离子镀制备Cr/W混合过渡层的氢氘辐照效应研究

冯红丽; 苟成玲; 俞坚钢; 韩文佳; 陈哲; 蔡亚南; 朱开贵

doi:10.7498/aps.64.026101

摘要

用双离子束镀膜方法在W基底表面制备不同厚度的Cr薄膜. 用冷场扫描电镜能谱分析仪对镀膜样品成分深度分布进行分析, 使用重离子加速器对镀膜样品进行高能、低束流的氢或氘辐照, 用扫描电镜对样品表面形貌变化进行分析, 运用粒子注入射程模拟软件SRIM对氢粒子在Cr/W双层块体中的射程进行模拟分析. 实验结果表明, 运用双离子束镀膜法能够在膜与基底的接触面区域制得Cr/W混合过渡层; 在高能、低束流的氢或氘辐照下, Cr/W混合过渡层易于使气体滞留而起泡, 双离子束制备的Cr膜层不易聚集氢或氘气体成泡.

关键词:

Abstract

Cr films with different thickness values on W substrates are prepared by double-ion-beam-deposition(DIBD) method. The deep distributions of Cr and W are analyzed by energy dispersive spectrometer. Hydrogen and deuterium irradiation of high energy and low flux are carried out in heavy ion accelerator. The changes of the sample surface morphology are analyzed by scanning electron microscopy. The injection range of hydrogen particles in double layers of Cr/W is simulated by simulation software SRIM. The experimental results demonstrate that a Cr/W mixture transitional layer is formed at the interface between Cr and W using DIBD method; hydrogen and deuterium of high energy and low flux tend to be retained in the Cr/W mixture transitional layer and form gas bubbles, while the Cr film is not easy to retain enough hydrogen or deuterium to form gas bubbles.

Keywords:

作者及机构信息

1.
北京航空航天大学物理科学与核能工程学院, 北京 100191

基金项目: 国际热核聚变实验堆(ITER)计划专项(批准号: 2011GB108008, 2013GB109003)和国家自然科学基金(批准号: 51171006)资助的课题.

Authors and contacts

1.
School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China

Funds: Project supported by the International Thermonuclear Experimental Reactor Program of the Ministry of Science and Technology of China (Grant Nos. 2011GB108008, 2013GB109003) and the General Program of the National Natural Science Foundation of China (Grant No.51171006).

