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Er ions with an energy range of 300—500 keV are implanted in 6H-SiC crystal samples separately. The values of mean projected range Rp and range straggling ΔRp of Er ions with a dose of 5×1015 cm-2 implanted in 6H-SiC crystal are measured by Rutherford backscattering technique. The measured data are compared with TRIM code prediction. It is seen that the experimental Rp values are in good agreement with theoretical values, but for ΔRp values there are bigger differences between the experimental data and the theoretical values. Research shows that the higher the implanting energy, the heavier the damage is. Perfect recrystallization of 6H-SiC is achieved by annealing at 1400 ℃, however it is accompanied by the segregation of Er ions to the surface.
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Keywords:
- ion implantation /
- projected range and range straggling /
- annealing behavior /
- Rutherford backscattering technique
[1] Ennen H, Schneider J, Pomrenke G, Axmann A 1983 Appl. Phys. Lett. 43 943
[2] Ding W C, Liu Y, Zhang Y, Guo J C, Zuo Y H, Cheng B W, Yu J Z, Wang Q M 2009 Chin. Phys. B 18 3044
[3] Wang J Z, Shi Z Q, Lou H N, Zhang X L, Zuo Z W, Pu L, Ma E, Zhang R, Zheng Y L, Lu F, Shi Y 2009 Acta Phys. Sin. 58 4243 (in Chinese) [王军转、石卓琼、娄昊楠、章新栾、左则文、濮 林、马 恩、张 荣、郑有炓、陆 昉、施 毅 2009 58 4243]
[4] Przybylinska H, Jantsch W, Suprun B, Stepikhova M, Palmetshofer L, Hendorfer G, Kozanecki A, Wilson R J, Sealy B J 1996 Phys. Rev. B 54 2532
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[8] Chen C Y, Chen W D, Wang Y Q, Song S F,Xu Z J 2003 Acta Phys. Sin. 52 736 (in Chinese)[陈长勇、陈维德、王永谦、宋淑芳、许振嘉 2003 52 736]
[9] Derycke V, Soukiassian P G, Amy F, Chabal Y J, DAngelo M D, Enriquez H B, Silly M G 2003 Nat. Mater. 2 253
[10] Gao X, Sun G S, Li J M, Zhang Y X, Wang L, Zhao W S, Zeng Y P 2005 Chin. Phys. 14 599
[11] Lin H F, Xie E Q, Ma Z W, Zhang J, Peng A H, He D Y 2004 Acta Phys. Sin. 53 2780 (in Chinese) [林洪峰、谢二庆、马紫 微、张 军、彭爱华、贺德衍 2004 53 2780] 〖12] Rittenhous T L, Bohn P W, Hossain T K, Adesida I, Lindesay J, Marcus A 2004 J. Appl. Phys. 95 490
[12] Zhang Y, Zhang C H, Zhou L H, Li B S, Yang Y T 2010 Acta Phys. Sin. 59 4130 (in Chinese) [张 勇、张崇宏、周丽宏、李炳生、杨义涛 2010 59 4130]
[13] Li B, Chen Z M, Lin T, Pu H B, Li Q M, Li J 2007 Chin. Phys. 16 3470
[14] Qin X F, Wang F X, Liang Y, Fu G, Zhao Y M 2010 Acta Phys. Sin. 59 6382 (in Chinese) [秦希峰、王凤翔、梁 毅、付 刚、赵优美 2010 59 6382]
[15] Dontas I, Kennou S 2001 Diam. Relat. Mater. 10 13
[16] Kozanecki A, Jeynes C, Barradas N, Sealy B J, Jantsch W 1999 Nucl. Instrum. Meth. B 148 512
[17] Awahara K, Uekusa S, Goto T 1999 Nucl. Instrum. Meth. B 148 507
