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STUDIES OF LATTICE DAMAGE CAUSED BY 1MeV Si+ IMPLANTATION INTO Al0.3Ga0.7As/GaAs SUPERLATTICES AND GaAs AT ELEVATED SUBSTRATE TEMPERATURE

LI DAI-QING GONG BAO-AN WAN YA ZHU PEI-RAN ZHOU JUN-SI XU TIAN-BING MU SHAN-MING ZHAO QING-TAI WANG ZHONG-LIE

Citation:

STUDIES OF LATTICE DAMAGE CAUSED BY 1MeV Si+ IMPLANTATION INTO Al0.3Ga0.7As/GaAs SUPERLATTICES AND GaAs AT ELEVATED SUBSTRATE TEMPERATURE

LI DAI-QING, GONG BAO-AN, WAN YA, ZHU PEI-RAN, ZHOU JUN-SI, XU TIAN-BING, MU SHAN-MING, ZHAO QING-TAI, WANG ZHONG-LIE
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  • Abstract views:  6675
  • PDF Downloads:  613
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Publishing process
  • Received Date:  14 October 1993
  • Published Online:  05 April 1994

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