参考文献

[1]	Zhang Z J, Zhong Z H, Shen W P 2005 Mater. Rev. 19 56 (in Chinese) [周张健, 钟志宏, 沈卫平 2005 材料导报 19 56]
[2]	Li Y K, Ji K J 1999 Mater. Rev. 13 5 (in Chinese) [李云凯, 纪康俊 1999 材料导报 13 5]
[3]	L G H, Luo G N, Li J G 2010 Mater. Chin. 29 42 (in Chinese) [吕广宏, 罗广南, 李建刚 2010 中国材料进展 29 42]
[4]	Wang X X, Zhang Y, Zhou H B, Wang J L 2014 Acta Phys. Sin. 63 046103 (in Chinese) [王欣欣, 张颖, 周洪波, 王金龙 2014 63 046103]
[5]	Zou X Q, Xue J M, Wang Y G 2010 Chin. Phys. B 19 036102
[6]	Yang X, Liu S, Zheng H, Zhao Y, Xiong L Y, Wang L B 2003 Acta Phys. Sin. 52 756 (in Chinese) [杨勋, 刘实, 郑华, 赵越, 熊良钺, 王隆保 2003 52 756]
[7]	Liu Y L, Jin S, Zhang Y 2012 Chin. Phys. B 21 016105
[8]	Luo G N, Shu W M, Nishi M 2006 Fusion Eng. Des. 81 957
[9]	Liu Y L 2010 Ph. D. Dissertation (Beijing: Beijing University of Aeronautics and Astronautics) (in Chinese) [刘悦林 2010 博士学位论文(北京: 北京航空航天大学)]
[10]	Lee H, Haasz A, Davis J, MacAulaynewcombe R, Whyte D, Wright G 2007 J. Nucl. Mater. 360 196
[11]	Tyburska B, Alimov V K, Ogorodnikova O V, Schmid K, Ertl K 2009 J. Nucl. Mater. 390-391 651
[12]	Wang W M, Roth J, Lindig S, Wu C H 2003 Nucl. Sci. Tech. 26 429 (in Chinese) [王玟珉, Roth J, Lindig S, Wu C H 2003 核技术 26 429]
[13]	Shu W M, Nakamichi M, Alimov V K, Luo G N, Isobe K, Yamanishi T 2009 J. Nucl. Mater. 390–391 1017
[14]	Zhang W Z, Tang X H, Li J Q, Shi L Q 2013 Acta Phys. Sin. 62 195202 (in Chinese) [张文钊, 唐兴华, 李嘉庆, 施立群 2013 62 195202]
[15]	Loarte A, Becoulet M, Saibene1 G, Sartori1 R, Campbell D J, Eich T, Herrmann A, Laux M, Suttrop W, Alper B, Lomas P J, Matthews G, Jachmich S, Ongena J, Innocente P 2002 Plasma Phys. Control. Fusion 44 1815
[16]	Sugiyama K, Krieger K, Lungn C P, Roth J 2009 J. Nucl. Mater. 390–391 659
[17]	Shu W M, Luo G N, Yamanishi T 2007 J. Nucl. Mater. 367–370 1463
[18]	Luo G N, Umstadter K, Shu W M, Wampler W, Lu G H 2009 Nucl. Instrum. Methods Phys. Res. Sect. B 267 3041
[19]	Causey R, Wilson K, Venhaus T, Wampler W R 1999 J. Nucl. Mater. 266–269 467
[20]	Zhang Y, Wang W, Ren H T, Han W J, Liu F S, Yu J G, Peng S X, Zhu K G 2013 Nucl. Instrum. Methods Phys. Res. Sect. B 307 357
[21]	Anderl R A, Pawelko R J, Schuetz S T 2001 J. Nucl. Mater. 290–293 38
[22]	Kurishita H, Matsuo S, Arakawa H, Sakamoto T, Kobayashi S, Nakai K, Takida T, Kato M, Kawai M, Yoshida N 2012 J. Nucl. Mater. 398 87
[23]	Doerner R P, Baldwin M J, Nishijima D, Roth J, Schmid K 2011 J. Nucl. Mater. 415 717
[24]	Baldwin M J, Doerner R P, Nishijima D, Tokunaga K, Ueda Y 2009 J. Nucl. Mater. 390–391 886
[25]	Xiao D Q, Zhu J G, Zhu J L, Shen L 2011 Thin Film Physics and Devices (Beijing: National Defence Industry Press ) pp66-68 (in Chinese) [肖定全, 朱建国, 朱基亮, 申林2011薄膜物理与器件(北京: 国防工业出版社) 第66–68页]
[26]	Wang P X, Song J S 2002 Permeation of Helium and Hydrogen in Materials (Beijing: National Defence Industry Press) p69 (in Chinese) [王佩璇, 宋家树2002材料中的氦及氚渗透(北京: 国防工业出版社)第69页]
[27]	Wan F R 1993 Irradiation Damage of Metal Materials (Beijing: Science Press) pp87-92 (in Chinese) [万发荣1993金属材料的辐照损伤(北京: 科学出版社)第87–92页]

