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在三元碳酸盐中加入微量钪,利用大气等离子喷涂方法制备出含钪等离子喷涂氧化物阴极. 制备过程中,在三元碳酸盐原来配比基础上增加12%22%(摩尔百分比)的碳酸钡进行混合, 并将该混合物进行造粒,在造粒过程中加入微量的钪.利用扫描电子显微镜分析了等离子喷涂材料的形态和分布,表明符合等离子喷涂对粉末大小和形状的要求,并解决了等离子喷涂过程中钡的损失问题. 对这种新型氧化物阴极的分解排气过程进行详细分析,结果表明,排气时这种阴极比普通喷涂阴极出气少且分解时间短.对发射性能及寿命进行测试,结果显示这种新型氧化物阴极的性能显著提高,阴极寿命延长.Plasma-sprayed scandia-doped oxide cathode is prepared by doping a small amount of scandia into the triple carbonates and employing the air plasma spraying technique. In the preparation process, a small amount of scandia is added in the shaping process of mixing the triple carbonates with an additional 12%22% of BaCO3 (molar ratio). The shape and the distribution of the feed material analyzed by using scanning electron microscope show that the size and the shape of the feed material meet the requirement for plasma-spraying and that it fully compensates the loss of barium in the plasma-spraying process. The analysis of the decomposition process shows that scandia-doped plasma-sprayed oxide cathode has a shorter process of decomposition and less exhausted gas amount than the commonly-used oxide cathode. The test on the emission performance of the new type oxide cathode shows that the emission performance of scandia-doped plasma-sprayed oxide cathode is much better than that of commonly-used oxide cathode and that the life time of the former is longer than that of the latter.
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Keywords:
- scandia-doped oxide cathode /
- plasma-sprayed /
- current emission density /
- life time
[1] Kern H E 1960 Bell Lab. Rec. 38 451
[2] Wang Q F, Wang X X, Luo J R, Zhao Q L 2010 Acta Phys. Sin. 59 7375 (in Chinese) [ 王其富, 王小霞, 罗积润, 赵庆兰 2010 59 7375]
[3] Liu X Q 1980 Cathode Electronics (Beijing: Science Press) (in Chinese) [刘学悫 1980 阴极电子学 (北京:科学出版社)]
[4] Zhang M, Wang X X, Luo J R, Zhao Q L, Liao X H 2011 IEEE Trans. Electron Devices 58 2143
[5] Saito 1987 Europe Patent 0210805
[6] Masникоб О Ю, Ушакоб A B 2003 Availability Thermionic Cathodes (Moscow College of Technology Physics) (in Chinese) [马斯林尼柯夫О Ю, 乌沙柯夫 А В 祁小贞译 2003 有效热阴极 (莫斯科技术物理学院)]
[7] Robert B. Heimann 2008 Plasma Spray Coating: Principles and Applications (WILEY-VCH Verlag GmbH&Co. KgaA) 81
[8] Lugschider E, Weber T 1990 IEEE Trans. Plasma Sci. 18 969
[9] Zhang E Q 1976 Acta Phys. Sin. 25 23 (in Chinese) [张恩虬 1976 25 23]
[10] Wang X X, Liao X H, Luo J R, Zhao Q L 2006 J. Electron. Inf. Tech. 28 2179 (in Chinese) [王小霞, 廖显恒, 罗积润, 赵庆兰 2006 电子与信息学报 28 2179]
[11] Weon B M, van Dam A, Park G S, Kim I W, Seol S K, Kwon Y B, Hwu Y, Tsai W L, Ruterana P 2003 J. Vac. Sci. Technol. B 21 2184
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[1] Kern H E 1960 Bell Lab. Rec. 38 451
[2] Wang Q F, Wang X X, Luo J R, Zhao Q L 2010 Acta Phys. Sin. 59 7375 (in Chinese) [ 王其富, 王小霞, 罗积润, 赵庆兰 2010 59 7375]
[3] Liu X Q 1980 Cathode Electronics (Beijing: Science Press) (in Chinese) [刘学悫 1980 阴极电子学 (北京:科学出版社)]
[4] Zhang M, Wang X X, Luo J R, Zhao Q L, Liao X H 2011 IEEE Trans. Electron Devices 58 2143
[5] Saito 1987 Europe Patent 0210805
[6] Masникоб О Ю, Ушакоб A B 2003 Availability Thermionic Cathodes (Moscow College of Technology Physics) (in Chinese) [马斯林尼柯夫О Ю, 乌沙柯夫 А В 祁小贞译 2003 有效热阴极 (莫斯科技术物理学院)]
[7] Robert B. Heimann 2008 Plasma Spray Coating: Principles and Applications (WILEY-VCH Verlag GmbH&Co. KgaA) 81
[8] Lugschider E, Weber T 1990 IEEE Trans. Plasma Sci. 18 969
[9] Zhang E Q 1976 Acta Phys. Sin. 25 23 (in Chinese) [张恩虬 1976 25 23]
[10] Wang X X, Liao X H, Luo J R, Zhao Q L 2006 J. Electron. Inf. Tech. 28 2179 (in Chinese) [王小霞, 廖显恒, 罗积润, 赵庆兰 2006 电子与信息学报 28 2179]
[11] Weon B M, van Dam A, Park G S, Kim I W, Seol S K, Kwon Y B, Hwu Y, Tsai W L, Ruterana P 2003 J. Vac. Sci. Technol. B 21 2184
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