自支撑二值化Beynon-Gabor波带片的制备及其单级聚焦特性

李兆国; 孟令彪; 周民杰; 刁凯迪; 易勇; 朱效立; 吴卫东; 张继成

doi:10.7498/aps.65.124207

摘要

Gabor波带片是一种理想的单级聚焦光学元件, 但制备困难. 本文采用聚焦离子束直写技术成功制备出30 环、20扇区的二值化Beynon-Gabor波带片, 其有效面积半径为700 m, 第一环半径90 m. 利用各向异性腐蚀液对硅基底进行开孔, 实现了Beynon-Gabor波带片二值化、自支撑、镂空的结构特征. 在波长为355 nm的激光下测试其光学性能, 结果表明所制备的Beynon-Gabor波带片主光轴上只存在1级衍射叠加后的焦点, 不存在高级衍射焦点, 具有优异的单级聚焦性能.

关键词:

Abstract

The Gabor zone plate is an ideal zone plate with single focus spot, which has the potential applications in spectroscopy, X-ray imaging, etc. However, the Gabor zone plate is very difficult to prepare because of its sinusoidal transmission characteristic, thereby restricting its applications. Traditionally, the zone plate is prepared on the transparent substrate such as quartz glass, polyimide, etc. This restricts the applications of Gabor zone plates in the extreme ultraviolet and soft X-ray frequency band due to the strong absorption of quartz and polyimide in such bands.In this work, we report a method of preparing the self-standing binary Gabor zone plate by using the focused ion beam direct writing. By combining the techniques of focused ion beam and chemical wet etching, the binary Gabor zone plate with self-standing and curved structure is fabricated. The main characteristic parameters of the Gabor zone plate are as follows: the diameter of 1400 m, the radius of the first zone 90 m, the outset zone number of 60, and a gold absorber thickness of 500 nm. The focusing properties of the self-standing binary Gabor zone plate are measured at different transfer distances with a 355 nm laser. The experimental results show that the high-order focus is removed with only the first-order focus spot reserved, and the focal distance is 2.28 cm, which is in agreement with the theoretical value of 2.41 cm. The self-standing Gabor zone plate is free from the influence of the substrate. Therefore, this kind of binary Gabor zone plate has potential applications in ultraviolet and soft X-ray regions.

Keywords:

作者及机构信息

1.
中国工程物理研究院激光聚变研究中心, 绵阳 621900;

2.
西南科技大学材料科学与工程学院, 绵阳 621010;

3.
中国科学院微电子研究所, 微电子器件与集成技术重点实验室, 北京 100029

通信作者: 张继成, zhangjccaep@126.com

基金项目: 国家自然科学基金(批准号: 11404304, 60908023)和国家重大科学仪器设备开发专项(批准号: 2014YQ090709)资助的课题.

Authors and contacts

1.
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;

2.
School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang 621010, China;

3.
Key Laboratory of Microelectronic Devices and Integration Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

Corresponding author: Zhang Ji-Cheng, zhangjccaep@126.com

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 11404304, 60908023) and the National Key Scientific Instrument and Equipment Development Project of China (Grant No. 2014YQ090709).

参考文献

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[3]	Tao S H, Yuan X C, Lin J, Burge R E 2006 Appl. Phys. Lett. 89 031105
[4]	Shu J H, Chen Z Y, Pu J X, Liu Y X 2011 Chin. Phys. B 20 114202
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[8]	Chu Y S, Yi J M, de Carlo F, Shen Q, Lee W K, Wu H J, Wang C L, Wang J Y, Liu C L, Wang C H, Wu S R, Chien C C, Hwu Y, Tkachuk A, Yun W, Feser M, Liang K S, Yang C S, Je J H, Margaritondo G 2008 Appl. Phys. Lett. 92 103119
[9]	Gorelick S, Vila-Comamala J, Guzenko V A, Barrett R, Salom M, David C 2011 J. Synchrotron Radiat. 18 442
[10]	Zhang Y, Qi H J, Yi K, Wang Y Z, Sui Z, Shao J D 2015 Chin. Phys. B 24 054212
[11]	Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 63 018101]
[12]	Zhang J C, Liu Y W, Huang C L, Zhang Q Q, Yi Y, Zeng Y, Zhu X L, Fan Q P, Qian F, Wei L, Wang H B, Wu W D, Cao L F 2014 Chin. Phys. Lett. 31 124204
[13]	Cao L F, Frster E, Fuhrmann A, Wang C K, Kuang L Y, Liu S Y, Ding Y K 2007 Appl. Phys. Lett. 90 053501
[14]	Wang C K, Kuang L Y, Wang Z B, Liu S Y, Ding Y K, Cao L F, Foerster E, Wang D Q, Xie C Q, Ye T C 2007 Rev. Sci. Instrum. 78 053503
[15]	Wang C K, Kuang L Y, Wang Z B, Cao L F, Liu S Y, Ding Y K, Wang D Q, Xie C Q, Ye T C, Hu G Y 2008 Rev. Sci. Instrum. 79 123502
[16]	Beynon T D, Kirk I, Mathews T R 1992 Opt. Lett. 17 544
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[18]	Wei L, Kuang L Y, Fan W, Zang H P, Cao L F, Gu Y Q, Wang X F 2011 Opt. Express 19 21419
[19]	Fan W, Wei L, Zang H P, Cao L F, Zhu B, Zhu X L, Xie C Q, Gao Y L, Zhao Z Q, Gu Y Q 2013 Opt. Express 21 1473
[20]	Greve M M, Vial A M, Stamnes J J, Holst B 2013 Opt. Express 21 28483