施引文献

[1]	Zhang Z J, Zhong Z H, Shen W P 2005 Mater. Rev. 19 56 (in Chinese) [周张健, 钟志宏, 沈卫平 2005 材料导报 19 56]
[2]	Li Y K, Ji K J 1999 Mater. Rev. 13 5 (in Chinese) [李云凯, 纪康俊 1999 材料导报 13 5]
[3]	L G H, Luo G N, Li J G 2010 Mater. Chin. 29 42 (in Chinese) [吕广宏, 罗广南, 李建刚 2010 中国材料进展 29 42]
[4]	Wang X X, Zhang Y, Zhou H B, Wang J L 2014 Acta Phys. Sin. 63 046103 (in Chinese) [王欣欣, 张颖, 周洪波, 王金龙 2014 63 046103]
[5]	Zou X Q, Xue J M, Wang Y G 2010 Chin. Phys. B 19 036102
[6]	Yang X, Liu S, Zheng H, Zhao Y, Xiong L Y, Wang L B 2003 Acta Phys. Sin. 52 756 (in Chinese) [杨勋, 刘实, 郑华, 赵越, 熊良钺, 王隆保 2003 52 756]
[7]	Liu Y L, Jin S, Zhang Y 2012 Chin. Phys. B 21 016105
[8]	Luo G N, Shu W M, Nishi M 2006 Fusion Eng. Des. 81 957
[9]	Liu Y L 2010 Ph. D. Dissertation (Beijing: Beijing University of Aeronautics and Astronautics) (in Chinese) [刘悦林 2010 博士学位论文(北京: 北京航空航天大学)]
[10]	Lee H, Haasz A, Davis J, MacAulaynewcombe R, Whyte D, Wright G 2007 J. Nucl. Mater. 360 196
[11]	Tyburska B, Alimov V K, Ogorodnikova O V, Schmid K, Ertl K 2009 J. Nucl. Mater. 390-391 651
[12]	Wang W M, Roth J, Lindig S, Wu C H 2003 Nucl. Sci. Tech. 26 429 (in Chinese) [王玟珉, Roth J, Lindig S, Wu C H 2003 核技术 26 429]
[13]	Shu W M, Nakamichi M, Alimov V K, Luo G N, Isobe K, Yamanishi T 2009 J. Nucl. Mater. 390–391 1017
[14]	Zhang W Z, Tang X H, Li J Q, Shi L Q 2013 Acta Phys. Sin. 62 195202 (in Chinese) [张文钊, 唐兴华, 李嘉庆, 施立群 2013 62 195202]
[15]	Loarte A, Becoulet M, Saibene1 G, Sartori1 R, Campbell D J, Eich T, Herrmann A, Laux M, Suttrop W, Alper B, Lomas P J, Matthews G, Jachmich S, Ongena J, Innocente P 2002 Plasma Phys. Control. Fusion 44 1815
[16]	Sugiyama K, Krieger K, Lungn C P, Roth J 2009 J. Nucl. Mater. 390–391 659
[17]	Shu W M, Luo G N, Yamanishi T 2007 J. Nucl. Mater. 367–370 1463
[18]	Luo G N, Umstadter K, Shu W M, Wampler W, Lu G H 2009 Nucl. Instrum. Methods Phys. Res. Sect. B 267 3041
[19]	Causey R, Wilson K, Venhaus T, Wampler W R 1999 J. Nucl. Mater. 266–269 467
[20]	Zhang Y, Wang W, Ren H T, Han W J, Liu F S, Yu J G, Peng S X, Zhu K G 2013 Nucl. Instrum. Methods Phys. Res. Sect. B 307 357
[21]	Anderl R A, Pawelko R J, Schuetz S T 2001 J. Nucl. Mater. 290–293 38
[22]	Kurishita H, Matsuo S, Arakawa H, Sakamoto T, Kobayashi S, Nakai K, Takida T, Kato M, Kawai M, Yoshida N 2012 J. Nucl. Mater. 398 87
[23]	Doerner R P, Baldwin M J, Nishijima D, Roth J, Schmid K 2011 J. Nucl. Mater. 415 717
[24]	Baldwin M J, Doerner R P, Nishijima D, Tokunaga K, Ueda Y 2009 J. Nucl. Mater. 390–391 886
[25]	Xiao D Q, Zhu J G, Zhu J L, Shen L 2011 Thin Film Physics and Devices (Beijing: National Defence Industry Press ) pp66-68 (in Chinese) [肖定全, 朱建国, 朱基亮, 申林2011薄膜物理与器件(北京: 国防工业出版社) 第66–68页]
[26]	Wang P X, Song J S 2002 Permeation of Helium and Hydrogen in Materials (Beijing: National Defence Industry Press) p69 (in Chinese) [王佩璇, 宋家树2002材料中的氦及氚渗透(北京: 国防工业出版社)第69页]
[27]	Wan F R 1993 Irradiation Damage of Metal Materials (Beijing: Science Press) pp87-92 (in Chinese) [万发荣1993金属材料的辐照损伤(北京: 科学出版社)第87–92页]

