Influence of SiC intermediate layer on adhesion property of F-DLC film

Pan Yue; Zhao Qiang; Jiang Ge; Zhou Yang; Jiang Mei-Fu; Yang Yi-Shang

doi:10.7498/aps.62.015209

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Pan Yue, Zhao Qiang, Jiang Ge, Zhou Yang, Jiang Mei-Fu, Yang Yi-Shang. Influence of SiC intermediate layer on adhesion property of F-DLC filmJ. Acta Physica Sinica, 2013, 62(1): 015209. DOI: 10.7498/aps.62.015209

Citation:

Pan Yue, Zhao Qiang, Jiang Ge, Zhou Yang, Jiang Mei-Fu, Yang Yi-Shang. Influence of SiC intermediate layer on adhesion property of F-DLC filmJ. Acta Physica Sinica, 2013, 62(1): 015209. DOI: 10.7498/aps.62.015209

Citation:

Pan Yue, Zhao Qiang, Jiang Ge, Zhou Yang, Jiang Mei-Fu, Yang Yi-Shang. Influence of SiC intermediate layer on adhesion property of F-DLC filmJ. Acta Physica Sinica, 2013, 62(1): 015209. DOI: 10.7498/aps.62.015209