Search

x
中国物理学会期刊
Advanced Search
Jiang Li-Hua, Zeng Xiang-Bin, Zhang Xiao. The variations in composition and bonding configuration of SiNx film under high annealing temperature treatmentJ. Acta Physica Sinica, 2012, 61(1): 016803. DOI: 10.7498/aps.61.016803
Citation: Jiang Li-Hua, Zeng Xiang-Bin, Zhang Xiao. The variations in composition and bonding configuration of SiNx film under high annealing temperature treatmentJ. Acta Physica Sinica, 2012, 61(1): 016803. DOI: 10.7498/aps.61.016803
shu

The variations in composition and bonding configuration of SiNx film under high annealing temperature treatment

Acta Phys. Sin., 2012, 61(1): 016803.
DOI: 10.7498/aps.61.016803
CSTR: 32037.14.aps.61.016803
PDF
Get Citation

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    Baidu
    map