抗反射疏水红外窗口的制备研究

张然; 曹小文; 徐微微; Haraguchi Masanobu; 高炳荣

doi:10.7498/aps.63.054201

摘要

本研究利用纳秒激光两次双光束干涉无掩模烧蚀、快速制备硫化锌（ZnS）微纳结构抗反射疏水表面，使其红外透过率由原来的75%增加到92%，解决了表面淀积抗反射镀层膜层附着力、抗蚀性、热胀失配等问题. 此方法加工过程快速简单，可实现大面积制作，且微纳结构使基底具有疏水性能，疏水角可达145°. 使其在光电子、太阳能、航空航天及红外制导等领域具有广泛的应用前景.

关键词:

激光干涉 /
抗反射 /
疏水

We proposed a facile approach for rapid and maskless production of zinc sulfide microstructure used as antireflective and hydrophobic surface by direct laser interference ablation. This surface could improve the infrared transmittance from 75% to 92%; and the problem of bad film adhesion, corrosion resistance, and the thermal expansion mismatch in the antireflective coating membrane were solved. By this method a quick and simple fabrication, and a large-area production as well as the hydrophobic properties with a contact angle of 145° can be realized. Hence this approach can have future broad applications in areas of optoelectronics, solar energy, aerospace, and infrared guidance etc.

Keywords:

作者及机构信息

1.
吉林大学电子科学与工程学院, 集成光电子学国家重点联合实验室, 长春 130012;

2.
吉林大学机械科学与工程学院, 长春 130022;

3.
Department of Optical Science and Technology, University of Tokushima, 7708506, Japan

基金项目: 国家自然科学基金（批准号：21003060）资助的课题.

Authors and contacts

1.
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;

2.
College of Mechanical Science and Engineering, Jilin University, Changchun 130022, China;

3.
Department of Optical Science and Technology, University of Tokushima, 7708506, Japan

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 21003060).

参考文献

[1]	Wang L, Xu B B, Chen Q D, Ma Z C, Zhang R, Liu Q X, Sun H B 2011 Opt. Lett. 36 3305
[2]	Lai Y Y, Lan Y P, Lu T C 2013 Light Sci. Appl. 2 e76
[3]	Talghader J J, Gawarikar A S, Shea R P 2012 Light Sci. Appl. 1 e24
[4]	Chen S F, Shao M, Guo X, Qian Y, Shi N E, Xie L H, Yang Y, Huang W 2012 Acta Phys. Sin. 61 087801 (in Chinese) [陈淑芬, 邵茗, 郭旭, 钱妍, 石乃恩, 解令海, 杨洋, 黄维 2012 61 087801]
[5]	Xu Q Y, Liu Z T, Li Y P, Wu Q, Zhang M 2011 Acta Phys. Sin. 60 014103 (in Chinese) [徐启远, 刘正堂, 李阳平, 武倩, 张淼 2011 60 014103]
[6]	Zhao S, Xia H, Wu D, Lv C, Chen Q D, Ariga K, Liu L Q, Sun H B 2013 Soft Matter 9 4236
[7]	Xu Y, Sun H B, Ye J Y, Matsuo S, Misawa H 2001 J. Opt. Soc. Am. B: Opt. Phys. 18 1084
[8]	Lepage D, Jimenez A, Beauvais J, Dubowski J J 2013 Light Sci. Appl. 2 e62
[9]	Wu D, Chen Q D, Xia H, Jiao J, Xu B B, Lin X F, Xu Y, Sun H B 2010 Soft Matter 6 263
[10]	Sun H B, Suwa T, Takada K, Zaccaria R P, Kim M S, Lee K S, Kawata S 2004 Appl. Phys. Lett. 85 3708
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[13]	Wang J N, Shao R Q, Zhang Y L, Guo L, Jiang H B, Lu D X, Sun H B 2012 Chem. Asian J. 7 301
[14]	Guo L, Jiang H B, Shao R Q, Zhang Y L, Xie S Y, Wang J N, Li X B, Jiang F, Chen Q D, Zhang T, Sun H B 2012 Carbon 50 1667
[15]	Jin Y, Feng J, Zhang X L, Bi Y G, Bai Y, Chen L, Lan T, Liu Y F, Chen Q D, Sun H B 2012 Adv. Mater. 24 1187
[16]	Xiong W, Zhou Y S, He X N, Gao Y, Mahjouri-Samani M, Jiang L, Baldacchini T, Lu Y F 2012 Light Sci. Appl. 1 e6
[17]	Stavenga D G, Leertouwer H L, Wilts B D 2013 Light Sci. Appl. 2 e100
[18]	Wang L, L Z H, Lin X F, Chen Q D, Xu B B, Sun H B 2013 J. Lightwave Technol 31 276
[19]	Wu D, Wang J N, Wu S Z, Chen Q D, Zhao S, Zhang H, Sun H B, Jiang L, 2011 Adv. Funct. Mater. 21 2927
[20]	Wu D, Wu S Z, Zhao S, Yao J, Wang J N, Chen Q D, Sun H B 2013 Small 9 760
[21]	Abid M I, Wang L, Zhang X L, Xu Y 2012 Chem. Res. Chinese U. 29 1006
[22]	Liu S S, Zhang H B, Zhou J, He J G, Yin H Y 2013 Chin. Phys. B 22 106801
[23]	Ma Kai L H, Zhang H, Xu X L, Gong M G, Yang Z 2009 Chin. Phys. B 18 1942
[24]	Wu S Z, Wu D, Yao J, Chen Q D, Wang J N, Niu L G, Fang H H, Sun H B 2010 Langmuir 26 12012
[25]	Wu D, Niu L G, Chen Q D, Wang R, Sun H B 2008 Opt. Lett. 33 2913
[26]	Wu D, Chen Q D, Xu B B, Jiao J, Xu Y, Xia H, Sun H B 2009 Appl. Phys. Lett. 95
[27]	Xu B B, Ma Z C, Wang H, Liu X Q, Zhang Y L, Zhang X L, Zhang R, Jiang H B, Sun H B 2011 Electrophoresis 32 3378
[28]	Cheng X, Zhang J, Ding T, Wei Z, Li H, Wang Z 2013 Light Sci. Appl. 2 e80