[18] Kozanecki A, Glukhanyuk V, Jantsch W 2003 Mat. Sci. Eng. B 105 169
[19] Chu W K, Mayer J W, Nicolet M A 1978 Backscattering Spectrometry (New York: Academic) chapt 5, p137—141
[20] Liu X D 2003 Ph.D. Dissertation (Jinan: Shandong University)(in Chinese) [刘向东 2003 博士学位论文(济南:山东大学)]
[21] Qin X F, Chen M, Wang X L, Fu G, Liang Y, Zhang S M 2010 Nucl. Instr. Methods B 268 1585
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[1] Ennen H, Schneider J, Pomrenke G, Axmann A 1983 Appl. Phys. Lett. 43 943
[2] Ding W C, Liu Y, Zhang Y, Guo J C, Zuo Y H, Cheng B W, Yu J Z, Wang Q M 2009 Chin. Phys. B 18 3044
[3] Wang J Z, Shi Z Q, Lou H N, Zhang X L, Zuo Z W, Pu L, Ma E, Zhang R, Zheng Y L, Lu F, Shi Y 2009 Acta Phys. Sin. 58 4243 (in Chinese) [王军转、石卓琼、娄昊楠、章新栾、左则文、濮 林、马 恩、张 荣、郑有炓、陆 昉、施 毅 2009 58 4243]
[4] Przybylinska H, Jantsch W, Suprun B, Stepikhova M, Palmetshofer L, Hendorfer G, Kozanecki A, Wilson R J, Sealy B J 1996 Phys. Rev. B 54 2532
[5] Lei H B, Yang Q Q, Wang Q M 1998 Acta Phys. Sin. 47 1201 (in Chinese) [雷红兵、杨沁清、王启明 1998 47 1201]
[6] Liang J J, Chen W D, Wang Y Q, Chang Y, Wang Z G 2000 Chin. Phys. 9 783
[7] Hansson G V, Du W X, Elfving A, Duteil F 2001 Appl. Phys. Lett. 78 2104
[8] Chen C Y, Chen W D, Wang Y Q, Song S F,Xu Z J 2003 Acta Phys. Sin. 52 736 (in Chinese)[陈长勇、陈维德、王永谦、宋淑芳、许振嘉 2003 52 736]
[9] Derycke V, Soukiassian P G, Amy F, Chabal Y J, DAngelo M D, Enriquez H B, Silly M G 2003 Nat. Mater. 2 253
[10] Gao X, Sun G S, Li J M, Zhang Y X, Wang L, Zhao W S, Zeng Y P 2005 Chin. Phys. 14 599
[11] Lin H F, Xie E Q, Ma Z W, Zhang J, Peng A H, He D Y 2004 Acta Phys. Sin. 53 2780 (in Chinese) [林洪峰、谢二庆、马紫 微、张 军、彭爱华、贺德衍 2004 53 2780] 〖12] Rittenhous T L, Bohn P W, Hossain T K, Adesida I, Lindesay J, Marcus A 2004 J. Appl. Phys. 95 490
[12] Zhang Y, Zhang C H, Zhou L H, Li B S, Yang Y T 2010 Acta Phys. Sin. 59 4130 (in Chinese) [张 勇、张崇宏、周丽宏、李炳生、杨义涛 2010 59 4130]
[13] Li B, Chen Z M, Lin T, Pu H B, Li Q M, Li J 2007 Chin. Phys. 16 3470
[14] Qin X F, Wang F X, Liang Y, Fu G, Zhao Y M 2010 Acta Phys. Sin. 59 6382 (in Chinese) [秦希峰、王凤翔、梁 毅、付 刚、赵优美 2010 59 6382]
[15] Dontas I, Kennou S 2001 Diam. Relat. Mater. 10 13
[16] Kozanecki A, Jeynes C, Barradas N, Sealy B J, Jantsch W 1999 Nucl. Instrum. Meth. B 148 512
[17] Awahara K, Uekusa S, Goto T 1999 Nucl. Instrum. Meth. B 148 507
[18] Kozanecki A, Glukhanyuk V, Jantsch W 2003 Mat. Sci. Eng. B 105 169
[19] Chu W K, Mayer J W, Nicolet M A 1978 Backscattering Spectrometry (New York: Academic) chapt 5, p137—141
[20] Liu X D 2003 Ph.D. Dissertation (Jinan: Shandong University)(in Chinese) [刘向东 2003 博士学位论文(济南:山东大学)]
[21] Qin X F, Chen M, Wang X L, Fu G, Liang Y, Zhang S M 2010 Nucl. Instr. Methods B 268 1585
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