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Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are investigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.
[1] Ganjoo A 2008 J. Non-Cryst. Solids 354 2757
[2] Anne M L, Keirsse J, Nazabal V 2009 Sensor 9 7389
[3] Grillet C, Smith C, Freeman D, Madden S, Luther-Davies B, MagiE, Moss D, Eggleton B 2006 Opt. Express 14 1070
[4] Zakery A, Elliott S R 2003 J. Non-Cryst. Solids 330 1
[5] Ruan Y, LiW, Jarvis R, Madsen N, Rode A, Luther-Davies B 2004Opt. Express 12 5140
[6] Ta'eed V G, Shokook-Saremi M, Fu L B, Moss D J, Rochette M,Littler I, Eggleton B, Ruan Y L, Luther-Davies B 2005 Opt. Lett.30 2900
[7] Gai X, Han T, Prasad A, Madden S, Choi D Y,Wang R P, Bulla D,Luther-Davies B 2010 Opt. Express 18 26635
[8] Hu J, Tarasov V, Agarwal A, Kimerling L 2007 Opt. Express 152307
[9] Kohoutek T, Wagner T, Orava J, Frumar M, Perina V, Mackova A,Hnatowitz V, Vlcek M, Kasap S 2004 Vacuum 76 191
[10] Song S, Song Z Liu B, Wu L, Feng S 2010 Mater. Lett. 64 317
[11] Castillo-Alvarado F L, Inoue-Chavez J A, Vigil-Galan, Sanchez-Meza E, Lopez-Chavez E, Contreras-Puente G 2010 Thin SolidFilms 518 1796
[12] Atyia H E 2008 Physica B 403 16
[13] Fick J, Nicolas B, Rivero C, Elshot K, Irwin R, Richardson K A,Fischer M, Vallee R 2002 Thin Solid Films 418 215
[14] Jarvis R A, Wang R P, Rode A V, Zha C, Luther-Davies B 2007 J.Non-Cryst. Solids 353 947
[15] Mahmoud S T, Ghamlouche H, Qamhieh N, Al-Shamisi H 2007Appl. Surf. Sci. 253 7242
[16] Gonzalez-Leal J M, Prieto-Alcon R, Stuchlik M, Vlcek M, ElliottS R, Marquez E 2004 Opt Mater. 27 147
[17] Zhang H F, Du P Y, Weng W J, Han G R 2005 Acta Phys. Sin. 545329 (in Chinese) [张海芳, 杜丕一, 翁文剑, 韩高荣 2005 54 5329]
[18] Nemec P, Zhang S, Nazabal V, Fedus K, Boudebs G, Moreac A,Cathelinaud M, Zhang X H 2010 Opt. Express 18 22944
[19] Yeno H J, Mohanty B C, Yong S C 2010 Solar Energy 84 2213
[20] Chen A P, Long H, Wang K, Yang G, Fu M, Li Y H, Lu P X 2009Acta Phys. Sin. 58 607 (in Chinese) [陈爱平,龙华, 王凯, 杨光, 付明, 李玉华, 陆培祥 2009 58 607]
[21] Yang G, Chen Z H 2007 Acta Phys. Sin. 56 1182 (in Chinese) [杨光, 陈正豪 2007 56 1182]
[22] Tauc J, Manth A 1972 J. Non-Cryst. Solids 8-10 569
[23] Nazabal V, Nemec P, Jurdyc A M, Zhang S, Charpentier F, LhermiteH, Charrier J, Guin J P, Moreac A, Frumar M, Adam J L 2010Thin Solid Films 518 4941
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[1] Ganjoo A 2008 J. Non-Cryst. Solids 354 2757
[2] Anne M L, Keirsse J, Nazabal V 2009 Sensor 9 7389
[3] Grillet C, Smith C, Freeman D, Madden S, Luther-Davies B, MagiE, Moss D, Eggleton B 2006 Opt. Express 14 1070
[4] Zakery A, Elliott S R 2003 J. Non-Cryst. Solids 330 1
[5] Ruan Y, LiW, Jarvis R, Madsen N, Rode A, Luther-Davies B 2004Opt. Express 12 5140
[6] Ta'eed V G, Shokook-Saremi M, Fu L B, Moss D J, Rochette M,Littler I, Eggleton B, Ruan Y L, Luther-Davies B 2005 Opt. Lett.30 2900
[7] Gai X, Han T, Prasad A, Madden S, Choi D Y,Wang R P, Bulla D,Luther-Davies B 2010 Opt. Express 18 26635
[8] Hu J, Tarasov V, Agarwal A, Kimerling L 2007 Opt. Express 152307
[9] Kohoutek T, Wagner T, Orava J, Frumar M, Perina V, Mackova A,Hnatowitz V, Vlcek M, Kasap S 2004 Vacuum 76 191
[10] Song S, Song Z Liu B, Wu L, Feng S 2010 Mater. Lett. 64 317
[11] Castillo-Alvarado F L, Inoue-Chavez J A, Vigil-Galan, Sanchez-Meza E, Lopez-Chavez E, Contreras-Puente G 2010 Thin SolidFilms 518 1796
[12] Atyia H E 2008 Physica B 403 16
[13] Fick J, Nicolas B, Rivero C, Elshot K, Irwin R, Richardson K A,Fischer M, Vallee R 2002 Thin Solid Films 418 215
[14] Jarvis R A, Wang R P, Rode A V, Zha C, Luther-Davies B 2007 J.Non-Cryst. Solids 353 947
[15] Mahmoud S T, Ghamlouche H, Qamhieh N, Al-Shamisi H 2007Appl. Surf. Sci. 253 7242
[16] Gonzalez-Leal J M, Prieto-Alcon R, Stuchlik M, Vlcek M, ElliottS R, Marquez E 2004 Opt Mater. 27 147
[17] Zhang H F, Du P Y, Weng W J, Han G R 2005 Acta Phys. Sin. 545329 (in Chinese) [张海芳, 杜丕一, 翁文剑, 韩高荣 2005 54 5329]
[18] Nemec P, Zhang S, Nazabal V, Fedus K, Boudebs G, Moreac A,Cathelinaud M, Zhang X H 2010 Opt. Express 18 22944
[19] Yeno H J, Mohanty B C, Yong S C 2010 Solar Energy 84 2213
[20] Chen A P, Long H, Wang K, Yang G, Fu M, Li Y H, Lu P X 2009Acta Phys. Sin. 58 607 (in Chinese) [陈爱平,龙华, 王凯, 杨光, 付明, 李玉华, 陆培祥 2009 58 607]
[21] Yang G, Chen Z H 2007 Acta Phys. Sin. 56 1182 (in Chinese) [杨光, 陈正豪 2007 56 1182]
[22] Tauc J, Manth A 1972 J. Non-Cryst. Solids 8-10 569
[23] Nazabal V, Nemec P, Jurdyc A M, Zhang S, Charpentier F, LhermiteH, Charrier J, Guin J P, Moreac A, Frumar M, Adam J L 2010Thin Solid Films 518 4941
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