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Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transfer

Xie Xin-Yun Lin Qing Men Chuan-Ling Liu Wei-Li Xu An-Huai Lin Cheng-Lu

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Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transfer

Xie Xin-Yun, Lin Qing, Men Chuan-Ling, Liu Wei-Li, Xu An-Huai, Lin Cheng-Lu
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  • Abstract views:  7765
  • PDF Downloads:  548
  • Cited By: 0
Publishing process
  • Received Date:  19 April 2002
  • Accepted Date:  02 June 2002
  • Published Online:  03 April 2005

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