施引文献

[1]	Wang L, Xu B B, Chen Q D, Ma Z C, Zhang R, Liu Q X, Sun H B 2011 Opt. Lett. 36 3305
[2]	Lai Y Y, Lan Y P, Lu T C 2013 Light Sci. Appl. 2 e76
[3]	Talghader J J, Gawarikar A S, Shea R P 2012 Light Sci. Appl. 1 e24
[4]	Chen S F, Shao M, Guo X, Qian Y, Shi N E, Xie L H, Yang Y, Huang W 2012 Acta Phys. Sin. 61 087801 (in Chinese) [陈淑芬, 邵茗, 郭旭, 钱妍, 石乃恩, 解令海, 杨洋, 黄维 2012 61 087801]
[5]	Xu Q Y, Liu Z T, Li Y P, Wu Q, Zhang M 2011 Acta Phys. Sin. 60 014103 (in Chinese) [徐启远, 刘正堂, 李阳平, 武倩, 张淼 2011 60 014103]
[6]	Zhao S, Xia H, Wu D, Lv C, Chen Q D, Ariga K, Liu L Q, Sun H B 2013 Soft Matter 9 4236
[7]	Xu Y, Sun H B, Ye J Y, Matsuo S, Misawa H 2001 J. Opt. Soc. Am. B: Opt. Phys. 18 1084
[8]	Lepage D, Jimenez A, Beauvais J, Dubowski J J 2013 Light Sci. Appl. 2 e62
[9]	Wu D, Chen Q D, Xia H, Jiao J, Xu B B, Lin X F, Xu Y, Sun H B 2010 Soft Matter 6 263
[10]	Sun H B, Suwa T, Takada K, Zaccaria R P, Kim M S, Lee K S, Kawata S 2004 Appl. Phys. Lett. 85 3708
[11]	Wu D, Wu S Z, Chen Q D, Zhang Y L, Yao J, Yao X, Niu L G, Wang J N, Jiang L, Sun H B 2011 Adv. Mater. 23 545
[12]	Xiong P X, Jia X, Jia T Q, Deng L, Feng D H, Sun Z R, Xu Z Z 2010 Acta Phys. Sin. 59 311 (in Chinese) [熊平新, 贾鑫, 贾天卿, 邓莉, 冯东海, 孙真荣, 徐至展 2010 59 311]
[13]	Wang J N, Shao R Q, Zhang Y L, Guo L, Jiang H B, Lu D X, Sun H B 2012 Chem. Asian J. 7 301
[14]	Guo L, Jiang H B, Shao R Q, Zhang Y L, Xie S Y, Wang J N, Li X B, Jiang F, Chen Q D, Zhang T, Sun H B 2012 Carbon 50 1667
[15]	Jin Y, Feng J, Zhang X L, Bi Y G, Bai Y, Chen L, Lan T, Liu Y F, Chen Q D, Sun H B 2012 Adv. Mater. 24 1187
[16]	Xiong W, Zhou Y S, He X N, Gao Y, Mahjouri-Samani M, Jiang L, Baldacchini T, Lu Y F 2012 Light Sci. Appl. 1 e6
[17]	Stavenga D G, Leertouwer H L, Wilts B D 2013 Light Sci. Appl. 2 e100
[18]	Wang L, L Z H, Lin X F, Chen Q D, Xu B B, Sun H B 2013 J. Lightwave Technol 31 276
[19]	Wu D, Wang J N, Wu S Z, Chen Q D, Zhao S, Zhang H, Sun H B, Jiang L, 2011 Adv. Funct. Mater. 21 2927
[20]	Wu D, Wu S Z, Zhao S, Yao J, Wang J N, Chen Q D, Sun H B 2013 Small 9 760
[21]	Abid M I, Wang L, Zhang X L, Xu Y 2012 Chem. Res. Chinese U. 29 1006
[22]	Liu S S, Zhang H B, Zhou J, He J G, Yin H Y 2013 Chin. Phys. B 22 106801
[23]	Ma Kai L H, Zhang H, Xu X L, Gong M G, Yang Z 2009 Chin. Phys. B 18 1942
[24]	Wu S Z, Wu D, Yao J, Chen Q D, Wang J N, Niu L G, Fang H H, Sun H B 2010 Langmuir 26 12012
[25]	Wu D, Niu L G, Chen Q D, Wang R, Sun H B 2008 Opt. Lett. 33 2913
[26]	Wu D, Chen Q D, Xu B B, Jiao J, Xu Y, Xia H, Sun H B 2009 Appl. Phys. Lett. 95
[27]	Xu B B, Ma Z C, Wang H, Liu X Q, Zhang Y L, Zhang X L, Zhang R, Jiang H B, Sun H B 2011 Electrophoresis 32 3378
[28]	Cheng X, Zhang J, Ding T, Wei Z, Li H, Wang Z 2013 Light Sci. Appl. 2 e80

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