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Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong. Numerical investigation of SiO2 film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica,
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2006, 55(1): 137-141.
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2005, 54(6): 2814-2820.
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