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中国物理学会期刊
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He Ping-Ni, Ning Jian-Ping, Qin You-Min, Zhao Cheng-Li, Gou Fu-Jun. Molecular dynamics simulations of low-energy Clatoms etching Si(100) surfaceJ. Acta Physica Sinica, 2011, 60(4): 045209. DOI: 10.7498/aps.60.045209
Citation: He Ping-Ni, Ning Jian-Ping, Qin You-Min, Zhao Cheng-Li, Gou Fu-Jun. Molecular dynamics simulations of low-energy Clatoms etching Si(100) surfaceJ. Acta Physica Sinica, 2011, 60(4): 045209. DOI: 10.7498/aps.60.045209
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Molecular dynamics simulations of low-energy Clatoms etching Si(100) surface

Acta Phys. Sin., 2011, 60(4): 045209.
DOI: 10.7498/aps.60.045209
CSTR: 32037.14.aps.60.045209
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