, Wang X Y 2002 Acta Phys. Sin. 51 2041 (in Chinese) [叶超, 宁兆元, 程珊华, 王响英 2002 51 2041]
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[1] Zhang B L, He Z B, Wu W D, Liu X H, Yang X D 2009 Acta Phys. Sin. 58 4636 (in Chinese) [张宝玲, 何智兵, 吴卫, 刘兴华, 杨向东 2009 58 6436]
[2] Wmcquillan B, Nikroo A, Steinman D A, Elsner F H, Czechowicz D G, Hoppe M L, Sixtus M, Miller W J 1996 General Atomics Rport GA-A22494
[3] Yian J C, He Z B, Yang Z L, Chen Z M, Tang Y J, Wei J J 2010 Acta Phys. Sin. 59 8005 (in Chinese) [闫建成, 何智兵, 陈志梅, 唐永建, 韦建军 2010 59 8005]
[4] Hoppe M L, Sr, Steinman D A 2007 General Atomics Report GA-A 25664
[5] Li H X, Xu T, Wang C W, Chen J M, Zhou H D, Liu H W 2006 Thin Solid Films 515 2153
[6] Ristein J, Stief R T, Ley L 1998 Journal of Applied Physics 84 3836
[7] Kim M H, Lee J Y 1991 Journal of Materials Science 26 4787
[8] Bounouh Y, Theye M L, Dehbi-Alaoui A, Matthews A, Stoquert J P 1995 Phys. Rev. B 51 9597
[9] Qing Zhang, Yoon S F, Rusli, Yang H, Ahn J 1998 J. Appl. Phys. 83 1349
[10] Czechowicz D G, Castillo E R, Nikroo A 2002 General Atomics Report GA-A 23753
[11] Li H X, Xu T, Wang C B, Chen J M, Zhou H D, Liu H W 2006 Thin Solid Films 515 2155
[12] Kim M H, Lee J Y 1991 Journal of Materials Science 26 4787
[13] Jiang X, Beyer W, Reichelt K 1990 J. Appl. Phys. 68 1378
[14] Veres M , Koos M, Pocsik I 2002 Diamond and Related Materials 11 1110
[15] Piazza F, Golanski A, Schulze S, etal 2003 Appl. Phys. Lett.82 358
[16] Kim M H, Lee J Y 1991 Journal of Materials SciencePhysics 26 4787
[17] Liu D P, Yu S H J, Ma T C 2000 Chinese Journal of Materials Research 14 555 (in Chinese) [刘东平, 俞世吉, 马腾才 2000 材料研究学报 14 555]
[18] Johnc C Angus 1992 Thin Solid Films 216 126
[19] Ding W Y, Wang H L, Ju D Y, Cai W P 2011 Acta Phys. Sin. 60 028105 (in Chinese) [丁万昱, 王华林, 巨东英, 蔡卫平 2011 60 028105]
[20] Zeng L G, Liu F M, Zhong W F, Ding P, Cai L G 2011 Acta Phys. Sin. 60 038203 (in Chinese) [ 曾乐贵, 刘发民, 钟文武, 丁芃, 蔡鲁刚, 周船仓 2011 60 038203]
[21] Ye C, Ning Z Y, Cheng S H, Wang X Y 2002 Acta Phys. Sin. 51 2041 (in Chinese) [叶超, 宁兆元, 程珊华, 王响英 2002 51 2041]
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