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本文采用能量为1 MeV 的中子对SiN钝化的AlGaN/GaN HEMT（高电子迁移率晶体管）器件进行了最高注量为1015 cm-2的辐照. 实验发现: 当注量小于1014 cm-2时，器件特性退化很小，其中栅电流有轻微变化（正向栅电流IF 增加，反向栅电流IR减小），随着中子注量上升，IR迅速降低. 而当注量达到1015 cm-2时，在膝点电压附近，器件跨导有所下降. 此外，中子辐照后，器件欧姆接触的方块电阻退化很小，而肖特基特性退化却相对明显. 通过分析发现辐照在SiN钝化层中引入的感生缺陷引起了膝点电压附近漏电流和反向栅泄漏电流的减小. 以上结果也表明，SiN钝化可以有效地抑制中子辐照感生表面态电荷，从而屏蔽了绝大部分的中子辐照影响. 这也证明SiN钝化的AlGaN/GaN HEMT 器件很适合在太空等需要抗位移损伤的环境中应用.
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关键词:
- AlGaN/GaN HEMT /
- 中子辐照 /
- 缺陷 /
- 退火
SiN-passivated AlGaN/GaN high electron mobility transistors (HEMTs) are exposed to 1 MeV neutron at fluences up to 1015 cm-2. The device shows a negligible degradation at neutron fluences below 1014 cm-2, while the gate leakage current (Ig) slightly changes (the forward IF increases, the reverse IR decreases.) at low fluencies and the IR degrades dramatically at fluences higher than 1014 cm-2. Moreover, near the knee voltage, the transconductance decreases at fluences up to 1015 cm-2, but the Schottky characteristicis become degraded after neutron irradiation. And the 20-hour annealing results do not show any significant annealing recovery effect at room temperature, while the parameters also continues to degrade a little. Therefore, the drain current (near the knee voltage) and the IF degradation of SiN-passivated AlGaN/GaN HEMT can be attributed to the irradiation induced defects in SiN passivation layers, demonstrating that the effectiveness of the SiN layer in passivating surface state in the source-gate spacer and gate-drain spacer is undiminished by neutron irradiation. And the Ohmic contact is so relatively robust to neutron, but the Schottky characteristics degrade obviously. The annealing results prove that the damage induced by neutron may be recovered more difficultly. SiN-passivated AlGaN/GaN HEMT appear to be an attractive candidate for space and terrestrial applications where resistance to displacement damage is required.-
Keywords:
- AlGaN/GaN HEMT /
- neutron-irradiation /
- defects /
- annealing
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[6] McClory J W 2008 Ph. D. Dissertation (Alabama: Air University)
[7] Gu W P, Zhang J C, Wang C, Feng Q, Ma X H, Hao Y 2009 Acta Phys. Sin. 58 1161 (in Chinese) [谷文萍, 张进成, 王冲, 冯倩, 马晓华, 郝跃 2009 58 1161]
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[9] Zhang M L, Wang X L, Xiao H L, Wang C M, Ran J X, Hu G X 2008 Chin. Phys. Lett. 25 1045
[10] McClory J W, Petrosky J C, Sattler M, Jarzen T A 2007 IEEE Trans. Nucl. Sci. 54 1969
[11] Xue F S 2007 Nanoelectron. Dev. Technol. 11 1671 (in Chinese) [薛舫时 2007 纳米器件与技术 11 1671]
[12] Cai S J, Tang Y S, Li R, Wei Y Y, Wang K L 2000 IEEE Trans. Electron Dev. 47 304
[13] Wilson R G, Pearton S J, Abernathy C R, Zavada J M 1995 Appl. Phys. Lett. 66 2238
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[1] Simin G, Hu X, Ilinskaya N, Zhang J, Tarakji A, Kumar A, Yang J, Asif Khan M, Gaska R, Shur M S 2001 IEEE Electron Dev. Lett. 22 53
[2] Daumiller I, Theron D, Gaquiere C, Vescan A, Dietrich R, Wieszt A, Leier H, Vetury R, Mishra U K, Smorchkova I P, Keller S, Nguyen N X, Nguyen C, Kohn E 2001 IEEE Electron Dev. Lett. 22 62
[3] Look D C, Reynolds D C, Hemsky J W, Sizelove J R, Jones R L, Molnar R J 1997 Phys. Rev. Lett. 79 2273
[4] Luo B, Johnson J W, Ren F, Allums K K, Abernathy C R, Pearton S J, Dwivedi R, Fogarty T N, Wilkins R, Dabiran A M, Wowchack A M, Polley C J, Chow P P, Baca A G 2002 J. Electron. Mater. 31 437
[5] Hu X, Choi B K, Barnaby H J, Fleetwood D M, Schrimpf R D, Shojah-Ardalan S L S, Wilkins R, Mishra U K, Dettmer R W 2004 IEEE Trans. Nucl. Sci. 51 293
[6] McClory J W 2008 Ph. D. Dissertation (Alabama: Air University)
[7] Gu W P, Zhang J C, Wang C, Feng Q, Ma X H, Hao Y 2009 Acta Phys. Sin. 58 1161 (in Chinese) [谷文萍, 张进成, 王冲, 冯倩, 马晓华, 郝跃 2009 58 1161]
[8] Polyakov A Y, Smirnov N B, Govorkov A V, Markov A V, Pearton S J, Kolin N G, Merkurisov D I, Boiko V M 2005 J. Appl. Phys. 98 033529
[9] Zhang M L, Wang X L, Xiao H L, Wang C M, Ran J X, Hu G X 2008 Chin. Phys. Lett. 25 1045
[10] McClory J W, Petrosky J C, Sattler M, Jarzen T A 2007 IEEE Trans. Nucl. Sci. 54 1969
[11] Xue F S 2007 Nanoelectron. Dev. Technol. 11 1671 (in Chinese) [薛舫时 2007 纳米器件与技术 11 1671]
[12] Cai S J, Tang Y S, Li R, Wei Y Y, Wang K L 2000 IEEE Trans. Electron Dev. 47 304
[13] Wilson R G, Pearton S J, Abernathy C R, Zavada J M 1995 Appl. Phys. Lett. 66 2238
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