UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD

Yang Fa-Zhan; Shen Li-Ru; Wang Shi-Qing; Tang De-Li; Jin Fa-Ya; Liu Hai-Feng

doi:10.7498/aps.62.017802

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Yang Fa-Zhan, Shen Li-Ru, Wang Shi-Qing, Tang De-Li, Jin Fa-Ya, Liu Hai-Feng. UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVDJ. Acta Physica Sinica, 2013, 62(1): 017802. DOI: 10.7498/aps.62.017802

Citation:

Yang Fa-Zhan, Shen Li-Ru, Wang Shi-Qing, Tang De-Li, Jin Fa-Ya, Liu Hai-Feng. UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVDJ. Acta Physica Sinica, 2013, 62(1): 017802. DOI: 10.7498/aps.62.017802

Citation:

Yang Fa-Zhan, Shen Li-Ru, Wang Shi-Qing, Tang De-Li, Jin Fa-Ya, Liu Hai-Feng. UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVDJ. Acta Physica Sinica, 2013, 62(1): 017802. DOI: 10.7498/aps.62.017802