施引文献

[1]	Vila-Comamala J, Borris X, Prez-Murano F, Campos J, Ferrer S 2006 Microelectron. Eng. 83 1355
[2]	Wang Y, Yun W, Jacobsen C 2003 Nature 424 50
[3]	Tao S H, Yuan X C, Lin J, Burge R E 2006 Appl. Phys. Lett. 89 031105
[4]	Shu J H, Chen Z Y, Pu J X, Liu Y X 2011 Chin. Phys. B 20 114202
[5]	Gimnez F, Monsoriu J A, Furlan W D, Pons A 2006 Opt. Express 14 11958
[6]	Fabrizio E D, Romanato F, Gentili M, Cabrini S, Kaulich B, Susini J, Barrett R 1999 Nature 401 895
[7]	Srisungsitthisunti P, Ersoy O K, Xu X 2009 J. Opt. Soc. Am. A 26 2114
[8]	Chu Y S, Yi J M, de Carlo F, Shen Q, Lee W K, Wu H J, Wang C L, Wang J Y, Liu C L, Wang C H, Wu S R, Chien C C, Hwu Y, Tkachuk A, Yun W, Feser M, Liang K S, Yang C S, Je J H, Margaritondo G 2008 Appl. Phys. Lett. 92 103119
[9]	Gorelick S, Vila-Comamala J, Guzenko V A, Barrett R, Salom M, David C 2011 J. Synchrotron Radiat. 18 442
[10]	Zhang Y, Qi H J, Yi K, Wang Y Z, Sui Z, Shao J D 2015 Chin. Phys. B 24 054212
[11]	Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 63 018101]
[12]	Zhang J C, Liu Y W, Huang C L, Zhang Q Q, Yi Y, Zeng Y, Zhu X L, Fan Q P, Qian F, Wei L, Wang H B, Wu W D, Cao L F 2014 Chin. Phys. Lett. 31 124204
[13]	Cao L F, Frster E, Fuhrmann A, Wang C K, Kuang L Y, Liu S Y, Ding Y K 2007 Appl. Phys. Lett. 90 053501
[14]	Wang C K, Kuang L Y, Wang Z B, Liu S Y, Ding Y K, Cao L F, Foerster E, Wang D Q, Xie C Q, Ye T C 2007 Rev. Sci. Instrum. 78 053503
[15]	Wang C K, Kuang L Y, Wang Z B, Cao L F, Liu S Y, Ding Y K, Wang D Q, Xie C Q, Ye T C, Hu G Y 2008 Rev. Sci. Instrum. 79 123502
[16]	Beynon T D, Kirk I, Mathews T R 1992 Opt. Lett. 17 544
[17]	Choy C M, Cheng L M 1994 Appl. Opt. 33 794
[18]	Wei L, Kuang L Y, Fan W, Zang H P, Cao L F, Gu Y Q, Wang X F 2011 Opt. Express 19 21419
[19]	Fan W, Wei L, Zang H P, Cao L F, Zhu B, Zhu X L, Xie C Q, Gao Y L, Zhao Z Q, Gu Y Q 2013 Opt. Express 21 1473
[20]	Greve M M, Vial A M, Stamnes J J, Holst B 2013 Opt. Express 21 28483

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