[1]	陈宇鹏, 史路林, 王瑜玉, 程锐, 杨杰, 陈良文, 范伟丽, 董俊煜. GeV重离子束辐照LiF引起的晶体内部结构改变. , 2024, 73(15): 156401. doi: 10.7498/aps.73.20240717
[2]	李桑丫, 张艾霖, 徐欣, 吕涛, 王世康, 罗箐. 基于强流离子源的离子束溅射镀膜设备均匀性优化. , 2024, 73(5): 058101. doi: 10.7498/aps.73.20231491
[3]	彭海波, 刘枫飞, 张冰焘, 张晓阳, 孙梦利, 杜鑫, 王鹏, 袁伟, 王铁山, 王建伟. Xe离子束辐照硼硅酸盐玻璃和石英玻璃效应对比研究. , 2018, 67(3): 038101. doi: 10.7498/aps.67.20172117
[4]	梅策香, 张小安, 周贤明, 赵永涛, 任洁茹, 王兴, 雷瑜, 孙渊博, 程锐, 徐戈, 曾利霞. 高能脉冲C6+离子束激发Ni靶的K壳层X射线. , 2017, 66(14): 143401. doi: 10.7498/aps.66.143401
[5]	张洁, 钟昊玟, 沈杰, 梁国营, 崔晓军, 张小富, 张高龙, 颜莎, 喻晓, 乐小云. 强脉冲离子束辐照金属材料烧蚀产物特性分析. , 2017, 66(5): 055202. doi: 10.7498/aps.66.055202
[6]	李杰, 高进, 万发荣. 电子束辐照下的注氘铝的结构变化. , 2016, 65(2): 026102. doi: 10.7498/aps.65.026102
[7]	喻晓, 沈杰, 钟昊玟, 屈苗, 张洁, 张高龙, 张小富, 颜莎, 乐小云. 强脉冲离子束辐照薄金属靶的热力学过程研究. , 2015, 64(17): 175204. doi: 10.7498/aps.64.175204
[8]	姜少宁, 万发荣, 龙毅, 刘传歆, 詹倩, 大貫惣明. 氦、氘对纯铁辐照缺陷的影响. , 2013, 62(16): 166801. doi: 10.7498/aps.62.166801
[9]	徐向东, 刘颖, 邱克强, 刘正坤, 洪义麟, 付绍军. HfO2顶层多层介质膜脉宽压缩光栅的离子束刻蚀. , 2013, 62(23): 234202. doi: 10.7498/aps.62.234202
[10]	陈跃云, 侯春菊, 孔祥山, 刘长松, 王先平, 方前锋. 氧离子导体La2Mo2-xMxO9(M=Cr,W)的理论研究. , 2011, 60(4): 046603. doi: 10.7498/aps.60.046603
[11]	王博宇, 向伟, 戴晶怡, 谈效华, 程亮, 陈磊, 秦秀波. D+离子束轰击时间对氘钛靶特性的影响. , 2011, 60(4): 042902. doi: 10.7498/aps.60.042902
[12]	吴迪, 宫野, 雷明凯, 刘金远, 王晓钢, 刘悦, 马腾才. 高功率离子束辐照膜基双层靶温度场的数值研究. , 2010, 59(7): 4826-4830. doi: 10.7498/aps.59.4826
[13]	宫野, 张建红, 王晓东, 吴迪, 刘金远, 刘悦, 王晓钢, 马腾才. 强流脉冲离子束辐照双层靶能量沉积的数值模拟. , 2008, 57(8): 5095-5099. doi: 10.7498/aps.57.5095
[14]	吴迪, 宫野, 刘金远, 王晓钢, 刘悦, 马腾才. 强流脉冲离子束辐照靶材烧蚀效应二维数值研究. , 2006, 55(1): 398-402. doi: 10.7498/aps.55.398
[15]	吴迪, 宫野, 刘金远, 王晓钢, 刘悦, 马腾才. 强流脉冲离子束辐照靶及其喷发的数值研究. , 2006, 55(7): 3501-3505. doi: 10.7498/aps.55.3501
[16]	万发荣, 褚武扬, 肖纪美, 高桥平七郎. Fe-10%Cr铁素体合金中氢对辐照诱起偏析的影响. , 1996, 45(3): 464-469. doi: 10.7498/aps.45.464
[17]	罗正明. 氢、氘和氚离子在固体表面上的反射. , 1990, 39(9): 1520-1530. doi: 10.7498/aps.39.1520
[18]	刘文宏, 朱德彰, 王震遐, 柳襄怀. Ni/Ti双金属层的离子束混合与固态反应. , 1990, 39(7): 101-105. doi: 10.7498/aps.39.101-2
[19]	高文玉, 李宏成, 王瑞兰, 刘家瑞. Mo/Si体系的离子束混合机制研究. , 1989, 38(5): 728-734. doi: 10.7498/aps.38.728
[20]	高愈尊, 大贯惣明, 高桥平七郎, 佐藤義一, 竹山太郎. 氢离子注入对硅单晶电子辐照缺陷和氢泡形成的影响. , 1988, 37(1): 152-156. doi: 10.7498/aps.37.152

计量

文章访问数: 5343
PDF下载量: 388
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板